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Click below for detailed party information:

Inventors

Takayuki YAMAGISHI Tomohiro ABE

Applicant

TOKYO ELECTRON LIMITED

Assignee

TOKYO ELECTRON LIMITED

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ABE, TOMOHIRO, Assignor YAMAGISHI, TAKAYUKI, Assignor

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SYSTEM FOR PROCESSING SUBSTRATE AND MAINTENANCE METHOD THEREOF

18/71,039 | U.S. Patent Application

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Filed Nov. 29, 2022

Examiner Glenn F Myers

Class 414

Art Group 3652

Patent No. 12,387,948

Case Type Utility

Status Patented Case

Last Updated: 1 day, 2 hours ago

Date	#	Transaction
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SYSTEM FOR PROCESSING SUBSTRATE AND MAINTENANCE METHOD THEREOF

18/71,039 | U.S. Patent Application

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