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Click below for detailed party information:

Inventors

Wan-Yao WU Chang-Yun CHANG Ming-Chang WEN

Applicant

Taiwan Semiconductor Manufacturing Co., Ltd.

Assignee

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

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CHANG, CHANG-YUN, Assignor WEN, MING-CHANG, Assignor WU, WAN-YAO, Assignor

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PROFILE CONTROL OF A GAP FILL STRUCTURE

17/526,301 | U.S. Patent Application

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Filed Nov. 15, 2021

Examiner Laura Mary Menz

Class 257

Art Group 2813

Patent No. 12,057,349

Case Type Utility

Status Patented Case

Last Updated: 2 weeks, 2 days ago

Date	#	Transaction
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17/526,301 | U.S. Patent Application

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