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POLISHING AGENT FOR SEMICONDUCTOR SUBSTRATES

09/491,296 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Jan. 25, 2000
Examiner GEORGE BINH MINH NGUYEN
Class 451
Art Group 3723
Patent No. 6,447,372
Case Type Utility - 451/060000
Status Patented Case
Parent PCT/DE98/02050 -
Child 197 32 121.6
Last Updated: 6 years, 4 months ago
Date # Transaction