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Trung Tri Doan

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CHEMICAL MECHANICAL POLISHING PROCESS

09/717,477 | U.S. Patent Application

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Location ELECTRONIC

Filed Nov. 20, 2000

Examiner TIMOTHY ELEY, V

Class 451

Art Group 3724

Patent No. 6,974,367

Case Type Utility - 451/036000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Parent 09/389,536 Patented

Child 10/387,087 Patented

Child 10/387,178 Patented

Child 10/626,791 Patented

Child 11/134,586 Patented

Last Updated: 4 years, 10 months ago

Date	#	Transaction
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CHEMICAL MECHANICAL POLISHING PROCESS

09/717,477 | U.S. Patent Application

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