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Click below for detailed party information:

Inventor

Reita IGARASHI

Applicant

Tokyo Electron Limited

Assignee

TOKYO ELECTRON LIMITED

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IGARASHI, REITA, Assignor

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PROCESSING APPARATUS

17/650,090 | U.S. Patent Application

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Filed Feb. 7, 2022

Examiner Rudy Zervigon

Class 118

Art Group 1716

Patent No. 11,970,778

Case Type Utility

Status Patented Case

Last Updated: 4 days, 14 hours ago

Date	#	Transaction
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17/650,090 | U.S. Patent Application

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