throbber
1382
`
`IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 36, NO. 9, SEPTEMBER 2001
`
`Technology Developments Driving an Evolution of
`Cellular Phone Power Amplifiers to Integrated
`RF Front-End Modules
`
`Rik Jos, Member, IEEE
`
`Abstract—Millions of cellular phone power amplifiers (PAs) are
`produced every day worldwide using a great diversity of technolo-
`gies. This is true both for the active devices, where various silicon
`as well as GaAs transistors are used, and for the PA architecture, in
`which MMIC, module, and discrete solutions compete. This paper
`gives an overview of the various technological and architectural
`choices and discusses their influence on the PA performance, no-
`tably the power efficiency and linearity. It sketches the future of
`PA development toward more functional integration, which may
`be obtained by two paths: integration on chip and added function-
`ality in modules.
`
`Index Terms—Efficiency, front-end modules, linearity, PA archi-
`tecture.
`
`I. INTRODUCTION
`
`C ELLULAR phone power amplifiers (PAs) usually come
`
`in three variants: discrete transistor line-up, monolithic
`microwave integrated circuit (MMIC), and power amplifier
`modules (PAMs). The discrete line-up is the oldest and cheapest
`solution and is still widely in use in, for example, AMPS PAs
`[Fig. 1(a), a discrete GSM PA is indicated by white dots]. The
`technology of choice is silicon bipolar for cost reasons. A major
`disadvantage is that the telephone set maker has to design the
`PA himself. Due to the large area that is required for a discrete
`solution, many parasitics are present and the RF design is often
`cumbersome, especially as peak powers increase while supply
`voltages drop and frequencies get higher. The setmaker requires
`extensive in-house RF competence and the time to market
`(TTM) takes a long time. These facts make discrete line-ups
`unattractive for fast development of PAs for systems above
`1 GHz. That is where the MMIC gets in. Once mostly made
`of GaAs MESFETs, the present-day state-of-the-art MMICs
`are using GaAs HBT [Fig. 1(b), indicated by white dots]. The
`main reason for HBT’s popularity is its single supply voltage.
`Although epigrowth for HBTs is more expensive than for
`p-HEMT, the processing is cheaper because of a more relaxed
`lithography. Output and sometimes also interstage matching
`circuits are not integrated on chip. The setmaker needs only
`limited RF knowledge. The parasitics in a GaAs IC are small
`and well known, facilitating a fast development and often a
`design that is right the first time. Price, power added efficiency
`
`Manuscript received December 12, 2000; revised March 28, 2001.
`The author is with Philips Discrete Semiconductors, 6534 AE Nijmegen, The
`Netherlands (e-mail: Rik.Jos@philips.com).
`Publisher Item Identifier S 0018-9200(01)06106-6.
`
`(PAE), and linearity are well balanced. However, MMICs still
`do not provide the entire PA function and price and PAE can
`in practice be compromised by external components needed
`for matching. PAMs, on the other hand, deliver a complete
`RF function, minimizing the required RF competence of the
`setmaker and in principal lowering the cost of ownership of
`the PA function [Fig. 1(c)]. Currently PAMs are on the market
`using silicon bipolar, silicon LDMOS, or GaAs HBT. The
`main advantage of a PAM is the possibility to combine various
`technologies which makes it easy to add extra functionality
`, antenna switch, antenna, load
`like output matching to 50
`switching, power control loop or circulators. Candidate tech-
`nologies include Si, SiGe, GaAs active devices, and a broad
`range of options for passive devices made on silicon, on glass
`or in the substrate in a multilayer technology.
`Future developments in PAMs will be twofold: adding more
`functionality to the module and increasing the performance to
`meet the requirements of broad-band systems like wide-band
`CDMAs. The intrinsic performance of Si and GaAs devices
`is probably good enough to do the job at frequencies up to
`2.4 GHz. SiGe HBT will offer no significant intrinsic benefit
`over Si BJT in a PA function. However, it offers the possibility
`of a more relaxed lithography combined with a low base sheet
`resistance, thereby avoiding current crowding. Application of
`both Si and SiGe technologies is seriously hampered by para-
`sitic elements which makes it difficult to compete with GaAs.
`Development efforts will therefore focus on increased perfor-
`mance by reduction of parasitics, which can for example be done
`in a Si technology by a very radical isolation technique called
`Silicon On Anything (SOA), which is based on a technology
`previously published [1].
`
`II. ACTIVE DEVICES
`
`It is difficult to compare the capabilities of various device
`technologies for PA applications by considering only the
`usual figures of merit like
`,
`,
`and power density.
`Performance of PAs is typically measured by efficiency (PAE),
`ruggedness (the ability to survive power mismatch conditions
`at
`the output using specific dc and RF drive conditions),
`linearity (i.e., nonlinear signal distortion like intermodulation
`and ACPR) and of course, price and size. In the process of
`selecting a suitable active device, the problem is to relate the
`PA performance parameters to the active device parameters,
`which is not a trivial task. We will treat the most important
`items and focus on bipolar technologies for active devices.
`
`0018–9200/01$10.00 © 2001 IEEE
`
`Authorized licensed use limited to: Sidley Austin LLP. Downloaded on July 07,2020 at 14:31:59 UTC from IEEE Xplore. Restrictions apply.
`
`Petitioners Lenovo Holding Co., Inc., Lenovo (United States) Inc. and
`Motorola Mobility LLC - Ex. 1015, p. 1382
`
`

`

`JOS: EVOLUTION OF CELLULAR PHONE PAs TO INTEGRATED RF FRONT-END MODULES
`
`1383
`
`Fig. 1. Boards with PAs in different shapes: (a) discrete line-up; (b) dual band GaAs MMIC’s; and (c) PA module.
`
`A. Power Added Efficiency
`The efficiency of a PA is mainly determined by efficiency
`of the power transistor and losses in the output matching net-
`work. The latter strongly depends on the choice of technology
`and PAMs with their integrated matching generally score worse
`than MMICs with a matching circuit on the board. This solution
`has fewer losses because components like strip lines and capac-
`itors can be made much larger, of course at the cost of size. In a
`PAM, losses can vary between 0.9 dB, which is equivalent to a
`loss of 900 mW from a 5 W transistor output for 900-MHz GSM,
`to 0.3 dB, for which improved technologies like plated bonded
`copper and lossless MOS capacitors are needed. Power transis-
`tors can run with power added efficiencies anywhere between
`50%–80%. There are several factors influencing this. Power
`gain limits the PAE if the gain is low, say below 10 dB. In prac-
`tice, however, this is usually not very important when compared
`to two other factors. One is the output capacitance in combina-
`tion with losses in the Si substrate [2]. The output capacitance
`is partly collector–substrate or drain–substrate capacitance and
`partly interconnect capacitance. The associated substrate losses
`limit the efficiency. GaAs scores significantly better than Si
`where substrate removal techniques or very highly or very lowly
`doped substrates are needed to achieve competitive parasitics.
`The other factor determining PAE is the harmonic impedance
`at transistor input and output and especially the second-har-
`monic termination. If both input and output second-harmonic
`terminations are shorted, the device operates in an ideal class
`AB mode, achieving efficiencies of 78% in theory if parasitic
`losses are negligible. With nonshorted second harmonics, the
`device can have high efficiency when operating in a kind of in-
`verse class AB. In this case, the current waveform is more or
`less sinusoidal and the voltage wave has a half-sine form. Fig. 2
`shows the inverse class AB waveforms and Fig. 3 the PAE as
`a function of the phases of the second-harmonic reflection co-
`efficients at input and output. Full simulation details are de-
`scribed in [3]. Experiments have shown that it is possible to run
`Si bipolar devices, when optimally designed to reduce parasitic
`losses, with power-added efficiencies approaching the theoret-
`ical limit of 78% in inverse class AB [3]. Although high effi-
`ciencies can be obtained, the inverse class AB has a higher peak
`
`V ) and current (I ) versus time.
`Inverse class AB voltages (V
`Fig. 2.
`Note that the shape of I resembles a sine wave, whereas that of V resembles
`the positive half of a sine wave.
`
`;
`
`Fig. 3. PAE versus phases of second-harmonic source and load reflection
`coefficients. Class AB is only reached at one point, in which both input and
`output second-harmonic impedances are shorted. At random impedances,
`chances are good that one operates in inverse class AB.
`
`.
`voltage at the output than normal class AB by a factor of
`This means that the device needs to have a higher breakdown
`voltage to meet the normal ruggedness standards and this is at
`
`Authorized licensed use limited to: Sidley Austin LLP. Downloaded on July 07,2020 at 14:31:59 UTC from IEEE Xplore. Restrictions apply.
`
`Petitioners Lenovo Holding Co., Inc., Lenovo (United States) Inc. and
`Motorola Mobility LLC - Ex. 1015, p. 1383
`
`

`

`1384
`
`IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 36, NO. 9, SEPTEMBER 2001
`
`TABLE I
`DATA FOR DEVICES
`
`and less gain. So there is a tradeoff be-
`the cost of a lower
`tween efficiency, ruggedness, and gain. The better the product
`of breakdown voltage and transition frequency (
`) is,
`the better this tradeoff can be made and the easier a PA de-
`sign will be. Fig. 4 shows
`values for emitter–collector
`(
`) and base–collector (
`) breakdown as a function
`of
`and
`, respectively, for GaAs, InP, SiGe, and
`Si bipolar devices. Data were taken from literature or design
`
`manuals [see Table I]. There is no fundamental difference be-
`tween Si and SiGe transistors. However, in very shallow doping
`profiles, when
`V and
`V, the influ-
`ence of nonlocal avalanche becomes notable and the
`product reaches values above 200 for
`and above 500
`for
`. Such values are reached by low-voltage SiGe
`HBTs that have epitaxially grown, shallow doping profiles. The
`product of these HBTs is comparable to the values
`reached by GaAs HBTs at higher voltages. In today’s power am-
`plifiers, using battery voltages of 3 to 4.5 V, peak output voltages
`reach values as high as 18 V during mismatch.
`is not im-
`portant in this respect since there is always a low ohmic path
`between base and emitter. The real limiting parameter is
`which consequently has to be higher than 18 V. This means that
`the transistor needs a relatively thick collector and no benefit can
`be obtained from nonlocal avalanche. Si and SiGe bipolars per-
`form similarly whereas GaAs HBTs have higher
`prod-
`ucts. Although silicon LDMOS and GaAs FET and p-HEMT
`score very poorly on
`, very good PAs can still be made
`with these devices, indicating that this performance parameter
`is not the last word in PA performance. GaAs p-HEMTs have
`high efficiencies, up to 65% at 2 W and 1.8 GHz [4]. The dis-
`advantage of p-HEMT is that it needs a switch to turn it off.
`This is an expensive, space-consuming MOS device that re-
`duces the overall PA efficiency by about 5%, thereby annihi-
`lating the p-HEMT intrinsic efficiency advantage. LDMOS de-
`vices suffer from a high intrinsic output capacitance between
`drain and source. At low supply voltage, the output impedance
`gets very low and matching problems arise. This can be solved
`by splitting the output transistor into two or more sections and
`matching these separately at a higher impedance level. Some
`sort of power combining is necessary to obtain the full power of
`all sections.
`
`B. Linearity
`
`In general, linearity or nonlinear signal distortion in an elec-
`tric circuit is an interplay between the nonlinear elements in de-
`vices, the linear device elements including parasitics, and the
`circuit elements. Improving circuit performance is not merely
`a matter of exchanging an active device for a more linear one.
`The role that the intrinsic nonlinearities of active devices play is
`often obscured by the linear elements, i.e., the parasitics as well
`as the matching and feedback components, since these tend to
`linearize the total circuit behavior. This is the reason why bipolar
`devices in practice usually score rather well in comparison to
`FETs which are intrinsically more linear. The usual parameter
`to describe small-signal distortion is IP3/Pdc, i.e., third-order
`intercept point divided by the dc power consumption of the de-
`vice. IP3/Pdc is not adequate to describe class AB behavior,
`which is the operating mode of the power amplifier output tran-
`sistor and its driver. In AB mode, clipping behavior of the device
`plays an important role. This is determined by knee voltage (e.g.,
`) and quasi-saturation. Clipping results in gain compres-
`sion and amplitude–amplitude (AM–AM) modulation. Simula-
`tion results of two-tone intermodulation as a function of input
`power show that as soon as gain compression sets in, the dis-
`tortion rises considerably above the level predicted by the in-
`
`Authorized licensed use limited to: Sidley Austin LLP. Downloaded on July 07,2020 at 14:31:59 UTC from IEEE Xplore. Restrictions apply.
`
`Petitioners Lenovo Holding Co., Inc., Lenovo (United States) Inc. and
`Motorola Mobility LLC - Ex. 1015, p. 1384
`
`

`

`JOS: EVOLUTION OF CELLULAR PHONE PAs TO INTEGRATED RF FRONT-END MODULES
`
`1385
`
`Fig. 4. Literature data on BV f versus BV and BV
`(open circles) bipolar transistors.
`
` f versus BV
`
`for SiGe (crosses), Si (solid diamonds), GaAs (solid triangles), and InP
`
`Ge content in the base and the same collector thickness as the
`BJT. The ACPR (IS95) simulations yield
`46.3 dB for the Si
`BJT, which is exactly the same as measured on an actual de-
`vice, and
`46.8 dB for the SiGe HBT. There are currently no
`measured data on the SiGe HBT available. Both simulation and
`measurement were done at the 1-dB compression point, which
`is 12.7 dBm at 3.3-V supply voltage. The device emitter size is
`78 m by 0.8 m. A description in detail of these simulations
`can be found in [7] and [8]. At this moment, it is still unclear
`whether Si or SiGe can meet CDMA or W-CDMA linearity re-
`quirements at rated output power.
`
`III. ARCHITECTURE
`
`Cellular phone systems are and will be dominated by GSM in
`the forthcoming five years by volume. However, linearity and ef-
`ficiency requirements will be more stringent on wide-band sys-
`tems (2.5 G and 3 G), and these will drive the development in
`PA performance. Next to this, other developments will focus on
`adding functionality to the power amplifier. This stimulates a
`trend toward modules.
`Fig. 6 shows typical dual-band GSM cell phone RF func-
`tions. The antenna is followed by a diplexer, which is essen-
`tially a low-pass and a high-pass filter to separate the 900- and
`1800-MHz bands. Transmit and receive signals can be sepa-
`rated by a switch, because GSM is a time-multiplexed system.
`In the receiver path, a SAW filter eliminates all out-of-band
`noise to prevent overloading of the LNA. The LNA is either
`stand-alone or integrated into the transceiver IC. The transmit
`path may consist of a power VCO, also either integrated in the
`transceiver IC or stand-alone, which directly feeds into the PA.
`There are also other options for the path between the IC and PA
`but we will not discuss those in this paper. The output power
`of the PA is monitored and a feedback loop takes care of the
`powercontrol. Higher harmonics, caused by class AB operation
`of the power stage of the PA, are filtered out. Several functions
`will be integrated into an RF front-end module: power detector
`and control, antenna switch (Tx/Rx), diplex filter, lumped filters
`and, possibly, antenna. Fig. 7 shows an example of a triple-band
`GSM PA on an LTCC substrate with integrated antenna switch,
`diplexer, and harmonic filters. For the matching circuits and the
`diplexer, silicon chips are used with passive integration tech-
`nology. This is a cheap process with five mask layers that al-
`lows for capacitors and inductors. Q-factors well above 40 have
`been demonstrated for inductors at 2 GHz in this technology.
`The accuracy of the matching circuits is much better than what
`
`Fig. 5. Doping profiles for Si and SiGe used in ACPR (IS95) simulations. The
`base of the SiGe HBT is uniformly doped with 20% Ge. Collector thicknesses
`are identical for Si and SiGe.
`
`tercept point method [5]. AM–AM effects are especially impor-
`tant in modulation schemes with high peak to average power
`ratios like W-CDMA. Also, amplitude–phase (AM–PM) mod-
`ulation can contribute to intermodulation even well below the
`onset of gain compression if the amplifier is in deep class AB.
`There are two types of transistor nonlinearities, one linked to
`AM–AM and one to AM–PM modulation. Nonlinear transfer
`functions, like, e.g., transconductance, are related to AM–AM
`modulation. For instance, adjusting the quiescent current influ-
`ences the transconductance. This can be seen in class AB most
`notably at low output power, where gain compression is associ-
`ated with distortion. Also, clipping behavior can be considered
`as a kind of nonlinear transfer function at high output power. The
`fact that FETs and bipolar devices behave not very differently
`in class AB shows that clipping is often dominant. Nonlinear
`charge storage, which for instance plays a role in base-push out
`and quasi-saturation, is related to AM–PM modulation. In gen-
`eral, one can say that if the variation in the stored charge in the
`device as function of current and voltage ( Q/ V and Q/ I) is
`smaller, then the
`is higher and the distortion is better because
`the AM–PM modulation is reduced. The
`(
`product)
`of GaAs is superior to Si or SiGe due to a higher mobility and
`velocity overshoot. This is an intrinsic benefit for GaAs devices
`and they are therefore the first choice when it comes to linearity.
`It is not expected that SiGe will perform better on distortion than
`Si under large-signal conditions. This is corroborated by ACPR
`simulations performed with the mixed level simulator MAIDS
`[6] on transistors under CDMA conditions. Fig. 5 shows doping
`profiles of a Si BJT and a SiGe HBT, having 20% uniform
`
`Authorized licensed use limited to: Sidley Austin LLP. Downloaded on July 07,2020 at 14:31:59 UTC from IEEE Xplore. Restrictions apply.
`
`Petitioners Lenovo Holding Co., Inc., Lenovo (United States) Inc. and
`Motorola Mobility LLC - Ex. 1015, p. 1385
`
`

`

`1386
`
`IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 36, NO. 9, SEPTEMBER 2001
`
`Fig. 6. GSM front-end building block structure. The 900-MHz block diagram is shown in detail, and the 1800-MHz section is similar. Transceiver and base-band
`ICs are used for both 900 and 1800 MHz.
`
`in a front-end module. The filters are of ceramic resonator
`or SAW types which are large and expensive. Furthermore,
`SAW filters above 2.5 GHz are expected to be very expensive
`because either diamond substrates or submicron lithography is
`needed. A possible alternative is a Bulk Acoustic Wave (BAW)
`filter. Such a filter is made using BAW resonators as shown in
`Fig. 9. It consists of two electrodes with a piezo-electric film
`in between, in which acoustic waves are electrically excited.
`The resonator is made by depositing several layers onto a
`substrate and the actual resonator is isolated from the substrate
`by an acoustic reflector to avoid losses. The piezo-electric
`film, e.g., aluminum nitride, can be deposited as an oriented
`polycrystalline layer. The substrate can be silicon, so the BAW
`technology could in principle be integrated with the passive
`integration technology. A filter is made by using two resonators,
`one series and one parallel, the resonance frequencies of which
`are shifted with respect to each other (see Fig. 10). Such a shift
`can be established by extra mechanical loading of one of the
`two resonators by applying a thicker top electrode metal. For
`further reading on BAW filters, see [9]–[11].
`
`IV. FUTURE DEVELOPMENTS
`
`The key factors that drive PA development are performance,
`cost, and size. The set maker is not so much interested in how the
`PA scores itself on these factors but more in the score of the total
`PA or RF function in the telephone. In the near future, active de-
`vice technology and predominantly GaAs HBT technology will
`not be a roadblock for meeting the requirements for new sys-
`tems. Active device development will therefore be more evolu-
`tionary than revolutionary in the forthcoming years, especially
`for existing systems. Performance, cost, and size will benefit
`most from further integration in an RF front end module as said
`before. Integration cannot be done by merely taking components
`off the board and putting them inside a module, because there is
`no overall benefit to this approach. The costs would shift from
`set maker to module supplier but would not be reduced. What
`limits integration in a cost-effective way is the large variety of
`technologies used in the separate RF functions in a telephone.
`To do something about this, alternative technologies which are
`
`Fig. 7. Example of an integrated front-end module including triple-band GSM
`PA, antenna switch, diplex filter, and harmonic filters. The module is made
`on LTCC using Si passive integration chips for output matching and diplexer
`function. Total size for this experimental module is 140 mm .
`
`can be achieved by placing SMD capacitors on a substrate since
`it is only determined by spreading in the capacitor dielectric
`layer thickness. Besides higher accuracy, passive integration
`also offers a size and price reduction compared to conventional
`matching circuits.
`In Fig. 8, a typical CDMA RF front-end architecture is
`shown. Since CDMA is not time-multiplexed, it is essential
`to keep the transmit signal out of the receive path. Therefore,
`transmit and receive signals are separated by a duplex filter that
`meets very stringent requirements, since Tx and Rx channels
`are only 20 MHz apart. For the same reason, it is unlikely that
`the receiver and transmitter will ever be integrated together in
`a CDMA front-end module. Also, linearity requirements are
`severe for CDMA. To guarantee those under all circumstances,
`the PA is followed by an isolator, which protects the PA
`from mismatch conditions and prevents an increase in signal
`distortion during mismatch at the antenna. For the same reason,
`there is no power control in the PA. Power control is done in a
`separate small-signal amplifier directly after the upconverter.
`The SAW filter is needed to filter out the noise accumulated in
`the Rx band to protect the receiver LNA. From this picture, it
`is clear that the PA is surrounded by components that are im-
`possible to integrate on-chip but also very difficult to integrate
`
`Authorized licensed use limited to: Sidley Austin LLP. Downloaded on July 07,2020 at 14:31:59 UTC from IEEE Xplore. Restrictions apply.
`
`Petitioners Lenovo Holding Co., Inc., Lenovo (United States) Inc. and
`Motorola Mobility LLC - Ex. 1015, p. 1386
`
`

`

`JOS: EVOLUTION OF CELLULAR PHONE PAs TO INTEGRATED RF FRONT-END MODULES
`
`1387
`
`Fig. 8. CDMA front-end building block structure. An isolator is used to guarantee PA linearity during antenna mismatch. SAW and duplex filters prevent unwanted
`signals from the transmit path to enter the receive path.
`
`Fig. 9. Bulk-acoustic wave resonator.
`
`A. Parasitic Elements and Number of Components
`
`Reduction of parasitics can be achieved by several methods.
`Flip-chip assembly is an obvious choice, not only for Si but
`also for GaAs, because it eliminates bonding wire inductances
`and metallized via holes in GaAs devices, and because total PA
`module area can be shrunk. Thermal behavior is, however, often
`worse than in conventional assembly methods. How serious this
`is, depends on the phone system (e.g., GSM or W-CDMA) and
`on a careful thermal design.
`Another line of attack on parasitics in the module, especially
`in the SMD components, is passive integration, of which two
`versions exist: one by incorporation of passive elements in the
`multilayer substrate and one by integration on a separate car-
`rier substrate (e.g., a high-ohmic silicon wafer), resulting in a
`component that is flip-chipped onto the module substrate. The
`advantages of the first type are a simpler assembly with less
`components and possibility for large area capacitors and induc-
`tors for, e.g., dc decoupling. The advantages of the second op-
`tion are higher component accuracy, because components are
`defined by lithography, possible co-integration with devices like
`PIN diodes and BAW filters, and lower cost. Both versions re-
`duce the number of SMD components and the total module area.
`The reduction of active device parasitic elements is most
`acute in Si or SiGe since they score poorly on this aspect in
`comparison to semi-insulating GaAs. Too high parasitics will
`
`Fig. 10. Two BAW resonators are used to construct a BAW filter. The
`resonance frequency of the serial resonator is tuned to coincide with the
`antiresonance frequency of the parallel resonator. Tuning can be done for
`example by applying different mass-loading to each resonators.
`
`more suited to integration need to be found for the various func-
`tions. Some of these we have already mentioned: ceramic an-
`tennas that can be integrated, BAW instead of SAW filters, and
`multilayer substrates with well-defined second and higher order
`harmonic matching circuits. Another obstacle to pursue integra-
`tion effectively is the abundance of parasitic elements in the ac-
`tive devices, as well as in the passive (SMD) components, and
`the mere size and number of the SMD components.
`
`Authorized licensed use limited to: Sidley Austin LLP. Downloaded on July 07,2020 at 14:31:59 UTC from IEEE Xplore. Restrictions apply.
`
`Petitioners Lenovo Holding Co., Inc., Lenovo (United States) Inc. and
`Motorola Mobility LLC - Ex. 1015, p. 1387
`
`

`

`1388
`
`IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 36, NO. 9, SEPTEMBER 2001
`
`Fig. 11. SOA process eliminates all parasitics associated with the substrate in silicon-based processes at the same time providing a sort of chip-scaled package.
`
`compromise performance in linearity and efficiency. Even
`though high efficiencies have been demonstrated in Si bipolars,
`parasitics still hamper PA design tradeoffs.
`A very rigorous processing called Silicon On Anything
`(SOA) aims an all-out attack on parasitics. Fig. 11 gives a cross
`section of the SOA process and devices. The devices are made
`in an SOI starting wafer, in which a blanket buried layer is used.
`Device isolation is done by deep trench isolation (DTI) which
`also eliminates parasitics due to silicon underneath inductors.
`After device processing, the Si wafer is glued on a glass wafer,
`the Si substrate is complete removed up to the buried oxide
`and contact openings are made in this oxide to the back of the
`device for collector contact and to the front metallization for
`all other contacts. Thick Cu is plated, providing connections
`to the contact openings and options for interconnect and high
`Q inductors. Note that the large Cu collector contacts provide
`also extremely good thermal contact to the devices. The entire
`SOA IC can be directly PbSn soldered onto the module (or even
`on the board in case of a nonmodule solution). This scheme
`virtually eliminates all parasitics usually associated with Si
`IC’s. Although of course the intrinsic device performance, e.g.,
`, is better in GaAs than in Si, other properties like
`thermal contacting or Q factors for inductors and capacitors
`may actually be better in SOA. Therefore SOA is expected
`
`to give Si the possibility to compete with GaAs, with the
`exception of device linearity.
`
`V. SUMMARY
`
`The performance of several active devices in cellular phone
`power amplifiers has been treated concerning efficiency and lin-
`earity. The conclusion is that GaAs is the preferred technology
`when it comes to linearity, as is required by future wide-band
`(2.5 G and 3 G) systems. Efficiency is limited by parasitic output
`capacitance and second-order harmonic input and output termi-
`nation. Here also GaAs has a distinct advantage over Si because
`it has less parasitics. However, new technologies aimed at re-
`ducing parasitics will bring Si back into the game.
`We have presented a view of the future of PAs which will
`see a development in technologies, not so much in the intrinsic
`active devices as in the peripheral RF devices like antennas,
`filters, and SMD components. Further integration of possibly
`all RF functions in the telephone to inside a module will drive
`technology development. What is needed for that are, for in-
`stance, integrated (multiple) antennas, BAW filters, multilayer
`substrates, passive integration on substrate or on silicon and Sil-
`icon On Anything. These and other technologies will emerge in
`the near future to reshape the RF content of cellular phones.
`
`Authorized licensed use limited to: Sidley Austin LLP. Downloaded on July 07,2020 at 14:31:59 UTC from IEEE Xplore. Restrictions apply.
`
`Petitioners Lenovo Holding Co., Inc., Lenovo (United States) Inc. and
`Motorola Mobility LLC - Ex. 1015, p. 1388
`
`

`

`JOS: EVOLUTION OF CELLULAR PHONE PAs TO INTEGRATED RF FRONT-END MODULES
`
`1389
`
`ACKNOWLEDGMENT
`
`The author would like to thank F. van Rijs, R. Dekker,
`R. Mahmoudi, N. Pulsford, F. van Straten, P. Lok, M. Klee, and
`P. Löbl for their valuable contributions and fruitful discussions.
`
`REFERENCES
`[1] R. Dekker, P. Baltus, M. van Deurzen, W. V. D. Einden, H. Maas, and
`A. Wagemans, “An ultra low-power RF bipolar technology on glass,” in
`Proc. IEDM’97, Washington, DC, Dec. 1997, pp. 921–923.
`[2] F. van Rijs, H. A. Visser, and P. H. C. Magnee, “Record power added
`efficiency of bipolar power transistors for low voltage wireless applica-
`tions,” in Proc. IEDM’98, San Francisco, CA, Dec. 1998, pp. 957–961.
`[3] F. van Rijs, R. Dekker, H. A. Visser, H. G. A. Huizing, D. Hartskeerl,
`P. H. C. Magnee, and R. Dondero, “Influence of output impedance
`on power added efficiency of Si-bipolar power
`transistors,” in
`IMS2000. Boston, MA: MTT, June 2000.
`[4] D.-W. Wu, R. Parkhurst, S.-L. Fu, J. Wei, C.-Y. Su, S.-S. Chang, D. Moy,
`W. Fields, P. Chye, and R. Levitsky, “A 2W, 65% PAE single-supply
`enhancement-mode power HEMT for 3V PCS applications,” in Proc.
`IEEE MTT-S’97, Denver, CO, June 1997, pp. 1319–1322.
`[5] S. C. Cripps, RF Power Amplifiers
`for Wireless Communica-
`tions. Norwood, MA: Artech House, 1999, p. 196.
`[6] L. C. N. de Vreede, W. V. Noort, H. C. de Graaff, J. L. Tauritz, and J.
`W. Slotboom, “MAIDS, a microwave active integral device simulator,”
`in Proc. ESSDERC’97, Stuttgart, Germany, Sept. 1997, pp. 180–183.
`[7] R. Mahmoudi, J. L. Tauritz, and J. N. Burghartz, “Spread spectrum com-
`munication system performance otimization based on collector epilayer
`engineering,” in IEEE Topical Meeting on Silicon Monolithic Integrated
`Circuits in RF Systems, Garmisch, Germany, Apr. 2000, pp. 167–173.
`
`[8] R. Mahmoudi and J. L. Tauritz, “A systematic simulation of large-signal
`on-chip amplifier modules excited by WCDMA,” in IEEE 55th Auto-
`matic RF Tech.Group Conf. (ARFTG), Boston, MA, June 2000, pp. 1–9.
`[9] H. P. Löbl, M. Klee, O. Wunnicke, R. Kiewitt, R. Dekker, and E. V. Pelt,
`“Piezoelectric AlN and PZT films for micro-elecronic applications,” in
`1999 IEEE Ultrason. Symp., Lake Tahoe, CA, 1999, p. 1031.
`[10] H. P. Löbl, M. Klee, R. Milsom, R. Dekker, C. Metzmacher, W. Brand,
`and P. Lok, “Materials for bulk acoustic wave (BAW) resonators and
`filters,” in Microwave Materials and Applications MMA 2000 Int. Conf..
`Bled, Slovenia, Aug. 2000.
`[11] K. M. Lakin, “Thin film resonators and filters,” in Proc. 1999 IEEE
`Ultrason. Symp., Lake Tahoe, CA, 1999, p. 895.
`
`Rik Jos (M’00) was born in Laren, The Netherlands,
`in 1954. He received the M.Sc. and Ph.D. degrees in
`physics from the University of Utrecht, The Nether-
`lands, in 1982 and 1986, respectively.
`In 1986, he joined Philips Discrete Semi-
`conductors, Nijmegen, The Netherlands, where
`he developed silicon processes and devices for
`RF applications. He is particularly interested in
`semiconductor device physics and modeling with
`emphasis on nonlinear distortion in applications
`like high-efficiency power amplifiers, highly linear
`LDMOS devices, and CATV modules. Since 1995, he has headed the RF
`Device Technology Group of Philips Discrete Semiconductors
`Dr. Jos was a Power Device Subcommittee member of the BCTM in 2000.
`
`Authorized licensed use limited to: Sidley Austin LLP. Downloaded on July 07,2020 at 14:31:59 UTC from IEEE Xplore. Restrictions apply.
`
`Petitioners Lenovo Holding Co., Inc., Lenovo (United States) Inc. and
`Motorola Mobility LLC - Ex. 1015, p. 1389
`
`

This document is available on Docket Alarm but you must sign up to view it.


Or .

Accessing this document will incur an additional charge of $.

After purchase, you can access this document again without charge.

Accept $ Charge
throbber

Still Working On It

This document is taking longer than usual to download. This can happen if we need to contact the court directly to obtain the document and their servers are running slowly.

Give it another minute or two to complete, and then try the refresh button.

throbber

A few More Minutes ... Still Working

It can take up to 5 minutes for us to download a document if the court servers are running slowly.

Thank you for your continued patience.

This document could not be displayed.

We could not find this document within its docket. Please go back to the docket page and check the link. If that does not work, go back to the docket and refresh it to pull the newest information.

Your account does not support viewing this document.

You need a Paid Account to view this document. Click here to change your account type.

Your account does not support viewing this document.

Set your membership status to view this document.

With a Docket Alarm membership, you'll get a whole lot more, including:

  • Up-to-date information for this case.
  • Email alerts whenever there is an update.
  • Full text search for other cases.
  • Get email alerts whenever a new case matches your search.

Become a Member

One Moment Please

The filing “” is large (MB) and is being downloaded.

Please refresh this page in a few minutes to see if the filing has been downloaded. The filing will also be emailed to you when the download completes.

Your document is on its way!

If you do not receive the document in five minutes, contact support at support@docketalarm.com.

Sealed Document

We are unable to display this document, it may be under a court ordered seal.

If you have proper credentials to access the file, you may proceed directly to the court's system using your government issued username and password.


Access Government Site

We are redirecting you
to a mobile optimized page.





Document Unreadable or Corrupt

Refresh this Document
Go to the Docket

We are unable to display this document.

Refresh this Document
Go to the Docket