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Inventors

Nobutaka FUKUNAGA Masakazu YARIMITSU Katsuhisa FUJII Hidejiro RYU

Applicant

Tokyo Electron Limited

Assignee

TOKYO ELECTRON LIMITED

Other Parties

RYU, HIDEJIRO, Assignor YARIMITSU, MASAKAZU, Assignor FUKUNAGA, NOBUTAKA, Assignor FUJII, KATSUHISA, Assignor

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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

17/415,756 | U.S. Patent Application

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Filed June 18, 2021

Examiner Alberto Saenz

Class 451

Art Group 3723

Patent No. 12,377,519

Case Type Utility

Status Patented Case

Last Updated: 3 days, 2 hours ago

Date	#	Transaction
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

17/415,756 | U.S. Patent Application

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