Filed Sept. 21, 2023

Serial No. 98190488

Examining Attorney MICHAEL R TANNER

Class Machines for assembling and packaging of electronic semiconductor chips; machines for manufacturing semiconductors, and structural parts and fittings therefor; semiconductor manufacturing machines; semiconductor manufacturing machines and systems composed of a vacuum chamber for accommodating semiconductor wafers and structural parts therefor and industrial machines for handling and transferring semiconductor wafers into and out of the vacuum chamber, and structural parts therefor; machines for the treatment of semiconductor wafers, namely, semi-conductor wafer processing equipment; industrial machines for assembling and packaging of electronic chips; industrial chemical reactors; machines and equipment for the plasma assisted manufacture of semiconductor devices, namely, vacuum treatment machines for plasma assisted deposition used to manufacture semiconductor wafers, and vacuum machines for depositing fine films on semiconductor wafers; plasma enhanced chemical vapor deposition machines for use in manufacturing semiconductor wafers and structural parts and fittings therefor; semiconductor wafer processing equipment, namely, plasma-enhanced industrial chemical deposition reactors; electronically operated machines for use in the manufacture of semiconductors and for the deposition of thin films on semiconductor wafers by plasma-enhanced chemical vapor deposition; industrial chemical or photochemical reactors used in semiconductor wafer processing for the chemical treatment and the thermal treatment of semiconductor wafers and for the chemical cleaning of semiconductor wafers by means of a gas phase process; industrial chemical or photochemical reactors used in semiconductor wafer processing for the chemical treatment and the thermal treatment of semiconductor wafers and for the chemical cleaning of semiconductor wafers by means of a gas phase process, that also uses plasma gas discharge; and structural parts and fittings for the aforementioned goods; 013; 019; 021; 023; 024; 031; 034; 035; 021; 023; 026; 036; 038

Case Type Trademark