`571-272-7822
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` Paper 9
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`Entered: June 1, 2017
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`UNITED STATES PATENT AND TRADEMARK OFFICE
`____________
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`____________
`
`
`INTEL CORPORATION
`and
`QUALCOMM INCORPORATED, GLOBALFOUNDRIES INC.,
`GLOBALFOUNDRIES U.S. INC., GLOBALFOUNDRIES DRESDEN
`MODULE ONE LLC & CO. KG, GLOBALFOUNDRIES
`DRESDEN MODULE TWO LLC & CO. KG,
`Petitioners
`
`v.
`
`DSS TECHNOLOGY MANAGEMENT, INC.,
`Patent Owner
`____________
`
`Case IPR2016-002891
`Patent 5,965,924
` ____________
`
`
`
`Before BRYAN F. MOORE, BRIAN J. McNAMARA, and
`MINN CHUNG, Administrative Patent Judges.
`
`McNAMARA, Administrative Patent Judge.
`
`
`FINAL WRITTEN DECISION
`35 U.S.C. § 318(a) and
` 37 C.F.R. § 42.73
`
`
`
`1 Case IPR2016-01313 has been joined with this proceeding.
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`IPR2016-00289
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`BACKGROUND
`On June 8, 2016 we instituted an inter partes review of claims 1–6,
`13, 14, and 16 of U. S. Patent No. 5,965,924 (“the ’924 Patent”) based on a
`Petition filed by Intel Corporation. Paper 12 (“Dec. to Inst.”). DSS
`Technology Management, Inc. (“Patent Owner”) waived its right to file a
`Preliminary Response. On August 29, 2016 we instituted inter partes review
`of the same claims on the same grounds based on a substantially identical
`petition filed by Qualcomm Incorporated, Globalfoundries Inc.,
`Globalfoundries U.S. Inc., Globalfoundries Dresden Module One LLC &
`Co. KG, Globalfoundries Dresden Module Two LLC & Co. KG, in
`IPR2016-01313. We then joined IPR2016-00289 and IPR2016-01313.
`Papers 18, 19. In this joined proceeding, we refer to Intel Corporation,
`Qualcomm Incorporated, Globalfoundries Inc., Globalfoundries U.S. Inc.,
`Globalfoundries Dresden Module One LLC & Co. KG, Globalfoundries
`Dresden Module Two LLC & Co. KG, collectively as “Petitioner.”
`On September 7, 2016, Patent Owner filed a Patent Owner Response
`that contained no citations to evidence and no argument, other than noting
`that in contrast to the standard applied in reaching a decision to institute (i.e.,
`a reasonable likelihood Petitioner will prevail on its challenge to
`patentability of a claim), the standard for reaching a final decision is whether
`the Petitioner proved unpatentability by a preponderance of the evidence.
`PO Resp. 2. Patent Owner then stated it “defers to the Board to make this
`determination based on its impartial analysis of the prior art and Petitioners’
`arguments.” Id.
`In its Reply filed on December 7, 2016, Petitioner stated that Patent
`Owner has provided no testimony or any other evidence that contradicts or
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`rebuts the testimony of Petitioner’s expert, Dr. John Bravman, and that the
`challenged claims should be found unpatentable (Paper 21, “Pet. Reply”).
`We did not conduct an oral hearing in this case.
`We have jurisdiction under 35 U.S.C. § 6. This Final Written
`Decision is issued pursuant to 35 U.S.C. §318(a). We base our decision on
`the preponderance of the evidence. 35 U.S.C. § 316(e); 37 C.F.R. § 42.1(d).
`Having reviewed the papers submitted by the parties and the
`supporting evidence, we conclude that Petitioner has demonstrated by a
`preponderance of the evidence that the challenged claims are unpatentable.
`
`
`THE ’924 PATENT (Ex. 1001)
`The ’924 Patent relates to semiconductor fabrication in general, and in
`particular concerns a metal plug local interconnect that is formed in the same
`process of forming metal plugs that are already designed as sub-metal
`plugged contacts. Ex. 1001, col. 1, ll.7–11. The ’924 Patent discloses that
`in semiconductor fabrication, it is often necessary to make a local
`interconnect between a gate polysilicon layer to N+ or P+ diffusion regions.
`Id. at col. 1, ll. 16–18. According to the ’924 Patent, conventionally such
`local interconnects were fabricated using buried contacts, as shown in
`Figures 1A and 1B of the ’924 Patent (id. at col. 1, l. 26–col. 2, l. 11) or with
`a metallic local interconnect strap to shunt from a gate polysilicon to a
`diffusion region, as illustrated in Figures 2A and 2B of the ’924 Patent (id. at
`col. 2, l. 12–43).
`The ’924 Patent discloses a semiconductor structure in which a
`diffusion region is formed in a silicon substrate and a polysilicon gate is
`formed on the top surface of the silicon substrate adjacent to, but not
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`contacting, the diffusion region. Ex. 1001, col. 3, ll. 1–6, 14–18. A layer of
`insulating material is then deposited on top of the polysilicon gate and the
`diffusion region. Id. at col. 3, ll. 6–7, 19–20. A via opening is formed in the
`insulating material to expose a portion of the polysilicon gate and a portion
`of the diffusion region. Id. at col. 3, ll. 7–8, 20–22. An electrically
`conducting material is deposited to at least partially fill the via opening to
`provide an electrical connection between the polysilicon gate and the
`diffusion region. Id. at col. 3, ll. 8–11, 23–27.
`
`ILLUSTRATIVE CLAIM
`1. A semiconductor structure comprising:
`a silicon substrate having a top surface,
`a diffusion region formed in said substrate adjacent to said
`top surface,
`a gate formed on the top surface of said substrate
`juxtaposed to but not contacting said diffusion region,
`a sidewall spacer adjacent to said gate and disposed above
`said diffusion region,
`an insulator layer substantially covering said gate and said
`diffusion region, and
`a conducting plug at least partially filling a via in said
`insulation layer that exposes said sidewall spacer in the
`absence of said conducting plug, said conducting plug
`providing direct electrical communication between
`said gate and said diffusion region.
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`GROUNDS OF INSTITUTION
`In our Decision to Institute, we instituted trial on the following
`challenges to patentability:
`Claims 1–3, 14 and 16 as anticipated under 35 U.S.C. § 102(e) by
`Sakamoto;2 and
`Claims 4–6 and 13 as obvious under 35 U.S.C. § 103(a) over the
`combination of Sakamoto and Cederbaum.3
`
`CLAIM CONSTRUCTION
`In our Decision to Institute, we applied the ordinary and customary
`meaning to the terms not construed. We applied the broadest reasonable
`interpretation to the following term that required construction. Noting a
`claim construction dispute in co-pending district court litigation, Petitioner
`proposed that we construe the “diffusion region formed in said substrate” to
`mean “conductive terminal region, such as a source or drain, that contains
`dopants implanted in the silicon substrate.” Pet. 25. As discussed in the
`Decision to Institute, we determined that the subject matter of the claims
`concerns a local interconnect between a gate and a diffusion region and that
`there was no need to further construe “the diffusion region formed in said
`substrate” for purposes of this decision. Dec. to Inst. 5–6. Based on the
`complete record now before us, we discern no reason to change the
`constructions.
`
`
`
`2 U.S. Patent No. 5,475,240 issued Dec. 12, 1995, Ex. 1003 (“Sakamoto”).
`3 U.S. Patent No. 5,100,817 issued Mar. 31, 1992, Ex. 1004 (“Cederbaum”).
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`ANALYSIS OF PRIOR ART CHALLENGES
`Introduction
`As previously discussed, Patent Owner has provided no evidence or
`argument in response to claim challenges advanced in the Petition. Patent
`Owner’s election not to file a Patent Owner Preliminary Response does not
`implicate any adverse inference. 37 C.F.R.§ 42.107(a); Office Patent Trial
`Practice Guide. 77 Fed Reg. 48756, 48,764 (Aug. 14, 2012). However, as to
`the Patent Owner Response after institution of trial, under our Scheduling
`Order “Patent Owner is cautioned that any arguments for patentability not
`raised in the response will be deemed waived.” Paper 11, 3; see In re
`Nuvasive, 842 F. 3d 1376, 1381 (Fed. Cir. 2016)(finding that NuVasive
`waived public accessibility arguments in its Preliminary Response by failing
`to challenge public accessibility during the trial phase, i.e. by not addressing
`public accessibility in its Trial Response and explicitly declining to make
`further arguments at oral hearing). In this case, Patent Owner “defers to the
`Board” to determine whether Petitioner has demonstrated the challenged
`claims are unpatentable by a preponderance of the evidence. PO Resp. 2.
`There is no argument or evidence, other than that presented in the Petition
`and the accompanying Exhibits, for us to consider. Nevertheless, “In an
`inter partes review, the burden of persuasion is on the petitioner to prove
`‘unpatentability by a preponderance of the evidence,’ . . . and that burden
`never shifts to the patentee.” Dynamic Drinkware, LLC v. Nat’l Graphics,
`Inc., 800 F.3d 1375, 1378 (Fed. Cir. 2015) (quoting 35 U.S.C. § 316(e)).
`Anticipation By Sakamoto
`The Petition contends that Sakamoto not only is directed to the same
`problem as that addressed by the ’924 Patent, i.e., connecting different
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`transistor portions together, but also that Sakamoto discloses the same
`solution as that found in the ’924 Patent, i.e., using a single plug. Pet. 21.
`Sakamoto “relates to improvement of a contact structure of an
`interconnection in a region having steps in a semiconductor device having a
`multilayer interconnection structure.” Ex. 1003, col. 1, ll. 12–15. Petitioner
`provides the following figure comparing an annotated version of Figure 1 of
`Sakamoto on the left with an annotated version of Figure 3B of the ’924
`Patent on the right:
`
`
`
`Petitioner’s Comparison of Sakamoto Fig. 1
` and ’924 Patent Figure 3B
`Pet. 22. Petitioner contends that Sakamoto discloses a plug filling an
`opening having a sidewall spacer that electrically connects a diffusion region
`to a gate, as claimed in the ’924 Patent. Id. Petitioner addresses each of the
`limitations of the claims challenged as anticipated by Sakamoto and
`discusses why specific features of Sakamoto are anticipatory. Id. at 29–48.
`Turning to claim 1, Petitioner notes that Sakamoto’s static random
`access memory (SRAM) is a semiconductor structure. Pet. 29–30 (citing
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`Ex. 1003, col. 1, ll. 13–16; Bravman Decl. ¶ 70). Petitioner next addresses
`the structure of Sakamoto’s substrate. Id. at 30–40. Claim 1 recites the
`following elements as designated by Petitioner: (a) a silicon substrate
`having a top surface, (b) a diffusion region formed in said substrate adjacent
`said top surface [of said substrate], (c) a gate formed on the top surface of
`said substrate juxtaposed to but not contacting said diffusion region; (d) a
`sidewall spacer adjacent to said gate and disposed above said diffusion
`region, (e) an insulator layer substantially covering said gate and said
`diffusion region, and (f) a conducting plug at least partially filling a via in
`said insulation layer that exposes said sidewall spacer in the absence of said
`conducting plug, said conducting plug providing direct electrical
`communication between said gate and said diffusion region.
`Figure 1 of Sakamoto delineates a main silicon substrate 1 and a p-
`well region 2 above it. Petitioner acknowledges that Figure 1 of Sakamoto
`illustrates a p-well region 2, but contends that the p-well region is part of the
`silicon substrate. Id. at 30. Petitioner argues that p-well region 2 is formed
`below the top surface of silicon substrate and a source/drain region 7 is
`formed in the silicon substrate below the top surface of p-well region 2. Id.
`at 34. Petitioner provides the further annotated version of Figure 1 of
`Sakamoto shown below:
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`Annotated version of Figure 1 in Petition
`Id. Petitioner contends that p-well region 2 is part of the silicon substrate
`because p-well region 2 is formed in the surface of the substrate. Id. at 30
`(citing Ex. 1003, col. 7, ll. 17–21 (disclosing that a “p type impurity is
`implanted in a main surface of a silicon substrate” and that the “implanted p
`type impurity is diffused to the depth of about 2–3 µm from the main surface
`of substrate 1 by heat treatment to form a p well 2”)). As further evidence in
`support of its position, Petitioner notes that during prosecution, the applicant
`for the ’924 Patent did not dispute the Examiner’s assertion that a diffusion
`region is formed within a silicon substrate and argued that the cited
`reference (Kinoshita) disclosed buried ground layers in the substrate. Id. at
`31–32 (citing Ex. 1013 and Ex. 1014). Patent Owner presents no argument
`of evidence disputing Petitioner’s position. Petitioner further contends that
`in at least one embodiment (the fifth embodiment shown in Figure 25),
`Sakamoto does not delineate the p-well region, stating that an n-type
`impurity region is formed on a surface of the silicon substrate. Id. at 32–33
`(citing Ex. 1003, col 12, ll. 57–58). Whether or not there is a distinction to
`be drawn between Sakamoto’s first four embodiments, which all delineate p-
`well region 2, and Sakamoto’s fifth embodiment, in which p-well region 2 is
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`not shown, we are persuaded that the evidence supports the proposition that
`the implanted p-well region is part of the silicon substrate.
`Based on this analysis, we are persuaded that Sakamoto discloses
`element (a) a silicon substrate with a top surface. As to element (b), we are
`persuaded by Petitioner’s argument that Sakamoto discloses a diffusion
`region formed in said substrate. Element (b) also recites that the diffusion
`region is adjacent said top surface. Having determined that the p-well region
`is part of the substrate, we agree that Figure 1 of Sakamoto illustrates a
`diffusion region in the form of source/drain region 7 adjacent to the top
`surface of the substrate.
`Element (c) of claim 1, as designated by Petitioner, recites “a gate
`formed on the top surface of said substrate juxtaposed to but not contacting
`said diffusion region.” Figure 1 of Sakamoto illustrates field oxide film 4
`and p+ isolation layer 3 formed on a prescribed region of a surface of p-well
`2 for isolation. Ex. 1003, col. 7, ll. 22–23. Oxide film 5 is formed on the
`surface of the p-well 2. Id. at col. 7, ll. 23–24. A polycide film of
`polycrystalline silicon and refractory metal silicide is deposited on the
`surface of oxide film 5 and patterned to form gate electrode 6. Id. at col. 7,
`ll. 26–31.
`Petitioner contends that the placement of the gate electrode in
`Sakamoto over a field oxide layer constitutes forming the gate on the top
`layer of the substrate because the applicant for the ’924 Patent relied on
`conception of the same physical construct during prosecution in a
`Declaration under 37 C.F.R. § 1.131 (“Rule 131 Declaration”). Pet. 37 n.7
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`(citing Ex. 1006, Ex. A).4 The specification of the ’924 Patent does not
`discuss forming the gate electrode on the substrate in detail, stating only that
`a photoresist layer used to pattern and etch openings for the diffusion
`regions is removed and that polysilicon then deposited on substrate 74 is
`etched to form gate electrode 74. Ex. 1001, col. 3, ll. 49–58. In this context,
`the statements in applicant’s Rule 131 Declaration provide context to the
`meaning of “a gate formed on the top surface of the substrate.” In order to
`antedate a reference, Patent Owner demonstrated an invention in which the
`gate electrode is formed over a field oxide layer. Patent Owner has offered
`no evidence or argument disputing Petitioner’s assertions. Therefore, based
`on the current record, we agree with Petitioner that taken in the proper
`context, notwithstanding the presence of the field oxide layer 4 and field
`oxide film 5, Sakamoto discloses the gate electrode formed on the top
`surface of the substrate.
`Petitioner also argues that the gate in Sakamoto is juxtaposed from but
`is not in direct contact with the diffusion region, as recited in claim 1. Pet.
`38–40. Petitioner contends that oxide film 5 separates the gate from the
`diffusion region, noting that there would be no need for the claimed plug to
`connect the gate and the diffusion region if this were not the case. Id. at 39.
`Sakamoto states:
`The sectional structure of the memory cell shown in FIG. 1 [of
`Sakamoto] is the same as the sectional structure of a
`conventional memory cell shown in FIG. 28 except for a
`structure of direct contact. . . .
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`4 Petitioner appears to be citing to the center figure at the top of page 11 of
`Ex. 1006.
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`Direct contact portion 10 includes an n type
`polycrystalline silicon plug layer 15 . . . directly connected to
`the n+ source/drain region 7 and gate electrode 6 . . . embedded
`within opening 16.
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`Ex. 1003, col. 6, ll. 42–58. Figures 1 and 28 in Sakamoto illustrate that
`because of the presence of oxide film 5 there is no direct contact between
`gate 6 and source/drain region 7. Therefore, on this record we agree that
`Sakamoto discloses element (c) of claim 1, as designated by Petitioner.
`Petitioner designates as element (d) of claim 1 the recitation “a
`sidewall spacer adjacent to said gate and disposed above said diffusion
`region.” Pet. 40. Petitioner designates as element (e) of claim 1 the
`recitation of “an insulator layer substantially covering said gate and said
`diffusion region.” Id. at 42. Petitioner cites insulating layer 9 shown in
`Figure 1 of Sakamoto as disclosing element (e) of claim 1 of the ’924 Patent.
`Id. Petitioner cites sidewall spacer 9’ in Figure 1 of Sakamoto as disclosing
`the claimed sidewall spacer. Id. at 40–41. On this record, we agree with
`Petitioner’s arguments because Sakamoto discloses interlevel insulating
`layer 9 disposed above the gate and diffusion region and that an opening 16
`for direct contact formed using a photolithography method leaves sidewall
`spacer 9’. Ex. 1003, col. 7, ll. 47–51.
`Petitioner designates as element (f) of claim 1 the recitation “a
`conducting plug at least partially filling a via in said insulation layer that
`exposes said sidewall spacer in the absence of said conducting plug, said
`conducting plug providing direct electrical communication between said
`gate and said diffusion region.” Pet. 43. As Petitioner notes (id. at 43–45),
`Sakamoto discloses an n type polycrystalline silicon plug layer 15 at least
`partially filling a via (opening 16) in insulating layer 9 to connect directly
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`the source/drain region and gate electrode. Ex. 1003, col. 6, ll. 42–58.
`Thus, on this records we agree that Sakamoto discloses element (f) of claim
`1, as designated by Petitioner.
`Based on this analysis and on the record in the proceeding, Petitioner
`has demonstrated by a preponderance of the evidence that Sakamoto
`discloses all of the elements of claim 1.
`Claim 2 depends from claim 1 and recites that the diffusion region is
`an N+ or P+ region. Petitioner notes, and we agree, that Sakamoto discloses
`the diffusion region as an N+ region because it expressly refers to an n+
`source drain region 7. Pet. 45–46.
`Claim 3 depends from claim 1 and recites that the insulator layer is
`formed of material selected from the group consisting of silicon oxide and
`silicon nitride. Petitioner cites Sakamoto’s disclosure of softening and
`reflowing BoroPhosphoSilicate Glass (BPSG) film to form insulating layer
`9, stating that BPSG is a type of silicon oxide. Id. at 46 (citing Bravman
`Decl. ¶ 90; Ex. 1015, 185).5 We credit Dr. Bravman’s testimony and are
`persuaded that insulating layer 9 is formed of silicon oxide.
`Claim 14 depends from claim 1 and recites the further limitation “said
`polysilicon gate and said diffusion region being exposed in said via in the
`absence of said conducting plug.” Petitioner states, and we agree, that this
`feature is disclosed in at least Figure 1 of Sakamoto. Id. at 47 (noting that
`
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`5 Although Petitioner does not cite Ex. 1015 as a basis for its challenge that
`claim 2 is anticipated by Sakamoto, we understand Petitioner’s citation to
`demonstrate that one of ordinary skill would infer the limitation is disclosed
`by Sakamoto. In re Baxter Travenol Labs., 952 F.2d 388, 390 (Fed. Cir.
`1991)
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`polysilicon gate and diffusion region 7 would be exposed in the via (opening
`16) in the absence of conducting plug 15).
`Claim 16 depends from claim 1 and recites “said gate comprises
`polysilicon.” Petitioner notes, and we agree, that Sakamoto discloses the
`gate electrode 6 is formed of polycrystalline silicon, which is another name
`for polysilicon. Id. at 48
`In consideration of the above, Petitioner has demonstrated by a
`preponderance of the evidence that claims 1–3, 14, and 16 are unpatentable
`as anticipated by Sakamoto.
`Obviousness Over Sakamoto and Cederbaum
`Petitioner contends that claims 4–6 and 13 are obvious over the
`combination of Sakamoto and Cederbaum. Comparing Figure 7 of
`Cederbaum to Figure 3B of the ’924 Patent, Petitioner contends that
`Cederbaum discloses a structure that includes components arranged in a way
`that is identical to those of Fig. 3B of the ’924 Patent. Pet. 23. The figure
`below is Petitioner’s comparison of Fig 7 of Cederbaum on the left and
`Figure 3B of the ’924 Patent on the right.
`
`Petitioner’s Comparison of Fig. 7 of Cederbaum
`to Fig 3B of the ’924 Patent
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`Id. Petitioner emphasizes that, like the ’924 Patent, Cederbaum concerns the
`use of a contact stud or conducting plug to fill an opening with a sidewall
`spacer to directly connect a source/drain region to a gate electrode. Id. at
`23–24.
`Petitioner persuasively argues that the evidence supports the
`conclusion that one of ordinary skill would have been motivated to combine
`the teachings of Cederbaum with those of Sakamoto because they both teach
`the same type of device and are directed to the same problem, i.e., stacking
`transistors in an SRAM. Pet. 51. Petitioner points out that Cederbaum and
`Sakamoto also disclose nearly identical structures with nearly identical
`components, with both employing an electrically conducting plug within an
`opening that contains a sidewall spacer to directly connect a diffusion region
`to a gate. Id. at 52–53. Petitioner cites Cederbaum’s disclosure of materials,
`such as refractory metals, to be used in forming the conductive plug and
`Sakamoto’s discussion of the advantages to using a conductive plug of
`increased conductivity. Id. at 53–54. Thus, Petitioner has demonstrated that
`it would have been obvious to one of ordinary skill to replace the
`polycrystalline plug 15 of Sakamoto with a refractory metal plug of
`tungsten, as disclosed by Cederbaum. Id. at 51. This feature (“said
`electrically conducting plug is a refractory metal plug”) is recited in claim 5
`of the ’924 Patent. Claim 4 recites a metal plug and claim 6 recites the
`electrically conducting plug is formed of a material selected for the group
`consisting of titanium, tantalum, molybdenum, and tungsten. Petitioner cites
`Cederbaum’s disclosure at column 9, lines 31–65 as disclosing a tungsten
`conducting plug. Id. at 49–50.
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`Claim 13 of the ’924 Patent depends from claim 1 and recites the
`further limitation “said conducting plug comprises an outer glue layer and a
`plug material therein.” Petitioner cites Cederbaum as disclosing an outer
`glue titanium nitride (TiN) layer and an inner plug material, i.e., tungsten.
`Pet. 55. Petitioner notes that one of ordinary skill would have understood
`that because the TiN is deposited in opening 28 of Cederbaum before the
`tungsten is deposited, the TiN layer is an outer glue layer and the tungsten is
`the inner plug material. Id at 55–56 (citing Ex. 1004, col. 9, ll. 31–47).
`Petitioner further notes that Cederbaum discloses the TiN layer acts as an
`outer glue layer because it improves adhesion of the inner tungsten layer. Id.
`at 56 (citing Ex. 1004, col. 9, ll. 36–43).
`The record supports Petitioner’s contentions. In consideration of the
`above, we are persuaded that Petitioner has demonstrated by a
`preponderance of the evidence that claims 4–6 and 13 are unpatentable as
`obvious over the combination of Sakamoto and Cederbaum.
`
`CONCLUSION
`Based on the record in this proceeding, we conclude Petitioner has
`demonstrated by a preponderance of the evidence that:
`Claims 1–3, 14, and 16 of the ’924 Patent are unpatentable under 35
`U.S.C. §102 as anticipated by Sakamoto; and
`Claims 4–6 and 13 are unpatentable under 35 U.S.C. § 103(a) as
`obvious over the combination of Sakamoto and Cederbaum.
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`ORDER
`In consideration of the above it is:
`ORDERED that claims 1–6, 13, 14, and 16 of the ’924 Patent are
`unpatentable; and
`FURTHER ORDERED, that because this is a final written decision,
`parties to the proceeding seeking judicial review of the decision must
`comply with the notice and service requirements of 37 C.F.R. § 90.2.
`
`
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`PETITIONER
`
`Grant K. Rowan
`Yung-Hoon Ha
`WILMER, CUTLER, PICKERING,
` HALE AND DORR, LLP
`grant.rowan@wilmerhale.com
`yung-hoon.ha@wilmerhale.com
`
`
`
`PATENT OWNER
`
`Andriy Lytvyn
`Anton J. Hopen
`Nicholas Pfeifer
`SMITH & HOPEN, P.A.
`andriy.lytvyn@smithhopen.com
`anton.hopen@smithhopen.com
`nicholas.pfeifer@smithhopen.com
`
`
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