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Inventors

Isao Mori Masaru Izawa Naoki Yasui Norihiko Ikeda Kazuya Yamada

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HITACHI HIGH-TECH CORPORATION

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PLASMA PROCESSING APPARATUS

17/861,515 | U.S. Patent Application

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Filed July 11, 2022

Examiner Srinivas Sathiraju

Class 315

Art Group 2844

Patent No. 11,978,612

Case Type Utility

Status Patented Case

Last Updated: 1 week, 1 day ago

Date	#	Transaction
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17/861,515 | U.S. Patent Application

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