6/21/24, 11:42 PM
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`Physical properties of RT-LPCVD and LPCVD polysilicon thin films: application to emitter solar cell | IEEE Conference Publication …
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`Conferences > Proceedings of 1994 IEEE 1st ... 
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`Physical properties of RT-LPCVD and LPCVD polysilicon thin films: application to
`emitter solar cell
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`M. Lemiti ; B. Semmache ; Q.N. Le ; D. Barbier ; A. Laugier All Authors 
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`Abstract:
`This investigation was implemented in the framework of a novel all-low thermal budget polysilicon emitter solar cells
`fabrication technology. A comparative study of struc... View more
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`Abstract:
`This investigation was implemented in the framework of a novel all-low thermal budget polysilicon emitter solar cells
`fabrication technology. A comparative study of structural and electrical properties of thin silicon layers deposited by
`silane pyrolysis in a classical hot-wall furnace (LPCVD) and a cold-wall RTP reactor (RT-LPCVD) has been made.
`Deposition conditions and rapid thermal anneals were varied in order to improve the physical properties of RT-LPCVD
`polysilicon films. The structural properties have been characterized by means of grazing X-ray diffraction and cross-
`sectional TEM analysis. Sheet resistivity measurements performed on POCl/sub 3/-doped and subsequently rapid
`thermal annealed films showed the feasibility of low resistivity films particularly when the polysilicon layers are initially
`deposited in the amorphous state. Finally, RTCVD polysilicon emitter solar cells with various thicknesses were tested
`by spectral photo-response analysis.
`
`Published in: Proceedings of 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion - WCPEC (A Joint
`Conference of PVSC, PVSEC and PSEC)
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`6/21/24, 11:42 PM
`
`Physical properties of RT-LPCVD and LPCVD polysilicon thin films: application to emitter solar cell | IEEE Conference Publication …
`
`Date of Conference: 05-09 December 1994
`
`DOI: 10.1109/WCPEC.1994.520203
`
`Date Added to IEEE Xplore: 06 August 2002
`
`Publisher: IEEE
`
`Print ISBN:0-7803-1460-3
`
`Conference Location: Waikoloa, HI, USA
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`Petitioner Canadian Solar Inc. - Ex. 1046, p. 2
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`Physical properties of RT-LPCVD and LPCVD polysilicon thin films: application to emitter solar cell | IEEE Conference Publication …
`
`11. B. Semmache, "Radial control of the physical properties of RT-LPCVD polysilicon films deposited in a
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`Petitioner Canadian Solar Inc. - Ex. 1046, p. 3
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`6/21/24, 11:42 PM
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`Physical properties of RT-LPCVD and LPCVD polysilicon thin films: application to emitter solar cell | IEEE Conference Publication …
`
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`6/21/24, 11:42 PM
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`Physical properties of RT-LPCVD and LPCVD polysilicon thin films: application to emitter solar cell | IEEE Conference Publication …
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`Petitioner Canadian Solar Inc. - Ex. 1046, p. 5
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