Filed Oct. 27, 2005

Serial No. 79018668

Registered Sept. 16, 2008

Registration No. 3,501,917

Examining Attorney ELI J HELLMAN

Class Industrial production machines for the manufacturing of substrates, namely, semiconductor substrates, silicon chips, wafers, and glass and ceramic substrates; and structural parts thereof; industrial production machines for wet-chemical and dry treatment of substrates, namely, semiconductor substrates, silicon chips, wafers, glass and ceramic substrates; and structural parts thereof; fully automatic industrial production machines for cleaning, lacquering, developing, etching and stripping substrates, baking, dying and treatment by IN, visible, or IR light irradiation of substrates, namely, semiconductor substrates, silicon chips, wafers, glass and ceramic substrates, and structural parts thereof; semiautomatic industrial production machines for the treatment of substrates, namely, manual insertion and removal apparatus for cleaning, lacquering, developing, etching and stripping substrates, baking, drying and treatment by IN, visible, or IR light irradiation of substrates, namely, semiconductor substrates, silicon chips, wafers, photo masks, glass and ceramic substrates, and structural parts thereof; 013; 019; 021; 023; 031; 034; 035; 100; 103; 106

Case Type Trademark Service mark