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Click below for detailed party information:

Inventors

Tokunobu AKAO Tetsuya KOSUGI

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KOKUSAI ELECTRIC CORPORATION

Assignee

KOKUSAI ELECTRIC CORPORATION

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AKAO, TOKUNOBU, Assignor KOSUGI, TETSUYA, Assignor

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TEMPERATURE SENSOR, HEATER UNIT, AND SUBSTRATE PROCESSING APPARATUS

17/513,354 | U.S. Patent Application

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Filed Oct. 28, 2021

Examiner Thomas John Ward

Class 219

Art Group 3761

Case Type Utility

Status Response to Non-Final Office Action Entered and Forwarded to Examiner

Last Updated: 6 days, 17 hours ago

Date	#	Transaction
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TEMPERATURE SENSOR, HEATER UNIT, AND SUBSTRATE PROCESSING APPARATUS

17/513,354 | U.S. Patent Application

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