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METHOD OF FORMING A TUNGSTEN-PLUG CONTACT FOR A SEMICONDUCTOR DEVICE

08/846,471 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed May 1, 1997
Examiner CARIDAD EVERHART
Class 438
Art Group 2812
Patent No. 6,020,259
Case Type Utility - 438/648000
Status Patented Case
Last Updated: 3 years, 1 month ago
Date # Transaction