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METHOD OF FORMING A CONTACT HOLE IN AN INTERLEVEL DIELECTRIC LAYER USING DUAL ETCH STOPS

08/905,686 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Aug. 4, 1997
Examiner WILLIAM A POWELL
Class 438
Art Group 1765
Patent No. 5,912,188
Case Type Utility - 438/740000
Status Patented Case
Last Updated: 3 years ago
Date # Transaction