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PROCESS DEPENDING ON PLASMA DISCHARGES SUSTAINED BY INDUCTIVE COUPLING

08/748,746 | U.S. Patent Application

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Location ELECTRONIC
Filed Nov. 18, 1996
Examiner LUZ L ALEJANDRO MULERO
Class 216
Art Group 1763
Patent No. 6,858,112
Case Type Utility - 216/002000
Status Patented Case
Parent 08/567,224 Abandoned
Child 08/927,973 Abandoned
Last Updated: 6 years, 2 months ago
Date # Transaction