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Robert Alan Bellman Ta-Ko Chuang Robert George Manley Mark Alejandro Quesada Paul Arthur Sachenik

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HIGH RATE DEPOSITION SYSTEMS AND PROCESSES FOR FORMING HERMETIC BARRIER LAYERS

61/731,226 | U.S. Patent Application

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Location ELECTRONIC

Filed Nov. 29, 2012

Case Type Provisional

Status Provisional Application Expired

Child 13/840,752 Patented

Child PCT/US13/71653 Published

Child 15/432,453 Abandoned

Last Updated: 2 years, 3 months ago

Date	#	Transaction
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HIGH RATE DEPOSITION SYSTEMS AND PROCESSES FOR FORMING HERMETIC BARRIER LAYERS

61/731,226 | U.S. Patent Application

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