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Click below for detailed party information:

Inventors

Shen-Nan LEE Te-Chien HOU Teng-Chun TSAI Chung-Wei HSU Chen-Hao WU

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TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Assignee

TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Other Parties

HOU, TE-CHIEN, Assignor HSU, CHUNG-WEI, Assignor LEE, SHEN-NAN, Assignor TSAI, TENG-CHUN, Assignor WU, CHEN-HAO, Assignor

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METHOD FOR CONDITIONING POLISHING PAD

17/866,538 | U.S. Patent Application

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Filed July 17, 2022

Examiner Jonathan R Zaworski

Class 451

Art Group 3723

Patent No. 12,528,154

Case Type Utility

Status Patented Case

Last Updated: 4 days, 13 hours ago

Date	#	Transaction
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METHOD FOR CONDITIONING POLISHING PAD

17/866,538 | U.S. Patent Application

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