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Click below for detailed party information:

Inventors

Shinichiro KAWAKAMI Yohei SANO Tomoya ONITSUKA

Applicant

Tokyo Electron Limited

Assignee

TOKYO ELECTRON LIMITED

Other Parties

KAWAKAMI, SHINICHIRO, Assignor ONITSUKA, TOMOYA, Assignor SANO, YOHEI, Assignor

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HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

17/906,644 | U.S. Patent Application

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Filed Sept. 19, 2022

Examiner Mesfin T Asfaw

Class 355

Art Group 2882

Patent No. 12,298,668

Case Type Utility

Status Patented Case

Last Updated: 4 days, 13 hours ago

Date	#	Transaction
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HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

17/906,644 | U.S. Patent Application

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