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HIGH RATE DEPOSITION SYSTEMS AND PROCESSES FOR FORMING HERMETIC BARRIER LAYERS

61/731,226 | U.S. Patent Application

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Location ELECTRONIC
Filed Nov. 29, 2012
Case Type Provisional
Status Provisional Application Expired
Child 13/840,752 Patented
Child PCT/US13/71653 Published
Child 15/432,453 Abandoned
Last Updated: 1 year, 5 months ago
Date # Transaction