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Inventors

Ryuichi NEMOTO Kensuke MIYAO

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JSR CORPORATION

Assignees

JSR CORPORATION JICC-02 CO., LTD.JSR CORPORATION JSR CORPORATION

Other Parties

MIYAO, KENSUKE, Assignor NEMOTO, RYUICHI, Assignor JSR CORPORATION, Assignor JICC-02 CO., LTD., Assignor JICC-02 CO., LTD., Assignor

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RADIATION-SENSITIVE RESIN COMPOSITION AND METHOD FOR FORMING PATTERN

17/994,515 | U.S. Patent Application

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Filed Nov. 28, 2022

Examiner Anca Eoff

Class 430

Art Group 1722

Patent No. 12,517,429

Case Type Utility

Status Patented Case

Last Updated: 1 week, 1 day ago

Date	#	Transaction
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RADIATION-SENSITIVE RESIN COMPOSITION AND METHOD FOR FORMING PATTERN

17/994,515 | U.S. Patent Application

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