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Inventors

Dennis SMITH Peter REIMER Sudhakar GOPALAKRISHNAN

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LAM RESEARCH CORPORATION

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MEMS-BASED CORIOLIS MASS FLOW CONTROLLER

17/42,059 | U.S. Patent Application

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Filed Sept. 25, 2020

Examiner Erika J Villaluna

Class 73

Art Group 2852

Patent No. 11,860,016

Case Type Utility

Status Patented Case

Last Updated: 4 days, 23 hours ago

Date	#	Transaction
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MEMS-BASED CORIOLIS MASS FLOW CONTROLLER

17/42,059 | U.S. Patent Application

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