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PROCESS DEPENDING ON PLASMA DISCHARGES SUSTAINED BY INDUCTIVE COUPLING

09/451,633 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Nov. 30, 1999
Examiner WILLIAM A POWELL
Class 438
Art Group 1765
Patent No. 6,127,275
Case Type Utility - 438/710000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/866,040 Patented
Parent 08/736,315 Abandoned
Parent 08/567,224 Abandoned
Last Updated: 12 months ago
Date # Transaction