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A SPRING-MASS MICROELECTROMECHANICAL RESONATOR

17/602,351 | U.S. Patent Application

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Filed Oct. 8, 2021
Examiner Emily P Pham
Class 310
Art Group 2837
Patent No. 12,323,131
Case Type Utility
Status Patented Case
Last Updated: 2 days, 9 hours ago
Date # Transaction