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Click below for detailed party information:

Inventors

Hiroki SAKURAI Kazuki KOSAI Kazuyoshi SHINOHARA

Applicant

Tokyo Electron Limited

Assignee

TOKYO ELECTRON LIMITED

Other Parties

SHINOHARA, KAZUYOSHI, Assignor KOSAI, KAZUKI, Assignor SAKURAI, HIROKI, Assignor

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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

18/297,042 | U.S. Patent Application

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Filed April 7, 2023

Examiner Alexander Markoff

Class 134

Art Group 1711

Patent No. 12,027,394

Case Type Utility

Status Patented Case

Last Updated: 1 week ago

Date	#	Transaction
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

18/297,042 | U.S. Patent Application

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