Filed March 30, 2005

Serial No. 78598474

Registered May 30, 2006

Registration No. 3,097,721

Class Industrial production machines for treating and processing microelectronic substrates namely semiconductor wafers, semiconductor substrates, micromachine substrates, [ flat panel displays ] and data disks, namely, automated multi-station fluid processing machine systems for the manufacture and processing of microelectronic substrates comprising substrate handling machines, substrate chemical processing machines and related controllers sold as a unit; 013; 019; 021; 023; 031; 034; 035

Case Type Trademark