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Click below for detailed party information:

Inventors

Te-Sheng WANG Xiang Wan

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ASML NETHERLANDS B.V.

Assignee

ASML NETHERLANDS B.V.

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WAN, XIANG, Assignor WANG, TE-SHENG, Assignor

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APPARATUS AND METHOD FOR PROCESS-WINDOW CHARACTERIZATION

18/90,750 | U.S. Patent Application

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Filed Dec. 29, 2022

Examiner Mesfin T Asfaw

Class 355

Art Group 2882

Patent No. 12,197,134

Case Type Utility

Status Patented Case

Last Updated: 1 week, 3 days ago

Date	#	Transaction
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APPARATUS AND METHOD FOR PROCESS-WINDOW CHARACTERIZATION

18/90,750 | U.S. Patent Application

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