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Inventors

Shuichi Kanno Hisao Yamashita Tomohiko Miyamoto Shin Tamata Yoshiki Shibano Takeo Komuro Tsugihiro Yukitake Terufumi Kawasaki

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HITACHI, LTD.

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Apparatus for treating perfluorocompound gas

09/651,783 | U.S. Patent Application

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Location ELECTRONIC

Filed Aug. 30, 2000

Examiner NGOC YEN M NGUYEN

Class 423

Art Group 1793

Case Type Utility - 423/24000S

Status Abandoned -- Failure to Respond to an Office Action

Child 10/137,449 Patented

Child 11-335468

Last Updated: 5 years, 8 months ago

Date	#	Transaction
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Apparatus for treating perfluorocompound gas

09/651,783 | U.S. Patent Application

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