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Docket No.: 0107945-00235; 0107945-00237;
`
`0107945—00246 (PATENT)
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`PATENT TRIAL AND APPEAL BOARD
`
`Inter‘ Partes Review of U.S. Patent No. 8,309,943
`Inter Parres Review of U .S. Patent No. 7,435,982
`Inter Panes Review ot'U.S. Patent No. 7,786,455
`infer Panes Review of U.S. Patent No. 8,525,138
`Inter Pcrrtes Review ofU.S. Patent No. 8,969,841
`Inter Paries Review ofU.S. Patent No. 9,048,000
`Inter Parles Review ol"U.S. Paten1No. 9,185,786
`
`Smith et al.; Issued: Nov. 13, 2012
`Smith; Issued: Oct. 14, 2008
`Smith; Issued: Aug. 31, 2010
`Smith er al.; Issued: Sep. 3, 2013
`Smith; Issued: Mar. 3, 2015
`Smith; Issued: June 2, 2015
`Smith; Issued: Nov. 10, 2015
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`
`P.O. Box 1450
`
`Alexandria, VA 22313-1450
`
`Dear Sir/Madam:
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Parres Reviews and transact all business in the U .S. Patent and Trademark
`
`Office connected herewith:
`
`All practitioners at Customer Number 23483.
`
`Address all communications to:
`
`WILMER CUTLER PICKERING HALE AND DORR LLP
`60 State Street
`
`Boston, MA 02109
`
`(617) 526-6000
`
`Address all e—mails and telephone calls to lead and back-up counsel (each associated with
`
`the above Customer Number), listed below:
`
`

`
`Patent Nos.: 8,309,943; 7,435,982; 7,786,455;
`
`8,525,138; 8,969,841; 9,048,000; and 9,185,786
`
`Docket No.: 0107945-00235;
`
`01 07945 -0023 7; 0107945-00246
`
`Donald R. Steinberg (Lead Counsel, PTO Reg. No. 37,241)
`Don.Steinberg(®wilmerhale.com
`Direct: 617-526-6453
`
`WILMER CUTLER PICKERING HALE AND DORR LLP
`60 State Street
`
`Boston, MA 02109
`
`David L. Cavanaugh (Backup Counsel, PTO Reg. No. 36,476)
`
`David.Cavanau<rh@wil1nerhale.com
`Direct: 202-663-6025
`
`Michael H. Smith (Backup Counsel, PTO Reg. No. 71,190)
`
`MichaelH.Smith@wilmerhale.co1n
`Direct: 202-663-6055
`
`WILMER CUTLER PICKERING HALE AND DORR LLP
`
`1875 Pennsylvania Ave, NW
`Washington, DC 20006
`
`For:
`
`ASML U.S., Inc.
`
`j>%-—
`.D/ll//Z?
`/<’/M
`
`Name:
`
`Title:
`
`SEA/Mlle Dr‘re.§c7a/C ,L.ze/e<.. 4?
`5E-c/a=,-—m¢</
`
`Dated:
`
`2—:2Sg.—a10[(§

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