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Inventors

DANIEL L. FLAMM Georgy Vinogradov Shimao Yoneyama

Assignee

KEM, INC

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PROCESS DEPENDING ON PLASMA DISCHARGES SUSTAINED BY INDUCTIVE COUPLING

08/748,746 | U.S. Patent Application

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Location ELECTRONIC

Filed Nov. 18, 1996

Examiner LUZ L ALEJANDRO MULERO

Class 216

Art Group 1763

Patent No. 6,858,112

Case Type Utility - 216/002000

Status Patented Case

Parent 08/567,224 Abandoned

Child 08/927,973 Abandoned

Last Updated: 4 years, 5 months ago

Date	#	Transaction
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PROCESS DEPENDING ON PLASMA DISCHARGES SUSTAINED BY INDUCTIVE COUPLING

08/748,746 | U.S. Patent Application

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