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WAFTER CARRIER FOR CHEMICAL VAPOR DEPOSITION SYSTEMS

13/450,062 | U.S. Patent Application

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Filed April 18, 2012
Examiner Yuechuan Yu
Class 118
Art Group 1718
Patent No. 10,316,412
Case Type Utility
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Last Updated: 6 days, 7 hours ago
Date # Transaction