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Inventors

KEEWON KIM DAEHAN KIM MINKYUNG LEE

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Samsung Electronics Co., Ltd.

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APPARATUS FOR AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

17/930,728 | U.S. Patent Application

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Filed Sept. 9, 2022

Examiner John Joseph Brayton

Class 438

Art Group 1794

Patent No. 12,252,778

Case Type Utility

Status Patented Case

Last Updated: 3 weeks, 2 days ago

Date	#	Transaction
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APPARATUS FOR AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

17/930,728 | U.S. Patent Application

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