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METHOD AND APPARATUS FOR TRENCH ISOLATION PROCESS WITH PAD GATE AND TRENCH EDGE SPACER ELIMINATION

09/32,231 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Feb. 27, 1998
Examiner WALTER LEE LINDSAY JR
Class 438
Art Group 2812
Patent No. 6,107,157
Case Type Utility - 438/396000
Status Patented Case
Child 09/386,646 Patented
Child 09/644,282 Patented
Child 09/655,001 Patented
Child 11/8,778 Abandoned
Last Updated: 1 year, 4 months ago
Date # Transaction