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ELECTRON BEAM RESIST

09/868,274 | U.S. Patent Application

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Filed Aug. 3, 2001

Examiner WALKE, AMANDA C

Class 430

Art Group 1752

Patent No. 6,503,688

Case Type Utility

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Last Updated: 1 month ago

Date	#	Transaction
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ELECTRON BEAM RESIST

09/868,274 | U.S. Patent Application

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