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Click below for detailed party information:

Inventors

Hu LI Takeo NAKANO

Applicant

Tokyo Electron Limited

Assignee

TOKYO ELECTRON LIMITED

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NAKANO, TAKEO, Assignor LI, HU, Assignor

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SUBSTRATE PROCESSING METHOD

18/684,223 | U.S. Patent Application

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Filed Sept. 13, 2024

Examiner Bradford M Gates

Class 427

Art Group 1713

Patent No. 12,709,795

Case Type Utility

Status Patented Case

Last Updated: 3 days, 2 hours ago

Date	#	Transaction
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SUBSTRATE PROCESSING METHOD

18/684,223 | U.S. Patent Application

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