Model EQ-9-N
`LDLS™
`Laser-Driven Light Source
`
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`1
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`Operation Manual
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`Revision 6 September 2015
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`Part Number DOC-6709
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`Energetiq Ex. 2062, page 1 - IPR2015-01362
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`Copyright © 2015 Energetiq Technology Inc. All rights reserved.
`
`Energetiq products are covered by US and foreign patents. All technical information, including
`drawings, schematics and specifications contained in this manual are the property of Energetiq
`and shall not be reproduced in whole or in part without the written consent of Energetiq. The
`content of this manual is subject to change without notice.
`
`Energetiq Technology Inc.
`7 Constitution Way, Woburn, MA 01801 USA
`Tel. +1 (781) 939-0763
`Fax +1 (781) 939-0769
`E-mail: support@energetiq.com
`http://www.energetiq.com
`
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`
`
`Declaration of Conformity
`
`
`We, the manufacturers
`
`
`Energetiq Technology Inc.
`7 Constitution Way
`Woburn, Massachusetts USA
`
`hereby declare that the product family
`
`
`LDLS™ Laser-Driven Light Source
`Model EQ-9-N High Brightness Broadband Light Source
`
`
`is in conformity with the requirements of the following standards
`
`
`EN61010-1 (2010)
`
`CISPR 11:2009
`
`IEC61000-4-2:2008
`IEC61000-4-3:2010
`IEC61000-4-6:2008
`IEC61000-4-8:2009
`EN61326-1:2013
`
`EN60825-1 (2007)
`
`Safety Requirements for Electrical Equipment for Measurement,
`Control and Laboratory Use: Part 1 – General Requirements
`Industrial, scientific and medical equipment - Radio-frequency
`disturbance characteristics - Limits and methods of
`measurement
`Electrostatic Discharge Immunity
`Radiated Electromagnetic Field Immunity
`Radio Frequency Common Mode Immunity
`Power Frequency Magnetic Field Immunity
`Electrical equipment for measurement, control and laboratory
`use. EMC requirements. General requirements
`Safety of laser products - Part 1: Equipment classification and
`requirements
`
`
`
`
`in accordance with the provisions of
`
`2006/95/EC
`2004/108/EC
`
`
`Signed,
`
`EU Low Voltage Directive
`EU Electromagnetic Compatability Directive.
`
`
`
`
`
`
`
`
`
`15 October 2014
`Date
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`3
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`
`
`Paul Blackborow, CEO
`
`at Woburn, Massachusetts USA
`
`
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`Energetiq Ex. 2062, page 3 - IPR2015-01362
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`TABLE OF CONTENTS
`
`Chapter 1 ...................................................................................................................................................... 1
`
`General Information ........................................................................................................................... 1
`
`Safety ............................................................................................................................................... 1
`
`Chapter 2 ...................................................................................................................................................... 6
`
`Description ........................................................................................................................................... 6
`
`General ........................................................................................................................................... 6
`
`Specifications ................................................................................................................................. 7
`
`System Description ...................................................................................................................... 8
`
`Power Supply Controller ............................................................................................................. 9
`
`Lamp House ................................................................................................................................ 12
`
`Chapter 3 .................................................................................................................................................... 14
`
`Installation........................................................................................................................................... 14
`
`Unpacking .................................................................................................................................... 14
`
`Connections ................................................................................................................................. 14
`
`Installation Procedure ................................................................................................................ 21
`
`Chapter 4 .................................................................................................................................................... 22
`
`Operation ............................................................................................................................................ 22
`
`Starting .......................................................................................................................................... 22
`
`Stopping ....................................................................................................................................... 22
`
`Chapter 5 .................................................................................................................................................... 24
`
`Troubleshooting ................................................................................................................................ 24
`
`Fault Indicator Block Diagram ................................................................................................ 24
`
`Appendix A ………………………………………………………………………………………………………………………..27
`
` RS-485 Specification …………………………………………………………………………………………………..27
`
` 1) Physical Interface ………………………………………………………………………………………
`
` 1.1) Connector ………………………………………………………………………………………..
`
` 1.2) Pin assignments ...............................................................................................
`
` 1.3) Electrical
`
` 1.4) Communication settings..................................................................................
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`1.5) Response time
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`2) Command Format ................................................................................................. 27
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`2.1) Character set ............................................................................................... 27
`
` 2.2) Packet structure ........................................................................................... 27
`
` 2.3) Checksum ..................................................................................................... 27
`
` 2.4) Errors ............................................................................................................ 27
`
` 3) Response Format ...................................................... Error! Bookmark not defined.
`
` 3.1) Character set ................................................................................................. 28
`
` 3.2) Response ....................................................................................................... 28
`
` 3.3) Packet structure ............................................................................................ 28
`
` 3.4) Packet count .................................................................................................. 28
`
` 3.5) Checksum ...................................................................................................... 28
`
` 3.6) Examples ....................................................................................................... 28
`
` 4) Command Set .......................................................................................................... 29
`
` 4.1) Query LH temperature .................................................................................. 29
`
` 4.2) Query TEC voltage ......................................................................................... 29
`
` 4.3) Query laser current ....................................................................................... 29
`
` 4.4) Query bulb hours .......................................................................................... 30
`
` 4.5) Query bulb cycles .......................................................................................... 30
`
` 4.6) Query laser status ......................................................................................... 30
`
` 4.7) Query plasma (lamp) status .......................................................................... 31
`
` 4.8) Query laser regulation status ........................................................................ 31
`
` 4.9) Query ambient temperature status .............................................................. 31
`
` 4.10) Query lamp head status ............................................................................... 32
`
` 4.11) Query controller status ................................................................................ 32
`
` 4.12) Query power status ...................................................................................... 32
`
` 4.13) Query external interlock status.................................................................... 33
`
` 4.14) Query operate switch status ........................................................................ 33
`
` 4.15) Reset bulb hour counter .............................................................................. 34
`
` 4.16) Query version ............................................................................................... 34
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` 5) Revision History ........................................................................................................ 35
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`C h a p t e r 1
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`GENERAL INFORMATION
`
`WARNING
`
`This unit emits ultraviolet (UV) radiation that is
`harmful to humans. Avoid exposure to the
`direct or reflected output beam. Make certain
`that the appropriate output beam shields and
`optics are in place prior to energizing the unit.
`All
`interlocks must be satisfied prior
`to
`operation; failure to do so may
`lead to
`hazardous conditions.
`
`CAUTION
`
`The EQ-9-N emits dangerous levels of UV
`radiation. Even short exposures to skin or eyes
`may cause burns. Ensure that only authorized
`personnel are in the vicinity of source during
`operation. Personnel in vicinity of operating
`source should wear protective eyewear, clothing,
`and gloves. Lighted UV warning lights and signs
`posted on doors to lab areas may help prevent
`accidental exposure.
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`Safety
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`WARNING
`
`The EQ-9-N utilizes an internal Class 4 IR laser
`capable of causing severe injury to eyes or skin.
`Do not open or attempt to service this unit.
`Contact Energetiq regarding any problems with
`the unit.
`
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`General Precautions
`
`The output beam from the EQ-9-N should be blocked when not in use with an electronic
`shutter or other appropriate beam blocking device. Due to the possibility of generating ozone
`with some models of EQ-9-N when ambient oxygen is exposed to short wavelength light, the
`beam should always be enclosed in an appropriate beam pipe, tube, or enclosed space. We
`suggest purging any beam transport space with dry nitrogen gas.
`
`The EQ-9-N source must also be cabled correctly and connected to a 12VDC power source
`with a protective earth ground prior to operation.
`
`Refer to the Installation section of this manual in Chapter 3 for details of the facilities
`connections.
`
`There are no user-serviceable parts inside the EQ-9-N. For any problems encountered during
`operation, please contact Energetiq Technology for assistance. If there is a component
`failure, do not attempt to open the Power Supply Controller or Lamp House enclosure
`of the EQ-9-N.
`
`The EQ-9-N utilizes a quartz lamp containing a high-pressure gas fill. Explosion of
`the lamp and possible injury from flying fragments can occur if the lamp is
`mishandled.
`
`Do not open the enclosure of either the Lamp House or the Power Supply Controller.
`Dangerous invisible infrared laser beams and hazardous voltages exist inside the
`Lamphouse. Opening the chassis both voids the warranty and exposes the user to dangerous
`radiation and hazardous voltages.
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`EQ-9 Operation Manual Rev. 6
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`CAUTION
`
`Use of controls or adjustments or performance of procedures
`other than those specified herein may result in hazardous
`radiation exposure.
`
`
`
`
`
`Laser Information
`
`The EQ-9-N uses a patented (U.S. Patent #7,435,982, others pending) laser drive system to
`excite a plasma that radiates in the UV as well as the visible bands. A class 4 laser is located in
`the Lamphouse enclosure. The optical configuration of the Lamp House ensures that the
`direct laser beam cannot exit the unit. The EQ-9-N laser product is designated as Class 1
`during all normal operation.
`
`
`
`The parameters of the non-accessible internal laser are given below in Table 1.
`
`Wavelength
`
`Emission Type
`
`974 nm
`
`CW
`
`Laser Power for classification
`
`<8 mW via 7mm measurement
`aperture
`
`Beam Diameter
`
`~25 mm at aperture
`
`Divergence
`
`>100 mRad
`
`Transverse Beam Mode
`
`Diffuse
`
`Table 1: Embedded Laser Parameters
`
`
`No regular maintenance is required for the EQ-9-N. Any service to the system must be
`performed only by factory authorized and trained technicians. To avoid injury, under no
`circumstances should the user open or modify the Lamp House or Power Supply Controller
`enclosure.
`
`The unit must not be operated if the covers are removed or it is defective in any way. Contact
`Energetiq if any problems with the equipment are suspected.
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`EQ-9 Operation Manual Rev. 6
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`Labels and Safety Notification
`
`
`
`The following safety labels appear on the product. Figure 1 shows the location of each label
`on the EQ-9-N system.
`
`UV Hazard warning label – indicates hazardous levels of UV
`light are present.
`
`
`
`Manufacturer’s identification label – gives the manufacturer’s
`name, the model number, serial number and date of manufacture
`of the equipment.
`
`
`
`Explanatory label – states the classification of the laser product.
`Class 1 is the lowest hazard level classification.
`
`Certification label – states that the equipment has been tested
`and verified to meet the standards indicated.
`
`Non-interlocked housing label – notifies of a potential hazard
`when covers are removed.
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`Certification
`Label
`
`Non-interlocked
`Housing Label
`
`Manufacturer’s
`Identification label
`
`Explanatory
`Label
`
`
`
`UV Hazard
`Warning Label
`
`
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`
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`Safety Interlocks
`
`Figure 1: Safety Label Locations
`
`The EQ-9-N is equipped with interlocks to prevent operation of the device when any of the
`following conditions are present:
`
`1. An external interlock is open
`
`
`
`External Interlock
`
`External interlock pins are provided for the customer’s use (see Chapter 3 for connection
`details). Any suitable normally-open contact or solid-state switch can operate the interlock
`circuit.
`
`The interlock circuit must be connected to enable the operation of the unit. Should the
`interlock connection open during operation or standby, the source is immediately disabled, and
`all light output from the aperture ceases.
`
`
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`EQ-9 Operation Manual Rev. 6
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`C h a p t e r 2
`
`DESCRIPTION
`
`General
`
`The EQ-9-N is a broad-band lamp system for use in a wide variety of applications. The lamp
`produces high brightness, broad-band light from DUV wavelengths through visible and
`beyond. The output is very stable, and has a long lifetime before any service is required. A
`simple control interface ensures ease of use.
`
`Some of the advantages of the EQ-9-N include:
`
` Very high brightness across complete spectrum
`– 170nm through visible and beyond
` Eliminates need for multiple lamps (replaces D2/Tungsten/Xenon Arc)
`– Simplified optical system
` Excellent spatial stability
`– Repeatable measurements
` Superior short and long term power stability
`– Repeatable measurements
` Electrodeless operation for long life
`– Reduced consumable costs
`– Minimal recalibration of instrument
`
`
`
`The EQ-9-N system consists of a Power Supply Controller unit, Lamp House unit, and
`interconnecting cable. Connection to DC power is required for operation. Connection to
`nitrogen purge gas is optional, but recommended in some cases. See Chapter 3 for connection
`details.
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`EQ-9 Operation Manual Rev. 6
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`Specifications
`
`Optical Performance
`
` Typical output spectrum: see Figure 2.
`
`
`
`
`Relative EQ-9 Spectral Radiant Flux (Typical)
`
`1.6
`
`1.4
`
`1.2
`
`1.0
`
`0.8
`
`0.6
`
`0.4
`
`0.2
`
`0.0
`200 250 300 350 400 450 500 550 600 650 700 750 800 850
`Wavelength (nm)
`
`Figure 2: Typical Output Spectrum
`
`
`
`Relative Spectral Radiant Flux (a.u.)
`
`
`
`Physical Specifications
`
`Dimensions (H x W x D)
` Lamp House: 109x 120 x 43 mm
` Power Supply Controller: 38 x 197 x 93mm
`
`
`Weight
` Lamp House: 0.91 kg (2 lb)
` Power Supply Controller: 0.68 kg (1.5 lb)
`
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`Utility Requirements
`
` Electrical: 12VDC, 140W
` Cooling: Fan
` Purge gas (optional): clean dry nitrogen, filtered (5um 20 psig (0.14 MPa) supply
`pressure)
`
`
`
`Remote Interface
`
`Digital Inputs
` Type: Optocoupler LED
` Logic: Active High
`
`Input voltage: 5VDC
`
`Input current: 8mA
`
`
`Digital Outputs
` Type: Open collector to ground (digital common)
` Logic: Active Low
` Voltage: 30VDC max.
` Sink current: 30mA max.
`
`
`User Power
` Voltage: 5VDC, referenced to digital common
` Current: 50mA maximum
`
`
`
`Environmental Requirements
`
`Operating
` Ambient temperature: 15–30°C (with 30 CFM forced air cooling)
` Relative Humidity: non-condensing, 80% max. for temperatures up to 31°C,
`decreasing linearly to 50% max. at 40°C.
` Pollution Degree 2 (normally only non-conductive pollution; occasional,
`temporary condensation possible)
`
`Installation Category II
`
`Indoor use only
`Transport
` Temperature: -5–95°C
` Relative Humidity: non-condensing, 95% max.
`
`
`
`System Description
`
`As shown in Figure 3 the EQ-9-N system consists of a Power Supply Controller unit, Lamp
`House, Controller to Lamp house interconnect cable (not shown). Power and I/O interface
`connections (also not shown) are provided by the user.
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`The following sections provide descriptions of the system components and controls, and give
`an overview of their functions. Refer to the “Installation” section of this manual (Chapter 3)
`for more detailed information.
`
`
`
`9
`
`Optical Output
`(Also opposite
`side)
`
`Lamp
`House
`
`Power Input
`Connector
`
`RS-485
`Connector
`
`Power Supply
`Controller
`
`Lamp House Control
`Connector
`
`Status Indicators
`
`I/O Interface
`Connector
`
`Lamp House Control
`Connector
`
`Figure 3: EQ-9-N Lamp System
`
`
`
`
`
`Power Supply Controller
`
`The Power Supply Controller contains:
` Laser power supply
` Thermo-electric cooler control system for laser
` Control electronics
` Status indicator LEDs
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`
`
`Interface connectors
`
`
`
`External features (refer to Figure 3):
`
` Status Indicator LEDs
`
`These five LEDs indicate the system status. The function of these indicators is shown below
`in
`
`Table 2.
`
`LED Label
`
`POWER ON
`
`LAMP ON
`
`LASER ON
`
`Meaning (when lit)
`
`DC power is connected to the EQ-9-N Power Supply Controller
`
`UV Light is on
`
`Laser power is ON and laser light is being produced within the Lamp
`House
`
`CONTROLLER FAULT
`
`One of the following has occurred in the Power Supply Controller:
`
`1. External interlock open
`
`2. Controller internal temperature too high
`
`3. Laser power not reaching setpoint
`
`4. Laser Temperature Fault
`
`LAMP MODULE FAULT
`
`One of the following has occurred in the Lamp House module:
`
`1. Control Cable not connected properly
`
`2. Lamphouse internal termperature too high
`
`3.
`
`Ignition Failure
`
`
`
`Table 2: Status Indicator LED Functions
`
`
`
`
`
`Input/Output (I/O) Connector
`
`Provides access to control and status signals. See Chapter 3 for pin assignments and functions.
`
`This is the only operator interface to the EQ-9-N – there are no local controls. Energetiq
`offers the EQ-99-RC Remote Control Module which connects to the Input/Output
`connector of the EQ-9-N or EQ-99 and provides a means of local control. Contact Energetiq
`for additional information.
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`EQ-9 Operation Manual Rev. 6
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`Power Input Connector
`
`This is a jack screw secured input connector for 12 VDC power. The EQ-9-N can be powered
`directly from a customer provided 12VDC power supply. See Chapter 3 for detailed
`information.
`
`Lamp House Control Connector (21-pin mixed D-sub)
`
`Provides various power and control signals to/from the Lamp House module. No other
`connector or cable may be used with the EQ-9-N other than the one supplied.
`
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`Lamp House
`
`The Lamp House assembly contains:
` Lamp
`
`Igniter
` Laser
` Thermoelectric cooler
`
`IR pumping optics
` Output windows
` Laser ON indicator
`
`Interface connectors
`
`Laser ON
`Indicator
`
`Lamp
`Window (front)
`
`Purge Gas
`Port
`
`Control
`Connector (to
`Controller)
`
`Figure 4: Lamp House Assembly
`
`
`
`
`
`External features (refer to Figure 4):
`
`Lamp Windows
`
`The lamp windows at the optical output provide protection from the high pressure bulb inside
`the Lamp House. An internally-threaded SM1 adapter is provided for easy connection of
`optical hardware.
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`Nitrogen Purge Inlet
`
`This is the inlet fitting for nitrogen purge gas. Purge gas is optional but is recommended for
`best performance when a deep UV bulb is provided. With no purge, ozone will form from
`atmospheric oxygen and attenuate the light output in the 220 – 280nm band. In addition,
`atmospheric oxygen and water vapor will attenuate the output below 200nm. Bulbs chosen
`for some OEM applications do not produce ozone and the purge fitting can be omitted.
`
`There is no return fitting for the purge nitrogen. The purge flow normally escapes within the
`Lamp House enclosure, and then to atmosphere.
`
`Laser On Indicator
`
`This LED is illuminated when the laser is ON.
`
`Control Connector (21-pin mixed D-sub)
`
`Provides various power and control signals to/from the Power Supply Controller. No other
`connector or cable may be used with the EQ-9-N other than the one supplied.
`
`
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`C h a p t e r 3
`
`INSTALLATION
`
`Unpacking
`
`Upon arrival, start by inspecting all parts of the system for completeness and any damage
`incurred in shipping. The EQ-9-N shipping box should contain:
`
`1) EQ-9-N Power Supply Controller unit
`1) EQ-9-N Lamp House unit
`1) Black interconnecting cable from Lamp House to Power Supply Controller (21-
`pin mixed D-sub).
`
`OPTIONAL
`1) EQ-99-RC Remote Control Module with interlock connector
`1) I/O cable with 15 pin D- connector at each end
`1) Mating, unwired DC power input connector.
`
`If any part is missing or appears damaged, contact Energetiq immediately. Do not attempt to
`substitute any parts. There are no user-serviceable parts inside the EQ-9-N Lamp House or
`Power Supply Controller unit.
`
`Connections
`
`Installation of the EQ-9-N consists of connecting electrical and optional gas supplies, and
`connecting the Lamp House module to the user’s equipment.
`
`Electrical Power
`
`The EQ-9-N requires 12VDC at 11.7A minimum (140W rating). Power consumption is
`approximately 100W during normal operation. Some OEM versions have higher current
`requirements.
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`Power can be provided via a customer provided 12VDC power supply. The connector on the
`EQ-9-N is a jack screw secured connector. This protects from accidental removal of power if
`the power cable is pulled. Connect to a 12VDC source as follows:
`
`Connector
`
`FCI DA3W3SA00LF
`
`Pin A1
`
`
`
`+12VDC
`
`Pin A2
`
`-12VDC return
`
`Pin A3
`
` Safety Ground
`
`
`
`Purge Gas
`
`Purge gas is optional but is recommended for best performance. With no purge, ozone will
`form from atmospheric oxygen and attenuate the light output in the 220 – 280nm band. In
`addition, atmospheric oxygen and water vapor will attenuate the output below 200nm. Some
`OEM units for near-UV and visible applications are equipped with bulbs which do not
`produce ozone and the purge fitting may not be present.
`
`If required, connect a source of nitrogen purge gas to the port on the Lamp House. The
`fitting is a push-to-connect type, sized for 1/8" tubing.
`
`Clean and dry nitrogen from either a Dewar or research-grade N2 bottle is recommended. Do
`not use any other purge gas. Grade 6 or better gas purity is recommended to maintain
`cleanliness of the optics, and gas should be filtered to <5um. Supply pressure should be 20
`psig (0.14 MPa). With a 20 psig inlet pressure, the EQ-9-N will consume approximately 1 slm
`of flow.
`
`There is no return fitting for the purge nitrogen. The purge flow normally escapes within the
`Lamp House enclosure, and then to atmosphere.
`
`Optical Interface
`
`The lamp windows accommodate light output of 0.56 NA. A pair of pins and four M4
`threaded holes are available on the bottom of the EQ-9-N for mounting. Four M4 threaded
`holes are also available on the top surface of the Lamp House. An internally-threaded SM1
`adapter is provided for connection of optical hardware. See Figure 5 below for mechanical
`layout of the Lamp House.
`
`
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`EQ-9 Operation Manual Rev. 6
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`
`
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`15
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`Energetiq Ex. 2062, page 21 - IPR2015-01362
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`

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`Figure 5: Lamp House mechanical layout
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`EQ-9 Operation Manual Rev. 6
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`16
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`Energetiq Ex. 2062, page 22 - IPR2015-01362
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`

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`Figure 6: Lamp House Output Window Detail A
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`EQ-9 Operation Manual Rev. 6
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`17
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`

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`Figure 7: Power Supply Controller mechanical layout
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`
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`EQ-9 Operation Manual Rev. 6
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`18
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`Signal Connections
`
`The EQ-9-N is controlled through the remote I/O connector.
`
`Table 3 gives the pin assignments and functions for this interface. Connect to the user’s
`control system using a suitable cable. Mating connector is a standard high-density 15-pin d-
`sub male (for example, Amp part no. 748364-1 with contacts 1658670-2).
`
`Optionally, connect a model EQ-99-RC remote control module to the I/O connector using
`the supplied cable
`
`User I/O can be powered either by the EQ-9-N internal isolated power supply, or an external
`supply.
`
`
`
`Figure 8 shows connection schematics for both configurations.
`
`
`
`
`
`Description
`
`Pin #
`
`Details
`
`Commands (Inputs)
`
`
`
`
`
`LAMP OPERATE
`
`EXTERNAL INTERLOCK
`
`
`
`Status Indicators (Outputs)
`
`LAMP ON
`
`LASER ON
`
`LAMP MODULE FAULT
`
`CONTROLLER FAULT
`
`ISOLATED +5V SUPPLY
`
`12
`
`13
`
`
`
`
`
`1
`
`2
`
`3
`
`4
`
`5
`
`OPERATE REQUEST, apply +5V (referenced to digital
`common) to initiate start cycle
`
`EXTERNAL INTERLOCK, apply +5V (referenced to
`digital common) to close interlock and allow operation
`
`
`
`
`
`Pulled to digital common when ON
`
`Pulled to digital common when ON
`
`Pulled to digital common when OK, float on FAULT
`
`Pulled to digital common when OK, float on FAULT
`
`50mA maximum, referenced to digital common
`
`DIGITAL COMMON
`
`6,7,8,9 Galvanically isolated from system
`
`RESERVED
`
`RESERVED
`
`10, 11
`
`Do not connect
`
`14,15
`
`Do not connect
`
`Table 3: I/O Connector Pin Assignment
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`EQ-9 Operation Manual Rev. 6
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`19
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`EQ-9
`
`EQ-9
`
`
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`
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`Figure 8: Remote Interface Schematic
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`
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`EQ-9 Operation Manual Rev. 6
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`
`
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`20
`
`Contact or
`solid-state switch
`
`100
`
`5V Power
`Pin 5
`
`Inputs
`Pins 11, 12, 13
`
`499
`
`0.1uF
`
`0.1uF
`
`Isolated
`5VDC supply
`
`+ -
`
`Outputs
`Pins 1, 2, 3, 4
`
`Load
`
`5V Return
`Pins 6, 7, 8, 9
`
`N/C
`
`N/C
`
`Contact or
`solid-state switch
`
`100
`
`5V Power
`Pin 5
`
`Inputs
`Pins 11, 12, 13
`
`499
`
`0.1uF
`
`0.1uF
`
`Isolated
`5VDC supply
`
`+ -
`
`Outputs
`Pins 1, 2, 3, 4
`
`Load
`
`+ -
`
`User
`5VDC supply
`
`5V Return
`Pins 6, 7, 8, 9
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`Installation Procedure
`
`1. Mount the Controller Unit rigidly to a suitable metal part of the equipment structure
`using the four mounting holes and suitable hardware. The surface chosen to mount
`the Controller Unit should be near ambient temperature, preferably 20°C to 30°C and
`capable of dissipating 25W of heat. See Figure 7 for dimensional and mounting
`details.
`
`2. Connect the Lamp House unit output to the user equipment. The beam should always
`be either directly coupled to a fiber optic cable, or enclosed in an appropriate beam
`pipe, tube, or enclosed space and purged with nitrogen. Operating the source without
`any output target or beam transport is not recommended, and may lead to unsafe
`operating conditions. Consult Energetiq for applications information and suggested
`configurations.
`
`The Lamp House should be mounted in the orientation shown in Figure 3, with the
`output windows on the side and the bulb oriented horizontally. The lamp has been
`factory aligned in this position. Mounting the lamp in a different orientation will cause
`the plasma position inside the bulb to shift slightly and may cause performance
`problems.
`
`Setup the Lamp House unit with appropriate ultraviolet safety measures and laser light
`safety measures in place. It is recommended that any enclosure or aperture-blocking
`hardware utilize switches wired to the EQ-9-N external interlock circuit.
`
`3. Connect the black 21-pin mixed D-sub interconnect cable from the Controller Unit to
`the Lamp House.
`
`4. If required, connect nitrogen purge gas to the Lamp House. Refer to “Facilities
`Requirements” above.
`
`5. Connect user’s control system to the I/O interface connector per Table 3 and
`
`Figure 8.
`
`6. Alternately, if using the EQ-99-RC Remote Control Module, place it on a clean rigid
`surface. Install the supplied 15-pin cable from the Power Supply Controller to the
`EQ-99-RC.
`7. Connect 12VDC input power source to the Controller Unit.
`
`
`
`The system is now ready to operate.
`
`
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`21
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`EQ-9 Operation Manual Rev. 6
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`C h a p t e r 4
`
`OPERATION
`
`Starting
`
`Once the lamp is set up properly, verify that all personnel that will be in contact with the lamp
`system are aware of the potential hazards involved. It is the responsibility of the user to verify
`that the lamp is being used safely.
`
`This example assumes the use of the EQ-99-RC Remote Control Module to provide local
`control. If using a custom control system, substitute the appropriate digital input and output
`lines from Table 3 for the switches and LEDs described below.
`
`1. Wit