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Click below for detailed party information:

Inventors

Sudhakar Gopalakrishnan Peter Reimer John Haruff Dennis Smith

Applicant

Lam Research Corporation

Assignee

LAM RESEARCH CORPORATION

Other Parties

GOPALAKRISHNAN, SUDHAKAR, Assignor SMITH, DENNIS, Assignor HARUFF, JOHN, Assignor REIMER, PETER, Assignor

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Mass Flow Controller for Substrate Processing

15/917,528 | U.S. Patent Application

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Filed March 9, 2018

Examiner Kevin F Murphy

Class 137

Art Group 3753

Patent No. 10,591,934

Case Type Utility

Status Patented Case

Last Updated: 2 days, 3 hours ago

Date	#	Transaction
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Mass Flow Controller for Substrate Processing

15/917,528 | U.S. Patent Application

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