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`Novel light trapping scheme for thin crystalline cells utilizing deep structures on both wafer sides [solar cells] | IEEE Conference Pu…
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`Novel light trapping scheme for thin crystalline cells utilizing deep structures on
`both wafer sides [solar cells]
`Publisher: IEEE
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`A.M. Jorgensen ; T. Clausen ; O. Leistiko All Authors
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`Abstract:
`A new light trapping structure is presented with trapping capabilities comparable to or better than those of the
`perpendicular grooves structure. The new structure traps ... View more
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` Metadata
`Abstract:
`A new light trapping structure is presented with trapping capabilities comparable to or better than those of the
`perpendicular grooves structure. The new structure traps a larger fraction of rays for 8-80 passes than the
`perpendicular grooves structure. The average path length enhancement is about 62 times the average thickness. The
`structure consists of deep (-200 /spl mu/m) inverted pyramids on the front side and deep (-200 /spl mu/m) truncated
`pyramids with eight sides on the back. The structure is realized in crystalline silicon by wet chemical etching using
`potassium hydroxide (KOH) and isopropanol (IPA). A process for creating thin solar cells with this light trapping scheme
`is described. The process includes only two main photolithographic steps and features a self-aligned front metallization.
`The process uses 250 /spl mu/m wafers to create cells that on average are about 70 /spl mu/m thick.
`
`Published in: Conference Record of the Twenty Sixth IEEE Photovoltaic Specialists Conference - 1997
`
`Date of Conference: 29 September 1997 - 03 October
`1997
`
`DOI: 10.1109/PVSC.1997.654079
`
`Publisher: IEEE
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`Date Added to IEEE Xplore: 06 August 2002
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`Conference Location: Anaheim, CA, USA
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`Petitioner Canadian Solar Inc. - Ex. 1059, p. 1
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`Novel light trapping scheme for thin crystalline cells utilizing deep structures on both wafer sides [solar cells] | IEEE Conference Pu…
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`Novel light trapping scheme for thin crystalline cells utilizing deep structures on
`both wafer sides [solar cells]
`Publisher: IEEE
`
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`
`lerts
`
`Manage Content Alerts
`Add to Citation Alerts
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`
`
`A.M. Jorgensen ; T. Clausen ; O. Leistiko All Authors
`
`56
`Full
`Text Views
`
`1C
`
`ites in
`Patent
`
`2C
`
`ites in
`Papers
`
` D
`
`ownl
`
`Abstract:
`A new light trapping structure is presented with trapping capabilities comparable to or better than those of the
`perpendicular grooves structure. The new structure traps ... View more
`
` Metadata
`Abstract:
`A new light trapping structure is presented with trapping capabilities comparable to or better than those of the
`perpendicular grooves structure. The new structure traps a larger fraction of rays for 8-80 passes than the
`perpendicular grooves structure. The average path length enhancement is about 62 times the average thickness. The
`structure consists of deep (-200 /spl mu/m) inverted pyramids on the front side and deep (-200 /spl mu/m) truncated
`pyramids with eight sides on the back. The structure is realized in crystalline silicon by wet chemical etching using
`potassium hydroxide (KOH) and isopropanol (IPA). A process for creating thin solar cells with this light trapping scheme
`is described. The process includes only two main photolithographic steps and features a self-aligned front metallization.
`The process uses 250 /spl mu/m wafers to create cells that on average are about 70 /spl mu/m thick.
`
`Published in: Conference Record of the Twenty Sixth IEEE Photovoltaic Specialists Conference - 1997
`
`Date of Conference: 29 September 1997 - 03 October
`1997
`
`DOI: 10.1109/PVSC.1997.654079
`
`Publisher: IEEE
`
`Date Added to IEEE Xplore: 06 August 2002
`
`Conference Location: Anaheim, CA, USA
`
`Abstract
`
`Authors
`
`References
`
`Citations
`
`Keywords
`
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`
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`
`
`Petitioner Canadian Solar Inc. - Ex. 1059, p. 1
`
`
`
`6/22/24, 3:52 PM
`
`Novel light trapping scheme for thin crystalline cells utilizing deep structures on both wafer sides [solar cells] | IEEE Conference Pu…
`Print ISBN:0-7803-3767-0
`
`Print ISSN: 0160-8371
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`References & Cited By
`
`1. P. Campbell and M. A. Green, "Light Trapping Properties of Pyramidally Textured Surfaces", J. Appl.
`Phys., vol. 62, no. 1, pp. 243-249, 1987.
`CrossRef Google Scholar
`
`2. T. Uematsu, M. Ida, K. Hane, Y. Hayashi and T. Saitoh, "A new Light Trapping Structure for very-thin
`High-efficiency Silicon Solar Cells", 20th PVSC, pp. 792-795, 1988.
`View Article Google Scholar
`
`3. B. Puers and W. Sansen, "Compensation Structures for Convex Corner Micromachining in Silicon",
`Sensors and Actuators A, vol. 23, pp. 1036-1041, 1990.
`CrossRef Google Scholar
`
`4.
`
`I. Barycka and I. Zubel, "Silicon Anisotropic Etching in KOH-isopropanol Etchant", Sensors and Actuators
`A, vol. 48, pp. 229-238, 1995.
`CrossRef Google Scholar
`
`5. M. Vangbo and Y. Bäcklund, "Precise Mask Alignment to the Crystallographic Orientation of Silicon
`Wafers using wet Anisotropic Etching", Journal of Micromechanical Engineering, vol. 6, pp. 279-284,
`1996.
`CrossRef Google Scholar
`
`6. B. Hartiti, S. Sivoththaman, R. Schindler, J. Nijs, J. C. Muller and P. Siffert, "Low Temperature Formation
`of Emitter and BSF by Rapid Thermal Co-Diffusion of P Al or B", First WCPEC, pp. 1519-1522, 1994.
`View Article Google Scholar
`
`7. W. K. Schubert and J. M. Gee, "Phosphorous and Aluminum Gettering - Investigation of Synergistic
`Effects in Single-Crystal and Multicrystalline Silicon", 25th PVSC, pp. 437-440, 1996.
`View Article Google Scholar
`
`8. H. Hieslmair, S. McHugo and E. R. Weber, "Aluminum Backside Segregation Gettering", 25th PVSC, pp.
`441-444, 1996.
`View Article Google Scholar
`
`9.
`
`J. S. Kang and D. K. Schroder, "Gettering in Silicon", J. Appl. Phys., vol. 65, no. 8, pp. 2974-2985, 1989.
`CrossRef Google Scholar
`
`10. P. Doshi, A. Rohatgi, M. Ropp, Z. Chen, D. Ruby and D. L. Meier, "Rapid Thermal Processing of High-
`efficiency Silicon Solar Cells with Controlled in-situ Annealing", First WCPEC, pp. 1299-1302, 1994.
`View Article Google Scholar
`
`View More
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`https://ieeexplore.ieee.org/document/654079/references#references
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`2/4
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`Petitioner Canadian Solar Inc. - Ex. 1059, p. 2
`
`
`
`6/22/24, 3:52 PM
`
`Novel light trapping scheme for thin crystalline cells utilizing deep structures on both wafer sides [solar cells] | IEEE Conference Pu…
`
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`Efficiency Improvement in Nonprime Crystalline Silicon Solar Cells by Chemical Isolation of Shunts Under Front Metallization
`IEEE Journal of Photovoltaics
`Published: 2015
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`Surface Passivation of Crystalline Silicon Solar Cells by Atmospheric Pressure Chemical Vapor Deposition
`2006 IEEE 4th World Conference on Photovoltaic Energy Conference
`Published: 2006
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`3/4
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`Petitioner Canadian Solar Inc. - Ex. 1059, p. 3
`
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`6/22/24, 3:52 PM
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`Novel light trapping scheme for thin crystalline cells utilizing deep structures on both wafer sides [solar cells] | IEEE Conference Pu…
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