6/22/24, 3:36 PM
`
`Modeling and characterization of high-efficiency silicon solar cells fabricated by rapid thermal processing, screen printing, and plas…
`
`IEEE.org
`
`IEEE Xplore
`
`IEEE SA
`
`IEEE Spectrum
`
`More Sites
`
`Donate
`
`Cart
`
`
`
`
`Create Account
`
`Personal Sign In
`
`
`
`Browse  My Settings  Help 
`
`Access provided by:
`Sidley Austin LLP
`
`File Cabinet
`
`Sign Out
`Show Usage 
`
`Access provided by:
`Sidley Austin LLP
`
`File Cabinet
`
`Sign Out
`Show Usage 
`
`All
`
`
`
`
`
`ADVANCED SEARCH
`
`Journals & Magazines > IEEE Transactions on Electron... > Volume: 44 Issue: 9 
`
`Modeling and characterization of high-efficiency silicon solar cells fabricated by
`rapid thermal processing, screen printing, and plasma-enhanced chemical vapor
`deposition
`Publisher: IEEE
`
`Cite This
`
` PDF
`
`A
`
`lerts
`
`Manage Content Alerts
`
`Add to Citation Alerts
`
`  
`
`P. Doshi ; J. Mejia ; K. Tate ; A. Rohatgi All Authors 
`
`24
`Cites in
`Papers
`
`272
`Full
`Text Views
`
` D
`
`ownl
`PDF
`
`Abstract:
`This paper presents, for the first time, the successful integration of three rapid, low-cost, high-throughput technologies
`for silicon solar cell fabrication, namely: rap... View more
`
` Metadata
`Abstract:
`This paper presents, for the first time, the successful integration of three rapid, low-cost, high-throughput technologies
`for silicon solar cell fabrication, namely: rapid thermal processing (RTP) for simultaneous diffusion of a phosphorus
`emitter and aluminum back surface field; screen printing (SP) for the front grid contact; and low-temperature plasma-
`enhanced chemical vapor deposition (PECVD) of SiN for antireflection coating and surface passivation. This
`combination has resulted in 4 cm/sup 2/ cells with efficiencies of 16.3% and 15.9% on 2 /spl Omega/-cm FZ and Cz,
`respectively, as well as 15.4% efficient, 25-cm/sup 2/ FZ cells. Despite the respectable RTP/SP/PECVD efficiencies,
`cells formed by conventional furnace processing and photolithography (CFP/PL) give /spl sim/2% (absolute) greater
`efficiencies. Through in-depth modeling and characterization, this efficiency difference is quantified on the basis of
`emitter design and front surface passivation, grid shading, and quality of contacts. Detailed analysis reveals that the
`difference is primarily due to the requirements of screen printing and not RTP.
`
`Published in: IEEE Transactions on Electron Devices ( Volume: 44 , Issue: 9, September 1997)
`
`Abstract
`
`Authors
`
`References
`
`Citations
`
`Keywords
`
`Metrics
`
`More Like This
`
`https://ieeexplore.ieee.org/document/622596/references#references
`
`1/6
`
`
`
`Petitioner Canadian Solar Inc. - Ex. 1056, p. 1
`
`

`

`6/22/24, 3:36 PM
`
`Modeling and characterization of high-efficiency silicon solar cells fabricated by rapid thermal processing, screen printing, and plas…
`
`Page(s): 1417 - 1424
`
`DOI: 10.1109/16.622596
`
`Date of Publication: September 1997 
`
`Publisher: IEEE
`
` ISSN Information:
`
`References is not available for this document.
`
`Authors
`
`References
`
`Select All
`
`
`
`
`
`Export 
`
`References & Cited By
`
`1.
`
`J. Nijs, E. Demesmaeker, J. Szlufcik, J. Poortmans, L. Frisson, K. De Clercq, et al., "Latest efficiency
`results with the screenprinting technology and comparison with the buried contact structure", Proc. 24th
`IEEE Photovoltaic Specialists Conf., pp. 1242-1249, 1994.
`View Article  Google Scholar 
`
`2. H. Nakaya, M. Nishida, Y. Takeda, S. Moriuchi, T. Tonegawa, T. Machida, et al., "Polycrystalline silicon
`solar cells with V-grooved surface", Tech. Dig. Int. Photovoltaic Solar Energy Conf., pp. 91-92, 1993.
`Google Scholar 
`
`3. L. Verhoef, P.-P. Michiels, R. J. C. van Zolingen, H. H. C. de Moor, A. Burgers, R. Steeman, et al., "Low-
`cost multicrystalline silicon solar modules with 16% encapsulated cell efficiency", Proc. 24th IEEE
`Photovoltaic Specialists Conf., pp. 1547-1550, 1994.
`View Article  Google Scholar 
`
`4. K. Fukui, H. Yamashita, M. Takayama, K. Okada, K. Masuri, K. Shirasawa, et al., " 15 cm \$times\$ 15
`cm high efficiency multicrystalline silicon solar cell ", Proc. 22nd IEEE Photovoltaic Specialists Conf., pp.
`1040-1044, 1991.
`View Article  Google Scholar 
`
`5. R. P. S. Thakur, "Thermal budget considerations in rapid isothermal processing", Appl. Phys. Lett., vol.
`64, pp. 327-329, 1994.
`CrossRef  Google Scholar 
`
`6. C. Leguijt, P. Lo¨lgen, J. A. Eikelboom, A. W. Weeber, F. M. Schuurmans, W. C. Sinke, et al., "Low
`temperature surface passivation for silicon solar cells", Sol. Energy Materials Sol. Cells, vol. 40, pp. 297-
`345, Aug. 1996.
`CrossRef  Google Scholar 
`
`7. R. Gonsiorawski and G. Czernienko, Method of fabricating solar cells with silicon nitride coating, June
`1988.
`Google Scholar 
`
`8. Product information regarding RTP solar cell furnace.
`Google Scholar 
`
`9. P. Doshi, A. Rohatgi, M. Ropp, Z. Chen, D. Ruby and D. L. Meier, "Rapid thermal processing of high-
`efficiency silicon solar cells with controlled in-situ annealing", 24th IEEE Photovoltaic Specialists Conf.,
`pp. 1299-1302, 1994.
`View Article  Google Scholar 
`
`https://ieeexplore.ieee.org/document/622596/references#references
`
`2/6
`
`Petitioner Canadian Solar Inc. - Ex. 1056, p. 2
`
`

`

`6/22/24, 3:36 PM
`
`Modeling and characterization of high-efficiency silicon solar cells fabricated by rapid thermal processing, screen printing, and plas…
`
`10. A. Rohatgi, P. Doshi, M. Ropp, L. Cai, W. A. Doolittle, S. Narasimha, et al., "Improved understanding
`and optimization of RTP and PECVD processes for high-efficiency silicon solar cells", 13th Europ.
`Photovoltaic Solar Energy Conf., Oct. 1995.
`Google Scholar 
`
`11. P. Doshi, J. Mejia, K. Tate and A. Rohatgi, "Integration of screen-printing and RTP technologies for
`silicon solar cell fabrication", IEEE Electron Device Lett., vol. 17, pp. 404-406, Aug. 1996.
`View Article  Google Scholar 
`
`12. P. Doshi, J. Mejia, K. Tate, S. Kamra, A. Rohatgi, S. Narayanan, et al., "High-efficiency silicon solar
`cells by low-cost rapid thermal processing screen-printing and plasma enhanced chemical vapor
`deposition", Proc. 25th IEEE Photovoltaic Specialists Conf., 1996.
`View Article  Google Scholar 
`
`13. S. Narasimha, J. Mejia and A. Rohatgi, "Screen-printed aluminum back surface fields for silicon solar
`cells", 6th Workshop Role Impurities Defects Silicon Device Processing, Aug. 1996.
`Google Scholar 
`
`14. P. Basore, "PC-1D version 3: Improved speed and convergence", Proc. 22nd IEEE Photovoltaic
`Specialists Conf., pp. 299-302, 1991.
`View Article  Google Scholar 
`
`15. S. Sivoththaman, W. Laureys, P. Schepper, J. Nijs and R. Mertens, " Rapid thermal processing of
`conventionally and electro-magnetically cast 100 cm \$^2\$ multicrystalline silicon ", Proc. 25th IEEE
`Photovoltaic Specialists Conf., 1996.
`View Article  Google Scholar 
`
`16. P. Doshi and A. Rohatgi, "18% efficient silicon photovoltaic devices by rapid thermal diffusion and
`oxidation", IEEE Trans. Electron Devices.
`View Article  Google Scholar 
`
`17. L. Cai, Improved understanding and control of the properties of SiN films and its applications to silicon
`solar cells, 1997.
`Google Scholar 
`
`18. D. K. Schroder, "Contact resistance and schottky barrier height", Semiconductor Material and Device
`Characterization, pp. 114-121, 1990.
`Google Scholar 
`
`19. N. Wyeth, "Sheet resistance component of the series resistance in a solar cell as a function of grid
`geometry", Solid State Electron., vol. 20, pp. 629-634, 1977.
`CrossRef  Google Scholar 
`
`20. D. E. Kane and R. M. Swanson, "Measurement of the emitter saturation current by a contactless
`photoconductivity decay method", Proc. 18th IEEE Photovoltaic Specialists Conf., pp. 578-583, 1985.
`Google Scholar 
`
`21. P. Lo¨lgen, Surface and volume recombination in silicon solar cells, pp. 58-59, 1995.
`Google Scholar 
`
`22. S. Naryanan and M. Green, "Improvement in the open-circuit voltage and efficiency of silicon solar cells
`by rear aluminum treatment", Sol. Cells, vol. 26, pp. 329-334, 1989.
`CrossRef  Google Scholar 
`
`https://ieeexplore.ieee.org/document/622596/references#references
`
`3/6
`
`Petitioner Canadian Solar Inc. - Ex. 1056, p. 3
`
`

`

`6/22/24, 3:36 PM
`
`Modeling and characterization of high-efficiency silicon solar cells fabricated by rapid thermal processing, screen printing, and plas…
`
`23. P. Hahne, W. Wettling and R. Schindler, "Aluminum back surface field doping profiles by conventional
`and rapid thermal processing", 12th Europ. Photovoltaic Solar Energy Conf., 1994.
`Google Scholar 
`
`View More
`
`Citations
`
`Keywords
`
`Metrics
`
`More
`Like
`This
`
`Integration of screen-printing and rapid thermal processing technologies for silicon solar cell fabrication
`IEEE Electron Device Letters
`Published: 1996
`
`High-efficiency silicon solar cells by low-cost rapid thermal processing, screen printing, and plasma-enhanced chemical vapor deposition
`Conference Record of the Twenty Fifth IEEE Photovoltaic Specialists Conference - 1996
`Published: 1996
`
`
`
`
`
`
`
`Show
`More
`
`https://ieeexplore.ieee.org/document/622596/references#references
`
`4/6
`
`Petitioner Canadian Solar Inc. - Ex. 1056, p. 4
`
`

`

`6/22/24, 3:36 PM
`
`Modeling and characterization of high-efficiency silicon solar cells fabricated by rapid thermal processing, screen printing, and plas…
`
`IEEE Personal Account
`
`Purchase Details
`
`Profile Information
`
`Need Help?
`
`Follow
`
`CHANGE
`USERNAME/PASSWORD
`
`PAYMENT OPTIONS
`
`VIEW PURCHASED
`DOCUMENTS
`
`COMMUNICATIONS
`PREFERENCES
`
`PROFESSION AND
`EDUCATION
`
`US & CANADA: +1 800
`678 4333
`
`WORLDWIDE: +1 732
`981 0060
`
`TECHNICAL INTERESTS
`
`CONTACT & SUPPORT
`
`   
`
`About IEEE Xplore | Contact Us | Help | Accessibility | Terms of Use | Nondiscrimination Policy | IEEE Ethics Reporting  | Sitemap |
`IEEE Privacy Policy
`A not-for-profit organization, IEEE is the world's largest technical professional organization dedicated to advancing technology for the benefit of
`humanity.
`
`© Copyright 2024 IEEE - All rights reserved, including rights for text and data mining and training of artificial intelligence and similar technologies.
`
`IEEE Account
`
`» Change Username/Password
`» Update Address
`Purchase Details
`
`» Payment Options
`» Order History
`» View Purchased Documents
`Profile Information
`
`» Communications Preferences
`» Profession and Education
`https://ieeexplore.ieee.org/document/622596/references#references
`
`5/6
`
`Petitioner Canadian Solar Inc. - Ex. 1056, p. 5
`
`

`

`6/22/24, 3:36 PM
`» Technical Interests
`Need Help?
`
`Modeling and characterization of high-efficiency silicon solar cells fabricated by rapid thermal processing, screen printing, and plas…
`
`» US & Canada: +1 800 678 4333
`» Worldwide: +1 732 981 0060
`» Contact & Support
`
` About IEEE Xplore Contact Us
`
`|
`
`
`
`|
`
`Help
`
`
`
`|
`
`Accessibility
`
`
`
`|
`
`Terms of Use
`
`
`
`|
`
`Nondiscrimination Policy
`
`
`
`|
`
`Sitemap
`
`
`
`|
`
`Privacy & Opting Out of Cookies
`
`A not-for-profit organization, IEEE is the world's largest technical professional organization dedicated to advancing technology for the benefit of humanity.
`© Copyright 2024 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
`
`https://ieeexplore.ieee.org/document/622596/references#references
`
`6/6
`
`Petitioner Canadian Solar Inc. - Ex. 1056, p. 6
`
`