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Inventors

JAMES E. NULTY CHRISTOPHER J. PETTI

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FORTRESS CREDIT CO LLC

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CYPRESS SEMICONDUCTOR CORPORATION, Assignor DSS TECHNOLOGY MANAGEMENT, INC., Assignor

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METHOD FOR ELIMINATING LATERAL SPACER EROSION ON ENCLOSED CONTACT TOPOGRAPHIES DURING RF SPUTTER CLEANING

08/577,751 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Dec. 22, 1995

Examiner LYNNE ANN GURLEY

Class 438

Art Group 2812

Patent No. 6,066,555

Case Type Utility - 438/634000

Status Patented Case

Child 09/540,610 Patented

Last Updated: 4 years, 2 months ago

Date	#	Transaction
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METHOD FOR ELIMINATING LATERAL SPACER EROSION ON ENCLOSED CONTACT TOPOGRAPHIES DURING RF SPUTTER CLEANING

08/577,751 | U.S. Patent Application

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