throbber
trials@uspto.gov
`
`571-272-7822
`
`
`
`
`
`IPR2014-01030, Paper No. 27
`IPR2014-01493, Paper No. 13
`September 11, 2015
`
`RECORD OF ORAL HEARING
`
`UNITED STATES PATENT AND TRADEMARK OFFICE
`
`- - - - - -
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`- - - - - -
`
`TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
`
`(TSMC) and SAMSUNG ELECTRONICS CO., LTD.,
`
`Petitioners,
`
`v.
`
`DSS TECHNOLOGY MANAGEMENT, INC.,
`
`Patent Owner.
`
`- - - - - - -
`
`Case No. IPR2014-01030
`
`Case No. IPR2014-01493
`
`Patent No. 5,652,084
`
`Technology Center 1700
`
`Oral Hearing Held on Wednesday, August 12, 2015
`
`Before: ERICA A. FRANKLIN; JACQUELINE WRIGHT
`
`
`
`BONILLA; and KRISTINA M. KALAN (via video link), Administrative
`
`Patent Judges.
`
`
`
`

`
`
`
`The above-entitled matter came on for hearing on Wednesday, August
`
`12, 2015, at 2:00 p.m., in Hearing Room B, taken at the U.S. Patent and
`
`Trademark Office, 600 Dulany Street, Alexandria, Virginia.
`
`
`
`2
`
`

`
`APPEARANCES:
`
`
`
`ON BEHALF OF PETITIONER TSMC:
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`DAVID M. O'DELL, ESQ.
`
`Haynes and Boone, LLP
`
`2505 North Plano Road, Suite 4000
`
`Richardson, Texas 75082
`
`972-739-6900
`
`DAVID L. McCOMBS, ESQ.
`
`Haynes and Boone, LLP
`
`2323 Victory Avenue, Suite 700
`
`Dallas, Texas 75219
`
`214-651-5533
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`ON BEHALF OF PETITIONER SAMSUNG:
`
`
`
`
`
`
`
`
`
`
`
`CHRISTOPHER T. MARANDO, ESQ.
`
`Weil, Gotshal & Manges
`
`1300 Eye Street, N.W., Suite 900
`
`Washington, D.C. 20005
`
`202-682-7000
`
`3
`
`
`
`
`
`
`
`
`
`
`
`
`
`

`
`APPEARANCES: (Continued)
`
`
`
`ON BEHALF OF THE PATENT OWNER:
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`ANTON J. HOPEN, ESQ.
`
`ANDRIY LYTVYN, ESQ.
`
`NICHOLAS R. PFEIFER, ESQ.
`
`Smith & Hopen
`
`180 Pine Avenue North
`
`Oldsmar, Florida 34677
`
`800-807-3531
`
`KIRK A. VOSS, ESQ.
`
`Nix Patterson & Roach LLP
`
`205 Linda Drive
`
`Daingerfield, Texas 75638
`
`903-645-7333
`
`4
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`

`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`25
`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`
`P R O C E E D I N G S
`
`(2:00 p. m.)
`
`JUDGE B ONI LLA: This is the tri al hearing for
`
`IPR2014 -01030, and IPR2014 -01493 which has been joined
`
`with this proceed ing, between Peti tioner, Taiwan
`
`Se miconductor M anufacturing Co mpany, in relation t o the
`
`1030 case, and Sa msung Electronic s Co mp an y, in rel ation to
`
`the 1493 case, ve rsus owner of U. S . P atent Nu mb er 5,652,084,
`
`DSS Technology Manage ment Cor poration.
`
`Just a fe w ad mini strative matters b efore we begin.
`
`As you can tell, Judge Kalan is joi ning us fro m Den ver.
`
`Please note the location of the c a mera. It will be ea sier for
`
`her to hear and se e you if you c an s peak to the c a mer a when
`
`you ar e talking to her.
`
`If you wish to pre sent an y de monst ratives, it is
`
`ver y helpful if yo u can describe the slides b y slide nu mber .
`
`That mak es it e asier for us to follo w, and particularl y Judge
`
`Kalan to follow a long, and makes i t easier for the tr anscript,
`
`for us to r ead the transcript later.
`
`As you know, bas ed on our order , e ach part y has
`
`45 minutes to pr e sent thei r argu me nt. Because Petit ioner has
`
`the burden to show unpatentabilit y of the challenged clai ms,
`
`Petitioner will go first, followed by Patent Owne r. Petitioner
`
`ma y rese rve r ebuttal ti me, but it ma y onl y use its time to r ebut
`
`Patent Owner 's a r gu ments.
`
`
`
`5
`
`

`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`
`At this ti me we would like counsel to introduce
`
`the mselves and a n ybod y the y have with the m, sta rting with
`
`Petitioner.
`
`MR. O'DELL: Your Honor, my na me is David
`
`O' Dell. I' m with the law fir m Ha ynes and Boone, a nd I
`
`represent Taiwan Se miconductor M anufacturi ng Co mpany.
`
`With me toda y is David McCo mbs , also fro m the sa me la w
`
`fir m, also repr ese nting what we c all TS MC.
`
`Also with me tod a y is Christopher Marando.
`
`Christopher is fro m the la w fir m o f Weil , Gotshal an d he is
`
`representing Sa msung Electronics.
`
`MR. LYTVYN: Your Honor, my na me is Andri y
`
`Lytv yn. I' m with the la w fir m S mi th & Hopen. And I' m her e
`
`today to r epresent DSS Te chnologies, the Patent Own er.
`
`MR. HOP EN: Go od afternoon, Yo ur Honor. M y
`
`na me is Anton Ho pen. I also repre sent DSS . And with us is
`
`Kirk Voss, who is in related litigation, and Nicholas Pfeifer as
`
`well.
`
`JUDGE B ONI LLA: Petitioner, wo uld you like to
`
`reserve an y ti me for rebuttal?
`
`MR. O'DELL: Yes. Your Honor , Petitioner would
`
`like to reserve 20 minutes for rebuttal.
`
`JUDGE B ONI LL A: So you will h ave 25 minutes.
`
`You ma y begin.
`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`
`
`6
`
`

`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`25
`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`
`MR. O'DELL: M a y it please the B oard. The re is
`
`only one issue in this case. That is the clai m construction of a
`
`single ter m, "seco nd pattern."
`
`The Board in its I nstitution Decision has construed
`
`this ter m in such a manner that the re c an be no question that
`
`the prior art of re cord, Jinbo, cl ear l y anticipates the clai ms .
`
`In fact , DS S pres ents no argu ments of patentabilit y based on
`
`the Board's clai m construction.
`
`I would like to structure my ti me t oday a s follows:
`
`I will provide a b rief overvie w of t he '084 patent inc luding
`
`referenc e to a representative clai m, and then I will provide
`
`additional argu me nts and evidence, so me of which oc curred
`
`after the Institution Decision but a ll of which is on t he record ,
`
`that further supports and confir ms that the Board's cl ai m
`
`construction is correct and, b y extension thereof, tha t the
`
`clai ms in this IP R are unpatentable.
`
`Turning to slide 2, let 's talk about t he '084 patent.
`
`The '084 patent is directed to se mic onduct or fabrication,
`
`specificall y a me t hod called lithography or photolithography.
`
`Clai m 1 is repres entative and it's p rovided here on s lide 2.
`
`The cl ai m is desc ribing what man y people ref er to
`
`as a double patter ning process. Th at is, steps A and B of the
`
`clai m describe a f irst process whe r e a first i maging l a yer is
`
`for med and patte r ned, and then ste ps D and E descri be a
`
`second lithography proc ess whe re a second i maging l a yer is
`
`
`
`7
`
`

`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`25
`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`for med and patte r ned. The result o f this clai m is des cribed in
`
`the "wher ein" cl a use at the end of the clai m that sa ys:
`
`Wh erein, first and second features fro m the first an d second
`
`i maging la yers ar e for med closer together than you could do
`
`with just a single photolithography process, a single exposure.
`
`I have underlined two t er ms in this clai m: First
`
`pattern and secon d pattern. And this is wher e the issue lies
`
`together. DS S a r gues that the seco nd pattern cannot be the
`
`sa me as or c annot be a duplicate of the first pattern.
`
`Turning to slide 3. In the Institution Decision - -
`
`JUDGE B ONI LLA: But the y concede that the y c an
`
`be different , right , just that the y ca n't be the sa me --
`
`MR. O'DELL: Yes, the y are differ ent in that there
`
`are diff erent ti me s and differ ent pa tterning steps, ye s, but the y
`
`can have the sa me pattern or the s a m e group of geomet ries.
`
`JUDGE B ONI LLA: -- geo metries .
`
`MR. O'DELL: Th e y are not duplicate patterns of
`
`each other.
`
`JUDGE B ONI LLA: And your understanding of
`
`Patent Owner 's p osition is that the geo metric patter n can't be
`
`the sa me?
`
`MR. O'DELL: Yes, yes .
`
`Turning to slide 3, in the Institution Decision the
`
`Board corr ectl y c onstrued the ter m second pattern r e l ying on
`
`the direct language fro m the specifi cation. The speci fication
`
`
`
`8
`
`

`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`refers to the seco nd pattern stating that it c an be "any suitable
`
`pattern." And tha t is the clai m con struction that this Board
`
`has adopted.
`
`The Board even went so f ar to address the
`
`argu ment of DSS , that DSS also ma de in its preli min ar y
`
`response, as shown in the last -- in the second sentence f ro m
`
`this excerpt of th e Institution Deci sion, in that the s econd
`
`pattern can be an y geo met ric patte rn, including a pa ttern that
`
`is the sa me as the first pattern .
`
`This is where the challenge resides, Your Honors.
`
`DSS does not agr ee with this clai m construction and in
`
`particular DSS does no t agree that t he second pattern can be
`
`the sa me patte rn, that is, the sa me geo metric pattern as the
`
`first pattern. DS S describes this a s the second patte rn cannot
`
`be a duplicate of the first pattern .
`
`And let me sa y, b y the wa y, that fo r the purposes
`
`of this hearing, I' m not distinguishing between diff e rent
`
`geo metric pattern s or the word dup licate or I think I
`
`so meti mes just sa y a second patter n or a differ ent p attern, but
`
`I don't me an an y distinction betwe en those ter ms.
`
`JUDGE KALAN: Counsel, when you are arguing
`
`difference , though, ar e we arguing pri maril y diff ere nt
`
`geo metries? We are not a rguing difference in ti me o r
`
`difference in plac e or an ything like that?
`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`
`
`9
`
`

`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`
`MR. O'DELL: Yes, Your Honor. I' m refe rring to
`
`different geo metr ies.
`
`Turning to slide 4 , my argu ment to da y is two -fold.
`
`First I will provi de further evidence and argu ments all fro m
`
`the record that show that the Board 's clai m construction of the
`
`ter m second patte rn is corr ect fro m the Institution Decision
`
`and should be ma intained. As disc us sed, if the Boar d
`
`maintains this cla i m construction, this resolves the c ase
`
`because DSS provides no argu ments for patentabilit y based on
`
`the Board's clai m construction.
`
`Secondl y, we will argue toda y that even under
`
`DSS ' cl ai m constr uction, Jinbo still ant icipates the cl ai ms .
`
`Turning to slide 5, as stated in the petition there is
`
`co-pending litigation between the e xact sa me parties here
`
`today over this patent, the '084 pate nt. And since the
`
`Institution Decisi on there has be en a Mark man heari ng and a
`
`clai m construction order in this liti gation.
`
`A portion of this clai m construction order is
`
`reproduced here on slide 5 which is directed to the fi rst and
`
`second patterns. And as you c an s ee, the Court's cl ai m
`
`construction of this ter m is consistent with the Boar d's clai m
`
`construction.
`
`JUDGE B ONI LLA: Is ther e an y d ifference that we
`
`should be concerned about?
`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`
`
`10
`
`

`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`25
`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`
`MR. O'DELL: No, Your Honor, th ere are no
`
`differences, no di fferences of substance that I' m a wa re of
`
`between these cla i m constructions. And, in f act , when we go
`
`to the next slide I will show that th e Court's anal ysis was
`
`si milar to and ess entially the sa me as the Boa rd's an al ysis and
`
`I' m not aware of an y substantive differences betwe e n the two .
`
`Before I le ave thi s slide, howeve r, we have
`
`reproduced a case , a portion of c ase la w that the Co urt relied
`
`on, but it is also t he first c ase ment ioned by both the
`
`Petitioner and the Patent Owner in our briefs, and th at is the
`
`Free Motion Fitness case.
`
`The Free Motion Fitness case state s that the use of
`
`the ter ms first an d second is a co mmon patent law c onvention
`
`to distinguish between repeated instances of an ele ment or
`
`li mitation. And we believe that th at is exactl y what the Board
`
`did in its clai m c onstruction, is that the first and se cond
`
`patterns are mer el y refe rring to rep eated instances of the word
`
`pattern used with the first and se cond patterning steps.
`
`Turning to slide 6, I bring up this p ortion fro m the
`
`Court's clai m construction order be cause I think it is helpful to
`
`show that the Cou rt's anal ysis w as essentially the sa me as this
`
`Board's anal ysis. That is, the Cour t also looked to the
`
`specification and quoted the sa me s entence that this Board
`
`quoted and, that i s, the se cond pattern can be "an y s uitable
`
`pattern."
`
`
`
`11
`
`

`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`
`In fact , the Court noted that the p a tent
`
`specification makes this state ment one, two , thre e, f our, five ,
`
`six ti mes, and the Court sa ys the specification could not be
`
`clearer . A pa rticular pattern is not required for the f irst and
`
`second patterns.
`
`Even the l ast line of this quote f rom the Court's
`
`clai m construction order, the Court further co mment ed: For
`
`exa mple , the first and second patte rns ma y e ach be t he sa me
`
`pattern, just me re l y shifted horizon tall y.
`
`JUDGE KALAN: Counsel, we' re not bound by the
`
`District Court's cl ai m construction, but what weight are you
`
`sa ying we should be giving to the District Court's opinions and
`
`constructions?
`
`MR. O'DELL: As to what weight, I think I a m
`
`bringing the District Court clai m or der here purel y fo r the
`
`point to show that it supports and agrees with your own
`
`individual anal ysis that you conducted in your Institution
`
`Decision.
`
`I agre e, I think all parties agre e thi s Board is not
`
`bound by the Cou rt's clai m construction, but there ar e a couple
`
`of things that are interesting here, and one of which is k ind of
`
`unusual.
`
`First of all , it is t he sa me group of parties talking
`
`about the sa me pa tent. So the ide a s of res judicata do not
`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`
`
`12
`
`

`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`25
`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`exist because we are all here argui ng the sa me patent before
`
`these two tribuna ls.
`
`The se cond thing is the '084 patent has expired,
`
`and because it ha s expired both this Board and the C ourt are
`
`construing the clai m ter ms under the Phillips standard, the
`
`ordinar y and custo mar y meaning of the ter ms . And s o, again,
`
`that's not binding, but I do think it is relevant and he lpful to
`
`show when I sho w that the Court agrees with this Board.
`
`Turning to slide 7, not onl y does th e Court support
`
`and agree with th e Board's construction, but additional
`
`prosecution in the '084 patent fa mi l y furthe r shows that the
`
`Board's construct ion is corre ct .
`
`This prosecution was not presented to the Boa rd at
`
`the ti me of the In stitution, but I thi nk it is helpful, a nd
`
`specificall y in light of the Phillips standard where th e ordinar y
`
`me aning in light of the clai ms , the specification, and the
`
`prosecution hi stor y are to be used, this is helpful.
`
`In slide 7 here , it shows an a mend ment to the
`
`clai ms in a divisional application to the '084 patent. This
`
`divisional application has the exact sa me specification that the
`
`'084 patent has.
`
`In this a mend men t you ca n see , and I have
`
`underlined in red, the P atentee add ed the phrase that said
`
`"second pattern being different tha n said first patter n." What
`
`this tells us is two things: One, th is tells us that the Patentee
`
`
`
`13
`
`

`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`25
`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`recognized that the first and second patterns di d not have to be
`
`different, otherwi se this a mend men t is meaningless.
`
`Two , it shows us that the Patentee knows how to
`
`write clai ms to re quire that the fi rst and second patt erns be
`
`different and chose not to do so in the '084 patent.
`
`Turning now to sl ide 9 --
`
`JUDGE KALAN: One question. You had indicated
`
`--
`
`JUDGE B ONI LLA: I' m sorr y, Judge Kal an, we
`
`can't hea r you ver y well . Can you get a little bit closer to the
`
`mic?
`
`JUDGE KALAN: Counsel, you had indicated that
`
`you hadn't mad e t his argu ment prev iousl y. Ther e wa s no
`
`325(d) or si mil ar argu ment . Ho w s hould we be vie wing this
`
`evidence, as resp onsive or otherwi se?
`
`MR. O'DELL: Th is evidence was p rovided in the
`
`record in the Peti tioner's response as being responsive to the
`
`Patent Owner 's a r gu ment in its reply arguing that the first and
`
`second patterns must be different by the clai ms, so we have
`
`provided this in the record at the time of our response in
`
`response to their argu ments.
`
`An y other questions about the prosecution history?
`
`JUDGE KALAN: Not a t this ti me .
`
`MR. O'DELL: Oka y. I' m proceed ing now to slide
`
`9. In slide 9 I ha ve reproduced cla i m 1 again. The Board's
`
`
`
`14
`
`

`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`25
`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`construction correctl y uses the ter ms first and seco nd
`
`consistently throughout the clai ms .
`
`Wh at I have highlighted here on th e slid e is in red
`
`I've highlighted first and second p atterns -- of course we 've
`
`been discussing these -- but there are actuall y man y other
`
`occurrences of fir st and second in t he clai m, including first
`
`and second i maging la yers which I' ve highlighted in blue.
`
`There is no question that the first a nd second
`
`i maging la yers ca n both be co mprised of, can both be made of
`
`the sa me material , that is , photoresist, as taught in t he
`
`specification and, si mila rl y, this B oard's clai m construction
`
`sa ys that the first and secon d patte rns can both be c o mprised
`
`of, c an both be made of, the sa me geo metric shapes and
`
`patterns.
`
`Turning to slide 10, I bring this up on its face but
`
`also I bring this u p because this wa s an i mportant issue
`
`addressed b y the District Court, ag ain, not di spositive on this
`
`case or not binding on this case, but I think that the Court's
`
`anal ysis here is i nsightful.
`
`First of all , begin ning at line 6 of this portion of
`
`the Mark man hear ing transcript that I have on slide 1 0, the
`
`Court recognizes that the y get the t er ms first and sec ond all
`
`the ti me to refe r t o the sa me thing. And then the Co urt
`
`recognizes or dis cusses with Mr . Voss, who is DSS ' attorne y in
`
`the litigation, beginning at line 11 the Court sa ys: " But to
`
`
`
`15
`
`

`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`25
`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`require that it" -- the first and se cond p atterns -- "be different
`
`would be like r equiring that the ma terial used for the i maging
`
`la yer be dif ferent because one is fi rst and one is se c ond,
`
`wouldn't it? " Wh ich would be inco nsistent with other
`
`testi mon y fro m the Mark man hearin g.
`
`JUDGE B ONI LLA: J ust to be cl e ar, Patent Owner
`
`doesn't make that argu ment her e th at it has to be dif ferent
`
`mate rial, is that c orrect?
`
`MR. O'DELL: No, no, in the I PR there is no
`
`discussion of the content of the fir st and second i ma ging
`
`la yers . I think all parties agre e th at it can be a photoresist.
`
`That's what the s pecification states.
`
`So I b ring this up because it shows an
`
`inconsistency in DSS ' cl ai m constr uction based on the ter ms
`
`first and second. The ter ms first a nd second b y the mselves
`
`don't require diff erent co mposition. Yes, the y requi re t wo
`
`different la yers , a first i maging la yer and a second i maging
`
`la yer . The first i maging la yer is u sed in the first pa tterning
`
`process. The sec ond i maging la ye r is used in the se cond
`
`patterning process.
`
`The y a re diff eren t in ti me and diff erent in order
`
`but the y a re not d ifferent in that the y have to be co mposed of
`
`different mat erial s. Like wise, the first and second p atterns in
`
`the clai m are diff erent in that the y are diff erent in time . The
`
`first patterning step uses the fi rst p attern. The secon d
`
`
`
`16
`
`

`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`25
`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`patterning step uses a se cond patter n. But the content of the
`
`patterns do not have to be diff erent .
`
`And this is consistent with that Fre e Motion
`
`Fitness case I me ntioned earlier. The te r ms fi rst an d second
`
`are just used to d e scribe repe ated i nstances of a ter m in the
`
`clai m.
`
`JUDGE B ONI LLA: Ho w do you r espond to Patent
`
`Owne r's argu ment that if you are going to have the m be the
`
`sa me that doing s o requires this ad ditional step of c hanging
`
`the align ment of t he wa fer?
`
`MR. O'DELL: Le t me address that argu ment head
`
`on. Moving to sli de 12, and this is part of DS S' inoperabilit y
`
`argu ment , and if I can desc ribe this inoperability arg u ment as
`
`follows: DSS sta tes that there are two differ ent tech niques for
`
`achieving the sa me result.
`
`The first one, acc ording to DSS , is described in the
`
`patent as using two diffe rent patte rns, and the second
`
`technique, accord ing to DSS , is des cribed in Jinbo as using the
`
`sa me pattern albe it shifted, and DS S sa ying the evid ence
`
`requiring an extra step of shifting t he pattern or the second
`
`patterning step.
`
`The Board's claim construction covers both of
`
`these techniques. Petitioners sub mit that this inoperability
`
`argu ment that an additional step is required b y the cl ai ms of
`
`shifting the mask relative to t he wa fer is reall y an at te mpt to
`
`
`
`17
`
`

`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`25
`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`li mit the clai ms t o only that disclo sed in the pref err ed
`
`e mbodi ment.
`
`As an analog y, if I can describe a p atent, consider
`
`the patent whe re t he specification mentions a copper wire, a
`
`clai m re cites a metal wi re, and a p rior art ref erence describes
`
`an alu minu m wir e .
`
`JUDGE B ONI LLA: Is that the sit uation we have
`
`here, that Jinbo describes the r eali gn ment but the pa tent itself
`
`does not?
`
`MR. O'DELL: Ji nbo describes aligning, in the
`
`second patterning step, it describes align ing the pattern offset
`
`fro m the first alig n ment. I believe an align ment occ urs in
`
`ever y ti me that p hotolithography i s used. Jinbo's second step,
`
`the align ment has an offset align ment.
`
`JUDGE B ONI LLA: The re's a shif t.
`
`MR. O'DELL: It' s a shift.
`
`JUDGE B ONI LLA: The patent, the challenged
`
`patent here is that specification is going to that sa me shift.
`
`MR. O'DELL: Yes, it does , Your Honor. First of
`
`all, I would like to refe r to figures 2 and 4 of the dra wings in
`
`the '084 patent, a nd it appears f ro m look ing at those figures
`
`that it is the sa me pattern shifted.
`
`So here we a re sh owing on the scre ens, I think 2 is
`
`the botto m one and 4 is the top one , it is the sa me pa ttern
`
`shifted, and this i s the sa me concep t that the Court re cognized
`
`
`
`18
`
`

`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`in its court order t hat the '084 pate nt -- and it also li sts these
`
`figures along wit h other figures -- describes that the first and
`
`second patterns c an be the sa me , just me rel y shifte d in the
`
`'084 patent.
`
`So the '084 patent teaches shifting i n these figures.
`
`And not onl y t hat , it t eaches -- I would like to describe the
`
`specification, the actual words of t he '084 patent an d, that is,
`
`if we c an turn to slide 13, here I've reproduced a por tion of the
`
`'084 patent at col u mn 6 , lines 12 t hrough 16.
`
`And this portion of the paten t is describing the
`
`second patterning step. And here i t sa ys: The se cond i maging
`
`la yer is patterned in accordanc e wi th the second pattern to
`
`for m a second pat terned la yer and a n y suitable lithographic
`
`patterning technique ma y be used.
`
`And there is no q uestion that alignment and
`
`shifting were kno wn in the art and Jinbo is the easiest
`
`evidence of that. Jinbo is a prior a rt docu ment that shows that
`
`align ment and shi fting were well k nown concepts.
`
`JUDGE B ONI LLA: You point us to figure 2 and 4
`
`to show tha t the s pecification shows the shifting. Does the
`
`specification description itself be yond the figures ta lk about
`
`that also?
`
`MR. O'DELL: Th e specification do es not use the
`
`word shift.
`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`
`
`19
`
`

`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`25
`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`
`JUDGE B ONI LLA: Does it use anything that
`
`would suggest shifting?
`
`MR. O'DELL: No, it does not sa y an ything to
`
`suggest shifting other than this lan guage here but it also does
`
`not describe diffe rent or non -duplicate. The specifi cation
`
`reall y leaves it up to the dra wing.
`
`JUDGE F RANKLIN: In the portion of the
`
`specificatio n that you have reprodu ced here , refe rrin g to an y
`
`suitable patterning technique, it se e ms that the Pate nt Owner
`
`is placing a gre at e mphasis on that ter m suitable and providing
`
`so me definition or explanation for it.
`
`Wh at is your explanation of that te r m?
`
`MR. O'DELL: Th ank you for that q uestion. So
`
`according to the Patent Owner , using the sa me patterns for
`
`both the first and second pattern, th e sa me geo metrie s, the
`
`sa me patterns, is not suitable.
`
`Yet, the Patent Owner ad mits that Jinbo is a
`
`technique that ac hieves the sa me r esult. Jinbo is ev idence --
`
`I' m not using it n ow as prior a rt - - Jinbo is evidence that it is
`
`suitable and operable to use the sa me pattern .
`
`JUDGE F RANKLIN: So are you s a ying that your
`
`understanding of the ter m suitable there me a ns an y k nown
`
`technique?
`
`MR. O'DELL: An y known te chnique would work.
`
`An y technique that works. And Ji nbo is evidence of both of
`
`
`
`20
`
`

`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`those, that using the sa me pattern works. It achieves the
`
`result.
`
`And, in fact , I bel ieve the DSS has slides that sa y
`
`that Jinbo achieves this result, albeit through the use of using
`
`the sa me patte rn. That means to me that the s a me pattern
`
`works. Using the sa me pattern is s uitable. It is ope rable.
`
`JUDGE KALAN: What about the c o mprising ter m
`
`in the prea mble , does that su pport your a rgu ment that another
`
`step could be included or does that work against you?
`
`MR. O'DELL: Yes, thank you, Judge Kalan . The
`
`clai m is open -end ed. The clai m does not sa y consisting of
`
`these steps. DSS' argu ment is that additional steps would be
`
`required, that is, shifting the alignment to achieve the result of
`
`the clai m, but the clai m s a ys co mpr ising, and that me ans
`
`additional steps can be added to the clai ms , which i s, in f act,
`
`what man y d ependent clai ms do an d still be within t he scope
`
`of the clai ms .
`
`So DSS' argu men t that an additional align ment step
`
`is needed or ne ce ssar y, A, contradi cts the figures of the
`
`specification and contradicts this language that an y suitable
`
`lithographic patterning technique can be used, but it also
`
`contradicts the fa ct that the clai m uses the word co mprising.
`
`The cl ai m is an o pen -ended clai m. The Patentee did not
`
`choose to make th is a closed -ended consisting of clai m.
`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`
`
`21
`
`

`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`25
`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`
`I' m going to turn to slide 14 now. In su mmar y, for
`
`the first a rgu ment , the Board should confir m its claim
`
`construction. Thi s issue has been a rgued and decide d in the
`
`Institution Decisi on because this ar gu ment was made in DSS'
`
`preli minar y response. It is further confir med b y the Mark man
`
`hearing and clai m construction order for the District Court a nd
`
`b y the patent exa mination of the '0 84 patent fa mil y.
`
`Once the Board a ffir ms its results, this is
`
`deter minative -- c lai m construction -- this is deter mi native.
`
`That is, DSS pres ents no argu ments for patentabilit y based on
`
`this clai m construction.
`
`Before I go on to this next step, ar e there an y
`
`questions?
`
`JUDGE B ONI LLA: Just to let yo u know you have
`
`less than a minut e of the ti me you' ve allocated for yourself.
`
`MR. O'DELL: Oh, my goodness.
`
`JUDGE B ONI LLA: You can take more ti me if you
`
`like.
`
`MR. O'DELL: I would like to tak e more ti me .
`
`Thank you . I wil l move at a faster pace .
`
`So the second a rgu ment is even un der DSS'
`
`construction, Jinbo anticipates the clai ms . I would l ike to
`
`make a fe w ver y quick points about this. On slide 15 I have
`
`reprod uced figure 1 ( E) of Jinbo. Contrar y to DSS ' argu ment ,
`
`Jinbo teaches two non -duplicate patterns.
`
`
`
`22
`
`

`
`Case Nos. IPR2014-01030, and IPR2014-01493
`Patent No. 5,652,084
`
`
`Figure 1 ( E) of Jinbo shown here s hows the result
`
`of two patte rning steps. In the fi rst patterning step a first
`
`pattern is used to make fe atures 13 b . The y are the s horter,
`
`darker f eatures. And a second patterning step uses the second
`
`pattern to produce fe atures 15 a. The y are the taller , lighter
`
`figures or f eature s in the figure .
`
`And as can be see n b y looking at th is figure, these
`
`features a re in d if ferent locations. And this is ver y i mportant,
`
`Your Honors. Th ese fe atures shown in this figure r e fer to
`
`metal lines or ele ctrodes in an inte grated circuit and the y are
`
`in different locati ons. Wh at that means is these a re going to
`
`make diffe rent co nnec tions in that integrated circuit.
`
`And this shows th at the t wo pattern s, the first and
`
`second patterns used in Jinbo are d ifferent bec ause t he y
`
`produce features in different locati ons. A shifted pa ttern is a
`
`different pattern .
`
`If you turn to slid e 16, we actuall y discussed this
`
`with DSS' expert , Dr. Mack . And we t alked about shifting a
`
`pattern and a specified distance to the left . And Dr . M ack,
`
`DSS ' expert Dr. Mack could not b e more clea r. He stated: "A
`
`pattern that's plac ed in a different position is a diffe rent
`
`pattern."
`
`Moving ahead to slide 18, I did sa y we were going
`
`to discuss, the y a re separ ate in ti me, but I do want t o re mind
`
`1
`
`2
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22

This document is available on Docket Alarm but you must sign up to view it.


Or .

Accessing this document will incur an additional charge of $.

After purchase, you can access this document again without charge.

Accept $ Charge
throbber

Still Working On It

This document is taking longer than usual to download. This can happen if we need to contact the court directly to obtain the document and their servers are running slowly.

Give it another minute or two to complete, and then try the refresh button.

throbber

A few More Minutes ... Still Working

It can take up to 5 minutes for us to download a document if the court servers are running slowly.

Thank you for your continued patience.

This document could not be displayed.

We could not find this document within its docket. Please go back to the docket page and check the link. If that does not work, go back to the docket and refresh it to pull the newest information.

Your account does not support viewing this document.

You need a Paid Account to view this document. Click here to change your account type.

Your account does not support viewing this document.

Set your membership status to view this document.

With a Docket Alarm membership, you'll get a whole lot more, including:

  • Up-to-date information for this case.
  • Email alerts whenever there is an update.
  • Full text search for other cases.
  • Get email alerts whenever a new case matches your search.

Become a Member

One Moment Please

The filing “” is large (MB) and is being downloaded.

Please refresh this page in a few minutes to see if the filing has been downloaded. The filing will also be emailed to you when the download completes.

Your document is on its way!

If you do not receive the document in five minutes, contact support at support@docketalarm.com.

Sealed Document

We are unable to display this document, it may be under a court ordered seal.

If you have proper credentials to access the file, you may proceed directly to the court's system using your government issued username and password.


Access Government Site

We are redirecting you
to a mobile optimized page.





Document Unreadable or Corrupt

Refresh this Document
Go to the Docket

We are unable to display this document.

Refresh this Document
Go to the Docket