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Click below for detailed party information:

Inventors

Lifu LI Takaki KOBUNE Hiroshi TSUJIMOTO

Applicant

Tokyo Electron Limited

Assignee

TOKYO ELECTRON LIMITED

Other Parties

LI, LIFU, Assignor TSUJIMOTO, HIROSHI, Assignor KOBUNE, TAKAKI, Assignor

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UPPER ELECTRODE ASSEMBLY

17/708,600 | U.S. Patent Application

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Filed March 30, 2022

Examiner Sylvia Macarthur

Class 118

Art Group 1716

Patent No. 12,387,914

Case Type Utility

Status Patented Case

Last Updated: 2 weeks, 1 day ago

Date	#	Transaction
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UPPER ELECTRODE ASSEMBLY

17/708,600 | U.S. Patent Application

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