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Click below for detailed party information:

Inventors

Kenji KAWAGUCHI Toru Endo Kota Tanikawa

Applicant

SCREEN Holdings Co., Ltd.

Assignee

SCREEN HOLDINGS CO., LTD.

Other Parties

ENDO, TORU, Assignor KAWAGUCHI, KENJI, Assignor TANIKAWA, KOTA, Assignor

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SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

17/704,343 | U.S. Patent Application

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Filed March 25, 2022

Examiner Tinsae B Ayalew

Class 134

Art Group 1711

Patent No. 11,883,858

Case Type Utility

Status Patented Case

Last Updated: 2 weeks, 6 days ago

Date	#	Transaction
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SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

17/704,343 | U.S. Patent Application

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