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Click below for detailed party information:

Inventors

Yuki HOSAKA Yoshihiro UMEZAWA Toshiki NAKAJIMA

Applicant

TOKYO ELECTRON LIMITED

Assignee

TOKYO ELECTRON LIMITED

Other Parties

HOSAKA, YUKI, Assignor NAKAJIMA, TOSIHIKI, Assignor UMEZAWA, YOSHIHIRO, Assignor

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PLASMA PROCESSING APPARATUS

17/402,398 | U.S. Patent Application

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Filed Aug. 13, 2021

Examiner Laureen Chan

Class 156

Art Group 1716

Patent No. 11,804,366

Case Type Utility

Status Patented Case

Last Updated: 1 week ago

Date	#	Transaction
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PLASMA PROCESSING APPARATUS

17/402,398 | U.S. Patent Application

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