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Click below for detailed party information:

Inventors

DAVID E. ASPNES JON OPSAL

Assignee

THERMA-WAVE, INC.

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THERMA-WAVE, INC., Assignor BANKERS TRUST COMPANY, Assignor

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BROADBEND SPECTROSCOPIC ROTATING COMPENSATOR ELLIPSOMETER

08/685,606 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed July 24, 1996

Examiner ZANDRA SMITH, V

Class 356

Art Group 2877

Patent No. 5,877,859

Case Type Utility - 356/364000

Status Patented Case

Child 09/76,673 Patented

Child PCT/US97/13313 Published

Child 09/345,560 Patented

Child 09/619,456 Patented

Child 09/944,831 Patented

Child 10/206,428 Patented

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Last Updated: 4 years, 3 months ago

Date	#	Transaction
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BROADBEND SPECTROSCOPIC ROTATING COMPENSATOR ELLIPSOMETER

08/685,606 | U.S. Patent Application

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