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Click below for detailed party information:

Inventors

Tetsuya MIYASHITA Kanto NAKAMURA Yusuke KIKUCHI

Applicant

TOKYO ELECTRON LIMITED

Assignee

TOKYO ELECTRON LIMITED

Other Parties

MIYASHITA, TETSUYA, Assignor KIKUCHI, YUSUKE, Assignor NAKAMURA, KANTO, Assignor

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MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING METHOD

17/490,574 | U.S. Patent Application

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Filed Sept. 30, 2021

Examiner Rodney Glenn Mcdonald

Class 204

Art Group 1794

Patent No. 11,901,166

Case Type Utility

Status Patented Case

Last Updated: 5 days, 13 hours ago

Date	#	Transaction
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MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING METHOD

17/490,574 | U.S. Patent Application

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