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Inventors

Yasuhiro Shirasaki Makoto Sakakibara Momoyo Enyama Hajime Kawano Akira Ikegami

Applicant

Hitachi High-Tech Corporation

Assignee

HITACHI HIGH-TECH CORPORATION

Other Parties

KAWANO, HAJIME, Assignor SAKAKIBARA, MAKOTO, Assignor IKEGAMI, AKIRA, Assignor SHIRASAKI, YASUHIRO, Assignor ENYAMA, MOMOYO, Assignor

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CHARGED PARTICLE BEAM DEVICE

17/638,275 | U.S. Patent Application

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Filed Feb. 25, 2022

Examiner Sean M Luck

Class 250

Art Group 2881

Patent No. 12,125,667

Case Type Utility

Status Patented Case

Last Updated: 2 weeks, 5 days ago

Date	#	Transaction
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CHARGED PARTICLE BEAM DEVICE

17/638,275 | U.S. Patent Application

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