throbber
Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 1 of 29 Page ID #:92
`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 1 of 29 Page ID #:92
`
`EXHIBIT E
`
`EXHIBIT E
`
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 2 of 29 Page ID #:93
`
`
`
`111111111111111111111111111!!),111121,1p19111611121,1111111111111111111111111
`
`(12) United States Patent
`Nakamura et al.
`
`(10) Patent No.: US 10,217,916 B2
`(45) Date of Patent:
`Feb. 26, 2019
`
`(54)
`
`TRANSPARENT LIGHT EMITTING DIODES
`
`(71)
`
`Applicant: The Regents of the University of
`California, Oakland, CA (US)
`
`(58) Field of Classification Search
`CPC ... HOlL 2924/00014; HOlL 2924/1815; HOlL
`2224/05599; HO1L 2224/48091;
`(Continued)
`
`(72)
`
`Inventors: Shuji Nakamura, Santa Barbara, CA
`(US); Steven P. DenBaars, Goleta, CA
`(US); Hirokuni Asamizu, Goleta, CA
`(US)
`
`(73)
`
`Assignee: THE REGENTS OF THE
`UNIVERSITY OF CALIFORNIA,
`Oakland, CA (US)
`
`* )
`
`Notice:
`
`Subject to any disclaimer, the term of this
`patent is extended or adjusted under 35
`U.S.C. 154(b) by 292 days.
`
`EP
`JP
`
`(56)
`
`References Cited
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`
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`Appl. No.: 14/461,151
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`(22)
`
`Filed:
`
`Aug. 15, 2014
`
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`
`Prior Publication Data
`
`US 2014/0353707 Al
`
`Dec. 4, 2014
`
`Related U.S. Application Data
`
`(63)
`
`Continuation of application No. 13/622,884, filed on
`Sep. 19, 2012, now Pat. No. 8,835,959, which is a
`(Continued)
`
`(51) Int. Cl.
`HO1L 33/62
`HO1L 33/22
`
`(2010.01)
`(2010.01)
`(Continued)
`
`(52) U.S. Cl.
`CPC
`
` HO1L 33/62 (2013.01); G02B 19/0028
`(2013.01); G02B 19/0061 (2013.01);
`(Continued)
`
`Japanese Office Action dated Oct. 22, 2012, Application No. 2009-
`541339, with English translation.
`(Continued)
`
`Primary Examiner — Michelle Mandala
`(74) Attorney, Agent, or Firm — Gates & Cooper LLP
`
`ABSTRACT
`(57)
`A transparent light emitting diode (LED) includes a plurality
`of III-nitride layers, including an active region that emits
`light, wherein all of the layers except for the active region
`are transparent for an emission wavelength of the light, such
`that the light is extracted effectively through all of the layers
`and in multiple directions through the layers. Moreover, the
`surface of one or more of the III-nitride layers may be
`roughened, textured, patterned or shaped to enhance light
`extraction.
`
`26 Claims, 14 Drawing Sheets
`
`2218
`
`2210
`
`IIPPF206
`aioN 111,
`2204
`=EINE
`.
`:E.
`
`2208
`
`2212
`
`2222
`
`2220
`
`2208
`
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 3 of 29 Page ID #:94
`
`US 10,217,916 B2
`Page 2
`
`Related U.S. Application Data
`
`continuation of application No. 11/954,154, filed on
`Dec. 11, 2007, now Pat. No. 8,294,166.
`
`(60) Provisional application No. 60/869,447, filed on Dec.
`11, 2006.
`
`(51) Int. Cl.
`HO1L 33/54
`HO1L 33/58
`G02B 19/00
`HOlL 33/38
`HOlL 33/60
`(52) U.S. Cl.
`CPC
`
`(2010.01)
`(2010.01)
`(2006.01)
`(2010.01)
`(2010.01)
`
` HO1L 33/22 (2013.01); HO1L 33/54
`(2013.01); HOlL 33/58 (2013.01); HOlL
`33/387 (2013.01); HOlL 33/60 (2013.01);
`HOlL 2224/0554 (2013.01); HOlL 2224/05568
`(2013.01); HOlL 2224/05573 (2013.01); HOlL
`2224/16245 (2013.01); HOlL 2224/48247
`(2013.01); HOlL 2224/48257 (2013.01); HOlL
`2224/49107 (2013.01); HOlL 2224/73265
`(2013.01); HOlL 2924/00014 (2013.01); HOlL
`2924/1815 (2013.01); HOlL 2933/0091
`(2013.01)
`
`(58) Field of Classification Search
`CPC . HO1L 2224/05568; HO1L 2224/05573; HO1L
`2224/16245; HO1L 2224/48247; HO1L
`2224/48257; HO1L 2224/49107; HO1L
`2224/73265; HO1L 2933/0091; HO1L
`33/22; HO1L 33/387; HO1L 33/54; HO1L
`33/58; HO1L 33/60; HO1L 33/62; HO1L
`29/30; GO2B 19/0028; GO2B 19/0061
`257/98; 438/29
`USPC
`See application file for complete search history.
`
`(56)
`
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`362/294
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` HO1L 33/0079
`257/103
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`HO1L 33/0079
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`
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`257/98
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`
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`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 4 of 29 Page ID #:95
`
`US 10,217,916 B2
`Page 3
`
`(56)
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`
`* cited by examiner
`
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 5 of 29 Page ID #:96
`
`U.S. Patent
`
`Feb. 26, 2019
`
`Sheet 1 of 14
`
`US 10,217,916 B2
`
`104
`
`102
`
`100
`
`106
`
`118
`
`110
`
`106
`
`FIG. 1
`CONVENTIONAL LED
`
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 6 of 29 Page ID #:97
`
`U.S. Patent
`
`Feb. 26, 2019
`
`Sheet 2 of 14
`
`US 10,217,916 B2
`
`200
`
`214
`
`202
`216
`206
`
`212
`
`214
`216
`
`206
`
`208
`
`204
`
`208
`
`FIG. 2
`CONVENTIONAL LED
`
`318
`
`304
`
`314
`312
`
`316
`304
`302
`
`\XV\
`
`116111%.%\laMik
`
`317
`310
`308
`306
`
`300
`
`FIG. 3
`CONVENTIONAL LED
`
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 7 of 29 Page ID #:98
`
`U.S. Patent
`
`Feb. 26, 2019
`
`Sheet 3 of 14
`
`US 10,217,916 B2
`
`424
`
`I
`
`412
`
`428
`
`420
`
`416
`
`408
`
`424
`424
`406
`
`____
`
`.,-
`
`402
`400 404
`
`422
`
`416
`
`-...'"--..."
`
`418
`
`.--
`
`1
`
`426
`
`410
`
`424
`
`414
`
`FIG. 4A
`
`418
`
`418 --
`
`FIG. 4B
`
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 8 of 29 Page ID #:99
`
`U.S. Patent
`
`Feb. 26, 2019
`
`Sheet 4 of 14
`
`US 10,217,916 B2
`
`532
`
`522
`
`514
`
`AAAlliALAA
`
`1//712WA
`
`VA
`
`512
`
`510
`
`506
`
`504
`
`508
`
`500
`
`502
`
`520
`
`518
`
`516
`
`524
`
`530
`
`FIG. 5A
`
`526
`
`528
`
`FIG. 5B
`
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 9 of 29 Page ID #:100
`
`U.S. Patent
`
`Feb. 26, 2019
`
`Sheet 5 of 14
`
`US 10,217,916 B2
`
`618 A
`
`A
`
`614
`
`A
`
`610
`
`618
`
`614
`
`620
`
`612
`
`FIG. 6
`
`720
`
`'
`
`.
`
`706
`
`716
`
`716
`(
`
`'
`
`.
`
`.
`
`606
`
`A 608
`
`
`
` 604
`
`600
`
` )02
`
`616
`
`1
`
`712
`.-- 710
`
`706
`
`708
`
`\ ‘
`
`\ ‘
`
`‘ v
`
`v ‘
`
`
`
` 704....
`
`j 00
`
` /718
`
` 702
`
`722
`
`FIG. 7
`
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 10 of 29 Page ID #:101
`
`U.S. Patent
`
`Feb. 26, 2019
`
`Sheet 6 of 14
`
`US 10,217,916 B2
`
`820
`
`824,
`
`832
`
`812
`
`830
`
`816
`
`828
`802
`800
`804
`
`808
`
`822
`
`818
`
`aza
`
`806
`
`ar
`AV AV
`minimilimommumumm
`1631.
`
`,v,ry„,,vyy $14 r
`
`810
`
`818
`
`830
`
`828
`
`------
`...
`
`• "
`
`818
`
`FIG. 8A
`
`FIG. 8B
`
`• •
`
`.........
`
`912
`
`920
`
`902
`
`900
`
`916
`
`914
`
`904
`
`906
`910
`
`908
`
`YVVVYTh,
`
`918
`
`FIG. 9
`
`y .....
`...
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 11 of 29 Page ID #:102
`
`U.S. Patent
`
`Feb. 26, 2019
`
`Sheet 7 of 14
`
`US 10,217,916 B2
`
`1010
`
`1024
`
`1014
`
`................
`
`...
`1018
`
`FIG. 10A
`
`1030
`
`1110
`
`.........
`
`.......
`
`...........
`
`020
`1002
`
`000
`1004
`
`1008
`
`1026
`
`1102
`1100
`1104
`
`1108
`
`1126
`
`//
`
`1022
`
`1006
`
`1
`008
`
`1026
`
`1012
`
`1016
`
`FIG. 10B
`
`1122
`
`1106
`
`1108
`
`1126
`
`1112
`
`1116
`
`1118
`
`1128
`FIG. 11
`
`.....
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 12 of 29 Page ID #:103
`
`U.S. Patent
`
`Feb. 26, 2019
`
`Sheet 8 of 14
`
`US 10,217,916 B2
`
`1224
`
`1206
`1204
`1202
`
`1216
`
`FIG. 12A
`
`1212
`
`FIG. 12B
`
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 13 of 29 Page ID #:104
`
`U.S. Patent
`
`Feb. 26, 2019
`
`Sheet 9 of 14
`
`US 10,217,916 B2
`
`1328
`
`1322
`
`A
`A
`
`1306
`
`1300
`
`1326
`
`1312
`
`1318
`
`1314
`
`1324
`
`1310
`
`1304
`
`1302
`308
`
`1312
`
`1320
`
`1316
`
`1330
`
`" FIG. 13
`
`1420
`
`1422
`
`1406
`
`1400
`
`1404
`
`1408
`
`1416
`
`1424-
`
`1418
`
`1408
`
`1412
`
`1420
`
`FIG. 14
`
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 14 of 29 Page ID #:105
`
`U.S. Patent
`
`Feb. 26, 2019
`
`Sheet 10 of 14
`
`US 10,217,916 B2
`
`1506
`
`1524
`
`1508
`
`or,_1528
`
`1504
`
`1530
`
`1514
`
`1530
`
`1514
`
`1518
`
`-.-- 1522
`
`1526
`
`FIG. 15A
`
`1514 ---..,,,
`
`d-1=1
`
`FIG. 15B
`
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 15 of 29 Page ID #:106
`
`U.S. Patent
`
`Feb. 26, 2019
`
`Sheet 11 of 14
`
`US 10,217,916 B2
`
`1630
`
`1606 1622
`
`v.
`
`/626
`
`1622
`
`1612
`
`dijaM
`ILMI=MENin
`
`I
`
`1614
`
`16
`
`0
`
`1604
`1602
`1608
`
`1612
`
`1616
`
`1624
`
`FIG. 16
`
`FIG. 17
`
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 16 of 29 Page ID #:107
`
`U.S. Patent
`
`Feb. 26, 2019
`
`Sheet 12 of 14
`
`US 10,217,916 B2
`
`1810
`
`1816
`
`FIG. 18B
`
`FIG. 18A
`
`1922
`
`1914
`
`1912
`
`1902
`
`1924
`
`1914
`
`1908
`
`1920
`
`FIG. 19B
`
`1922
`
`FIG. 19A
`
`1910
`
`1906 1900
`
`1
`926
`904
`
`1928
`
`1918
`;1916
`
`1910
`
`1908
`
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 17 of 29 Page ID #:108
`
`U.S. Patent
`
`Feb. 26, 2019
`
`Sheet 13 of 14
`
`US 10,217,916 B2
`
`2008
`
`2018
`
`2010
`
`2000
`
`2006
`
`2006
`
`2022
`
`El
`FIG. 20B
`
`2012
`
`Mal=
`AN M
`
`k
`
`FIG. 20A
`
`2114
`
`21
`
`0
`
`2120
`
`2112
`
`2102
`
`FIG. 21B
`
`20
`
`2
`
`Ai lir
`
` of
`
`2004
`
`2002
`
`1.. Ili_ 2020
`
`2006
`
`20 4
`
`2016
`
`2008
`
`2122
`2126
`
`2116
`
`2106
`
`2104
`
`2124
`
`2108
`
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 18 of 29 Page ID #:109
`
`U.S. Patent
`
`Feb. 26, 2019
`
`Sheet 14 of 14
`
`US 10,217,916 B2
`
`2218
`
`A
`A A
`
`".... "..., S. -... -.,
`
`V
`
`V
`V
`
`FIG. 22A
`
`FIG. 22B
`
`2212
`
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 19 of 29 Page ID #:110
`
`1
`TRANSPARENT LIGHT EMITTING DIODES
`
`US 10,217,916 B2
`
`CROSS-REFERENCE TO RELATED
`APPLICATIONS
`
`This application is a continuation under 35 U.S.C. § 120
`of:
`U.S. Utility patent application Ser. No. 13/622,884, filed
`on Sep. 19, 2012, by Shuji Nakamura, Steven P. DenBaars,
`and Hirokuni Asamizu, entitled, "TRANSPARENT LIGHT
`EMITTING DIODES," now U.S. Pat. No. 8,835,959, issued
`Sep. 16, 2014, which application is a continuation under 35
`U.S.C. § 120 of:
`U.S. Utility patent application Ser. No. 11/954,154, filed
`on Dec. 11, 2007, by Shuji Nakamura, Steven P. DenBaars,
`and Hirokuni Asamizu, entitled, "TRANSPARENT LIGHT
`EMITTING DIODES," now U.S. Pat. No. 8,294,166, issued
`Oct. 23, 2012, which application claims the benefit under 35
`U.S.C. Section 119(e) of:
`U.S. Provisional Patent Application Ser. No. 60/869,447,
`filed on Dec. 11, 2006, by Shuji Nakamura, Steven P.
`DenBaars, and Hirokuni Asamizu, entitled, "TRANSPAR-
`ENT ZEDS,";
`all of which applications are incorporated by reference
`herein.
`This application is related to the following co-pending
`and commonly-assigned applications:
`U.S. Utility application Ser. No. 10/581,940, filed on Jun.
`7, 2006, by Tetsuo Fujii, Yan Gao, Evelyn. L. Hu, and Shuji
`Nakamura, entitled "HIGHLY EFFICIENT GALLIUM
`NITRIDE BASED LIGHT EMITTING DIODES VIA SUR-
`FACE ROUGHENING," now U.S. Pat. No. 7,704,763
`issued Apr. 27, 2010, which application claims the benefit
`under 35 U.S.0 Section 365(c) of PCT Application Serial
`No. US2003/03921, filed on Dec. 9, 2003, by Tetsuo Fujii,
`Yan Gao, Evelyn L. Hu, and Shuji Nakamura, entitled
`"HIGHLY EFFICIENT GALLIUM NITRIDE BASED
`LIGHT EMITTING DIODES VIA SURFACE ROUGHEN-
`ING,";
`U.S. Utility application Ser. No. 11/054,271, filed on Feb.
`9, 2005, by Rajat Sharma, P. Morgan Pattison, John F.
`Kaeding, and Shuji Nakamura, entitled "SEMICONDUC-
`TOR LIGHT EMITTING DEVICE," now U.S. Pat. No.
`8,227,820 issued Jul. 24, 2012;
`U.S. Utility application Ser. No. 11/175,761, filed on Jul.
`6, 2005, by Akihiko Murai, Lee McCarthy, Umesh K.
`Mishra and Steven P. DenBaars, entitled "METHOD FOR
`WAFER BONDING (Al, In, Ga)N and Zn(S, Se) FOR
`OPTOELECTRONICS APPLICATIONS," now U.S. Pat.
`No. 7,344,958 issued Mar. 18, 2008, which application
`claims the benefit under 35 U.S.0 Section 119(e) of U.S.
`Provisional Application Ser. No. 60/585,673, filed Jul. 6,
`2004, by Akihiko Murai, Lee McCarthy, Umesh K. Mishra
`and Steven P. DenBaars, entitled "METHOD FOR WAFER
`BONDING (Al, In, Ga)N and Zn(S, Se) FOR OPTOELEC-
`TRONICS APPLICATIONS,";
`U.S. Utility application Ser. No. 11/697,457, filed Apr. 6,
`2007, by, Benjamin A. Haskell, Melvin B. McLaurin, Steven
`P. DenBaars, James S. Speck, and Shuji Nakamura, entitled
`"GROWTH OF PLANAR REDUCED DISLOCATION
`DENSITY M-PLANE GALLIUM NITRIDE BY
`HYDRIDE VAPOR PHASE EPITAXY," now U.S. Pat. No.
`7,956,360 issued Jun. 7, 2011, which application is a con-
`tinuation of U.S. Utility application Ser. No. 11/140,893,
`filed May 31, 2005, by, Benjamin A. Haskell, Melvin B.
`McLaurin, Steven P. DenBaars, James S. Speck, and Shuji
`Nakamura, entitled "GROWTH OF PLANAR REDUCED
`
`2
`DISLOCATION DENSITY M-PLANE GALLIUM
`NITRIDE BY HYDRIDE VAPOR PHASE EPITAXY," now
`U.S. Pat. No. 7,208,393, issued Apr. 24, 2007, which appli-
`cation claims the benefit under 35 U.S.C. Section 119(e) of
`5 U.S. Provisional Application Ser. No. 60/576,685, filed Jun.
`3, 2004, by Benjamin A. Haskell, Melvin B. McLaurin,
`Steven P. DenBaars, James S. Speck, and Shuji Nakamura,
`entitled "GROWTH OF PLANAR REDUCED DISLOCA-
`TION DENSITY M-PLANE GALLIUM NITRIDE BY
`io HYDRIDE VAPOR PHASE EPITAXY,";
`U.S. Utility application Ser. No. 11/067,957, filed Feb. 28,
`2005, by Claude C. A. Weisbuch, Aurelien J. F. David,
`James S. Speck and Steven P. DenBaars, entitled "HORI-
`ZONTAL EMITTING, VERTICAL EMITTING, BEAM
`is SHAPED, DISTRIBUTED FEEDBACK (DFB) LASERS
`BY GROWTH OVER A PATTERNED SUBSTRATE," now
`U.S. Pat. No. 7,723,745 issued May 25, 2010;
`U.S. Utility application Ser. No. 11/923,414, filed Oct. 24,
`2007, by Claude C. A. Weisbuch, Aurelien J. F. David,
`20 James S. Speck and Steven P. DenBaars, entitled "SINGLE
`OR MULTI-COLOR HIGH EFFICIENCY LIGHT EMIT-
`TING DIODE (LED) BY GROWTH OVER A PAT-
`TERNED SUBSTRATE," now U.S. Pat. No. 7,755,096
`issued Jul. 13, 2010, which application is a continuation of
`25 U.S. Pat. No. 7,291,864, issued Nov. 6, 2007, to Claude C.
`A. Weisbuch, Aurelien J. F. David, James S. Speck and
`Steven P. DenBaars, entitled "SINGLE OR MULTI-COLOR
`HIGH EFFICIENCY LIGHT EMITTING DIODE (LED)
`BY GROWTH OVER A PATTERNED SUBSTRATE," now
`30 U.S. Pat. No. 7,291,864 issued Nov. 6, 2007;
`U.S. Utility application Ser. No. 11/067,956, filed Feb. 28,
`2005, by Aurelien J. F. David, Claude C. A Weisbuch and
`Steven P. DenBaars, entitled "HIGH EFFICIENCY LIGHT
`EMITTING DIODE (LED) WITH OPTIMIZED PHO-
`35 TONIC CRYSTAL EXTRACTOR," now U.S. Pat. No.
`7,582,910 issued Sep. 1, 2009;
`U.S. Utility application Ser. No. 11/621,482, filed Jan. 9,
`2007, by Troy J. Baker, Benjamin A. Haskell, Paul T. Fini,
`Steven P. DenBaars, James S. Speck, and Shuji Nakamura,
`40 entitled "TECHNIQUE FOR THE GROWTH OF PLANAR
`SEMI-POLAR GALLIUM NITRIDE," now U.S. Pat. No.
`7,704,331 issued Apr. 27, 2010, which application is a
`continuation of U.S. Utility application Ser. No. 11/372,914,
`filed Mar. 10, 2006, by Troy J. Baker, Benjamin A. Haskell,
`45 Paul T. Fini, Steven P. DenBaars, James S. Speck, and Shuji
`Nakamura, entitled "TECHNIQUE FOR THE GROWTH
`OF PLANAR SEMI-POLAR GALLIUM NITRIDE," now
`U.S. Pat. No. 7,220,324, issued May 22, 2007, which
`application claims the benefit under 35 U.S.C. Section
`so 119(e) of U.S. Provisional Application Ser. No. 60/660,283,
`filed Mar. 10, 2005, by Troy J. Baker, Benjamin A. Haskell,
`Paul T. Fini, Steven P. DenBaars, James S. Speck, and Shuji
`Nakamura, entitled "TECHNIQUE FOR THE GROWTH
`OF PLANAR SEMI-POLAR GALLIUM NITRIDE,";
`55 U.S. Utility application Ser. No. 11/403,624, filed Apr. 13,
`2006, by James S. Speck, Troy J. Baker and Benjamin A.
`Haskell, entitled "WAFER SEPARATION TECHNIQUE
`FOR THE FABRICATION OF FREE-STANDING (AL, IN,
`GA)N WAFERS," which application claims the benefit
`60 under 35 U.S.0 Section 119(e) of U.S. Provisional Appli-
`cation Ser. No. 60/670,810, filed Apr. 13, 2005, by James S.
`Speck, Troy J. Baker and Benjamin A. Haskell, entitled
`"WAFER SEPARATION TECHNIQUE FOR THE FABRI-
`CATION OF FREE-STANDING
`(AL,
`IN, GA)N
`65 WAFERS,";
`U.S. Utility application Ser. No. 11/403,288, filed Apr. 13,
`2006, by James S. Speck, Benjamin A. Haskell, P. Morgan
`
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 20 of 29 Page ID #:111
`
`US 10,217,916 B2
`
`3
`Pattison and Troy J. Baker, entitled "ETCHING TECH-
`NIQUE FOR THE FABRICATION OF THIN (AL, IN,
`GA)N LAYERS," now U.S. Pat. No. 7,795,146 issued Sep.
`14, 2010, which application claims the benefit under 35
`U.S.0 Section 119(e) of U.S. Provisional Application Ser.
`No. 60/670,790, filed Apr. 13, 2005, by James S. Speck,
`Benjamin A. Haskell, P. Morgan Pattison and Troy J. Baker,
`entitled "ETCHING TECHNIQUE FOR THE FABRICA-
`TION OF THIN (AL, IN, GA)N LAYERS,";
`U.S. Utility application Ser. No. 11/454,691, filed on Jun.
`16, 2006, by Akihiko Murai, Christina Ye Chen, Daniel B.
`Thompson, Lee S. McCarthy, Steven P. DenBaars, Shuji
`Nakamura, and Umesh K. Mishra, entitled "(Al, Ga, In)N
`AND ZnO DIRECT WAFER BONDING STRUCTURE
`FOR OPTOELECTRONIC APPLICATIONS AND ITS
`FABRICATION METHOD," now U.S. Pat. No. 7,719,020
`issued May 18, 2010, which application claims the benefit
`under 35 U.S.0 Section 119(e) of U.S. Provisional Appli-
`cation Ser. No. 60/691,710, filed on Jun. 17, 2005, by
`Akihiko Murai, Christina Ye Chen, Lee S. McCarthy, Steven
`P. DenBaars, Shuji Nakamura, and Umesh K. Mishra,
`entitled "(Al, Ga, In)N AND ZnO DIRECT WAFER BOND-
`ING STRUCTURE FOR OPTOELECTRONIC APPLICA-
`TIONS, AND ITS FABRICATION METHOD," U.S. Pro-
`visional Application Ser. No. 60/732,319, filed on Nov. 1,
`2005, by Akihiko Murai, Christina Ye Chen, Daniel B.
`Thompson, Lee S. McCarthy, Steven P. DenBaars, Shuji
`Nakamura, and Umesh K. Mishra, entitled "(Al, Ga, In)N
`AND ZnO DIRECT WAFER BONDED STRUCTURE
`FOR OPTOELECTRONIC APPLICATIONS, AND ITS
`FABRICATION METHOD,", and U.S. Provisional Appli-
`cation Ser. No. 60/764,881, filed on Feb. 3, 2006, by Akihiko
`Murai, Christina Ye Chen, Daniel B. Thompson, Lee S.
`McCarthy, Steven P. DenBaars, Shuji Nakamura, and
`Umesh K. Mishra, entitled "(Al, Ga, In)N AND ZnO
`DIRECT WAFER BONDED STRUCTURE FOR OPTO-
`ELECTRONIC APPLICATIONS AND ITS FABRICA-
`TION METHOD,";
`U.S. Utility application Ser. No. 11/444,084, filed May
`31, 2006, by Bilge M, Imer, James S. Speck, and Steven P.
`DenBaars, entitled "DEFECT REDUCTION OF NON-PO-
`LAR GALLIUM NITRIDE WITH SINGLE-STEP SIDE-
`WALL LATERM__, EPITAXIAL OVERGROWTH," now
`U.S. Pat. No. 7,361,576 issued Apr. 22, 2008, which claims
`the benefit under 35 U.S.C. 119(e) of U.S. Provisional
`Application Ser. No. 60/685,952, filed on May 31, 2005, by
`Bilge M, Imer, James S. Speck, and Steven P. DenBaars,
`entitled "DEFECT REDUCTION OF NON-POLAR GAL-
`LIUM NITRIDE WITH SINGLE-STEP SIDEWALL LAT-
`ERAL EPITAXIAL OVERGROWTH,";
`U.S. Utility application Ser. No. 11/870,115, filed Oct. 10,
`2007, by Bilge M, Imer, James S. Speck, Steven P. DenBaars
`and Shuji Nakamura, entitled "GROWTH OF PLANAR
`NON-POLAR M-PLANE III-NITRIDE USING META-
`LORGANIC CHEMICAL VAPOR DEPOSITION
`(MOCVD)," now U.S. Pat. No. 8,097,481 issued Jan. 17,
`2012, which application is a continuation of U.S. Utility
`application Ser. No. 11/444,946, filed May 31, 2006, by
`Bilge M, Imer, James S. Speck, and Steven P. DenBaars,
`entitled "GROWTH OF PLANAR NON-POLAR {1-100}
`M-PLANE GALLIUM NITRIDE WITH METALOR-
`GANIC CHEMICAL VAPOR DEPOSITION (MOCVD),"
`now U.S. Pat. No. 7,338,828 issued Mar. 4, 2008, which
`claims the benefit under 35 U.S.C. 119(e) of U.S. Provi-
`sional Application Ser. No. 60/685,908, filed on May 31,
`2005, by Bilge M, Imer, James S. Speck, and Steven P.
`DenBaars, entitled "GROWTH OF PLANAR NON-PO-
`
`4
`LAR {1-100} M-PLANE GALLIUM NITRIDE WITH
`METALORGANIC CHEMICAL VAPOR DEPOSITION
`(MOCVD),";
`U.S. Utility application Ser. No. 11/444,946, filed Jun. 1,
`5 2006, by Robert M. Farrell, Troy J. Baker, Arpan
`Chakraborty, Benjamin A. Haskell, P. Morgan Pattison,
`Rajat Sharma, Umesh K. Mishra, Steven P. DenBaars, James
`S. Speck, and Shuji Nakamura, entitled "TECHNIQUE FOR
`THE GROWTH AND FABRICATION OF SEMIPOLAR
`io (Ga, Al, In, B)N THIN FILMS, HETEROSTRUCTURES,
`AND DEVICES," now U.S. Pat. No. 7,846,757 issued Dec.
`7, 2010, which claims the benefit under 35 U.S.C. 119(e) of
`U.S. Provisional Application Ser. No. 60/686,244, filed on
`Jun. 1, 2005, by Robert M. Farrell, Troy J. Baker, Arpan
`is Chakraborty, Benjamin A. Haskell, P. Morgan Pattison,
`Rajat Sharma, Umesh K. Mishra, Steven P. DenBaars, James
`S. Speck, and Shuji Nakamura, entitled "TECHNIQUE FOR
`THE GROWTH AND FABRICATION OF SEMIPOLAR
`(Ga, Al, In, B)N THIN FILMS, HETEROSTRUCTURES,
`20 AND DEVICES,";
`U.S. Utility application Ser. No. 11/251,365 filed Oct. 14,
`2005, by Frederic S. Diana, Aurelien J. F. David, Pierre M.
`Petroff, and Claude C. A. Weisbuch, entitled "PHOTONIC
`STRUCTURES FOR EFFICIENT LIGHT EXTRACTION
`25 AND CONVERSION IN MULTI-COLOR LIGHT EMIT-
`TING DEVICES," now U.S. Pat. No. 7,768,023 issued Aug.
`3, 2010;
`U.S. Utility application Ser. No. 11/633,148, filed Dec. 4,
`2006, Claude C. A. Weisbuch and Shuji Nakamura, entitled
`30 "IMPROVED HORIZONTAL EMITTING, VERTICAL
`EMITTING, BEAM SHAPED, DISTRIBUTED FEED-
`BACK (DFB) LASERS FABRICATED BY GROWTH
`OVER A PATTERNED SUBSTRATE WITH MULTIPLE
`OVERGROWTH," now U.S. Pat. No. 7,768,024 issued
`35 Aug. 3, 2010, which application claims the benefit under 35
`U.S.0 Section 119(e) of U.S. Provisional Application Ser.
`No. 60/741,935, filed Dec. 2, 2005, Claude C. A. Weisbuch
`and Shuji Nakamura, entitled "IMPROVED HORIZONTAL
`EMITTING, VERTICAL EMITTING, BEAM SHAPED,
`40 DFB LASERS FABRICATED BY GROWTH OVER PAT-
`TERNED SUBSTRATE WITH MULTIPLE OVER-
`GROWTH,";
`U.S. Utility application Ser. No. 11/517,797, filed Sep. 8,
`2006, by Michael Iza, Troy J. Baker, Benjamin A. Haskell,
`45 Steven P. DenBaars, and Shuji Nakamura, entitled
`"METHOD FOR ENHANCING GROWTH OF SEMIPO-
`LAR (Al, In, Ga, B)N VIA METALORGANIC CHEMI-
`CAL VAPOR DEPOSITION," now U.S. Pat. No. 7,575,947
`issued Aug. 18, 2009, which claims the benefit under 35
`so U.S.C. 119(e) of U.S. Provisional Application Ser. No.
`60/715,491, filed on Sep. 9, 2005, by Michael Iza, Troy J.
`Baker, Benjamin A. Haskell, Steven P. DenBaars, and Shuji
`Nakamura, entitled "METHOD FOR ENHANCING
`GROWTH OF SEMIPOLAR (Al, In, Ga, B)N VIA META-
`55 LORGANIC CHEMICAL VAPOR DEPOSITION,";
`U.S. Utility application Ser. No. 11/593,268, filed on Nov.
`6, 2006, by Steven P. DenBaars, Shuji Nakamura, Hisashi
`Masui, Natalie N. Fellows, and Akihiko Murai, entitled
`"HIGH LIGHT EXTRACTION EFFICIENCY LIGHT
`60 EMITTING DIODE (LED)," now U.S. Pat. No. 7,994,527
`issued Aug. 9, 2011, which application claims the benefit
`under 35 U.S.0 Section 119(e) of U.S. Provisional Appli-
`cation Ser. No. 60/734,040, filed on Nov. 4, 2005, by Steven
`P. DenBaars, Shuji Nakamura, Hisashi Masui, Natalie N.
`65 Fellows, and Akihiko Murai, entitled "HIGH LIGHT
`EXTRACTION EFFICIENCY LIGHT EMITTING DIODE
`(LED),";
`
`

`

`Case 2:19-cv-06573-PSG-RAO Document 1-5 Filed 07/30/19 Page 21 of 29 Page ID #:112
`
`US 10,217,916 B2
`
`25
`
`5
`U.S. Utility application Ser. No. 11/608,439, filed on Dec.
`8, 2006, by Steven P. DenBaars, Shuji Nakamura and James
`S. Speck, entitled "HIGH EFFICIENCY LIGHT EMIT-
`TING DIODE (LED)," now U.S. Pat. No. 7,956,371 issued
`Jun. 7, 2011, which application claims the benefit under 35 5
`U.S.0 Section 119(e) of U.S. Provisional Application Ser.
`No. 60/748,480, filed on Dec. 8, 2005, by Steven P. Den-
`Baars, Shuji Nakamura and James S. Speck, entitled "HIGH
`EFFICIENCY LIGHT EMITTING DIODE (LED),", and
`U.S. Provisional Application Ser. No. 60/764,975, filed on io
`Feb. 3, 2006, by Steven P. DenBaars, Shuji Nakamura and
`James S. Speck, entitled "HIGH EFFICIENCY LIGHT
`EMITTING DIODE (LED),";
`U.S. Utility application Ser. No. 11/676,999, filed on Feb.
`20, 2007, by Hong Zhong, John F. Kaeding, Rajat Sharma, is
`James S. Speck, Steven P. DenBaars and Shuji Nakamura,
`entitled "METHOD FOR GROWTH OF SEMIPOLAR (Al,
`In, Ga, B)N OPTOELECTRONIC DEVICES," now U.S.
`Pat. No. 7,858,996 issued Dec. 28, 2010, which application
`claims the benefit under 35 U.S.0 Section 119(e) of U.S. 20
`Provisional Application Ser. No. 60/774,467, filed on Feb.
`17, 2006, by Hong Zhong, John F. Kaeding, Rajat Sharma,
`James S. Speck, Steven P. DenBaars and Shuji Nakamura,
`entitled "METHOD FOR GROWTH OF SEMIPOLAR (Al,
`In, Ga, B)N OPTOELECTRONIC DEVICES,";
`U.S. Utility patent application Ser. No. 11/840,057, filed
`on Aug. 16, 2007, by Michael Iza, Hitoshi Sato, Steven P.
`DenBaars, and Shuji Nakamura, entitled "METHOD FOR
`DEPOSITION OF MAGNESIUM DOPED (Al, In, Ga, B)N
`LAYERS," now U.S. Pat. No. 7,755,172 issued Jul. 13, 30
`2010, which claims the benefit under 35 U.S.C. 119(e) of
`U.S. Provisional Patent Application Ser. No. 60/822,600,
`filed on Aug. 16, 2006, by Michael Iza, Hitoshi Sato, Steven
`P. DenBaars, and Shuji Nakamura, entitled "METHOD FOR
`DEPOSITION OF MAGNESIUM DOPED (Al, In, Ga, B)N 35
`LAYERS,";
`U.S. Utility patent application Ser. No. 11/940,848, filed
`on Nov. 15, 2007, by Aurelien J. F. David, Claude C. A.
`Weisbuch and Steven P. DenBaars entitled "HIGH LIGHT
`EXTRACTION EFFICIENCY LIGHT EMITTING DIODE 40
`(LED) THROUGH MULTIPLE EXTRACTORS," which
`application claims the benefit under 35 U.S.0 Section 119(e)
`of U.S. Provisional Patent Application Ser. No. 60/866,014,
`filed on Nov. 15, 2006, by Aurelien J. F. David, Claude C.
`A. Weisbuch and Steven P. DenBaars entitled "HIGH 45
`LIGHT EXTRACTION EFFICIENCY LIGHT EMITTING
`DIODE (LED) THROUGH MULTIPLE EXTRACTORS,"
`and U.S. Provisional Patent Application Ser. No. 60/883,
`977, filed on Jan. 8, 2007, by Aurelien J. F. David, Claude
`C. A. Weisbuch and Steven P. DenBaars entitled "HIGH 50
`LIGHT EXTRACTION EFFICIENCY LIGHT EMITTING
`DIODE (LED) THROUGH MULTIPLE EXTRACTORS,";
`U.S. Utility patent application Ser. No. 11/940,853, filed
`on Nov. 15, 2007, by Claude C. A. Weisbuch, James S.
`Speck and Steven P. DenBaars entitled "HIGH EFFI- 55
`CIENCY WHITE, SINGLE OR MULTI-COLOUR LIGHT
`EMITTING DIODES (LEDS) BY INDEX MATCHING
`STRUCTURES,", which application claims the benefit
`under 35 U.S.0 Section 119(e) of U.S. Provisional Patent
`Application Ser. No. 60/866,026, filed on Nov. 15, 2006, by 60
`Claude C. A. Weisbuch, James S. Speck and Steven P.
`DenBaars entitled "HIGH EFFICIENCY WHITE, SINGLE
`OR MULTI-COLOUR LED BY INDEX MATCHING
`STRUCTURES,";
`U.S. Utility patent application Ser. No. 11/940,866, filed 65
`on Nov. 15, 2007, by Aurelien J. F. David, Claude C. A.
`Weisbuch, Steven P. DenBaars and Stacia Keller, entitled
`
`6
`"HIGH LIGHT EXTRACTION EFFICIENCY LIGHT
`EMITTING DIODE (LED) WITH EMITTERS WITHIN
`STRUCTURED MATERIALS," now U.S. Pat. No. 7,977,
`694 issued Jul. 12, 2011, which application claims the
`benefit under 35 U.S.0 Section 119(e) of U.S. Provisional
`Patent Application Ser. No. 60/866,015, filed on Nov. 15,
`2006, by Aurelien J. F. David, Claude C. A. Weisbuch,
`Steven P. DenBaars and Stacia Keller, entitled "HIGH
`LIGHT EXTRACTION EFFICIENCY LED WITH EMIT-
`TERS WITHIN STRUCTURED MATERIALS,";
`U.S. Utility patent application Ser. No. 11/940,876, filed
`on Nov. 15, 2007, b

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