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Click below for detailed party information:

Inventors

Bo Chen CHEN Sheng-Wei Wu Yung-Li Tsai

Applicant

Taiwan Semiconductor Manufacturing Co., Ltd.

Assignee

TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

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TSAI, YUNG-LI, Assignor WU, SHENG-WEI, Assignor CHEN, BO CHEN, Assignor

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CONTAMINATION CONTROL IN SEMICONDUCTOR MANUFACTURING SYSTEMS

17/700,041 | U.S. Patent Application

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Filed March 21, 2022

Examiner Pradhuman Parihar

Class 134

Art Group 1714

Patent No. 12,020,964

Case Type Utility

Status Patented Case

Last Updated: 3 weeks, 5 days ago

Date	#	Transaction
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CONTAMINATION CONTROL IN SEMICONDUCTOR MANUFACTURING SYSTEMS

17/700,041 | U.S. Patent Application

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