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Click below for detailed party information:

Inventors

Jong-Seok LEE Seung-Min OH In-Il JUNG

Applicant

TES CO., LTD

Assignee

TES CO., LTD

Other Parties

JUNG, IN-IL, Assignor LEE, JONG-SEOK, Assignor OH, SEUNG-MIN, Assignor

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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE MONITORING METHOD

18/525,785 | U.S. Patent Application Cite Docket

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Filed Nov. 30, 2023

Examiner Richard Z Zhang

Class 134

Art Group 1714

Patent No. 12,500,102

Case Type Utility

Status Patented Case

Last Updated: 3 weeks, 1 day ago

Date	#	Transaction
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE MONITORING METHOD

18/525,785 | U.S. Patent Application Cite Docket

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