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Inventors

GEORGY VINOGRADOV SHIMAO YONEYAMA

Assignee

FLAMM, DANIEL L.

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MC ELECTRONICS CO., LTD., Assignor KEM, INC., Assignor

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A HIGH FREQUENCY PLASMA PROCESS WHEREIN THE PLASMA IS EXECUTED BY AN INDUCTIVE STRUCTURE IN WHICH THE PHASE AND ANTI-PHASE PORTION OF THE CAPACITATIVE CURRENTS BETWEEN THE INDUCTIVE STRUCTURE AND THE PLASMA A RE BALANCED

08/739,037 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Oct. 28, 1996

Examiner THI D DANG

Class 216

Art Group 1763

Patent No. 5,965,034

Case Type Utility - 216/068000

Status Patented Case

Parent 08/567,224 Abandoned

Last Updated: 4 years, 7 months ago

Date	#	Transaction
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A HIGH FREQUENCY PLASMA PROCESS WHEREIN THE PLASMA IS EXECUTED BY AN INDUCTIVE STRUCTURE IN WHICH THE PHASE AND ANTI-PHASE PORTION OF THE CAPACITATIVE CURRENTS BETWEEN THE INDUCTIVE STRUCTURE AND THE PLASMA A RE BALANCED

08/739,037 | U.S. Patent Application

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