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METHOD FOR FORMING A TRENCH IN A SEMICONDUCTOR SUBSTRATE

09/917,554 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed July 27, 2001
Examiner LONG PHAM
Class 438
Art Group 2814
Patent No. 6,673,693
Case Type Utility - 438/409000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child 100 36 724.0
Last Updated: 5 years, 2 months ago
Date # Transaction